Patent | Date |
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Load lock system for charged particle beam imaging Grant 10,176,967 - Huang , et al. J | 2019-01-08 |
Load Lock System For Charged Particle Beam Imaging App 20180240645 - HUANG; HSUAN-BIN ;   et al. | 2018-08-23 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask Grant 10,054,556 - Wang , et al. August 21, 2 | 2018-08-21 |
Structure Electron Beam Inspection System For Inspecting Extreme Ultraviolet Mask And Structure For Discharging Extreme Ultraviolet Mask App 20170053774 - WANG; You-Jin ;   et al. | 2017-02-23 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask Grant 9,572,237 - Wang , et al. February 14, 2 | 2017-02-14 |
Discharging method for charged particle beam imaging Grant 9,460,887 - Wang , et al. October 4, 2 | 2016-10-04 |
Structure Electron Beam Inspection System For Inspecting Extreme Ultraviolet Mask And Structure For Discharging Extreme Ultraviolet Mask App 20150305131 - WANG; You-Jin ;   et al. | 2015-10-22 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask Grant 9,113,538 - Wang , et al. August 18, 2 | 2015-08-18 |
Method for inspecting EUV reticle and apparatus thereof Grant 8,692,193 - Kuan , et al. April 8, 2 | 2014-04-08 |
Structure For Discharging Extreme Ultraviolet Mask App 20140027634 - WANG; You-Jin ;   et al. | 2014-01-30 |
Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system Grant 8,604,428 - Wang , et al. December 10, 2 | 2013-12-10 |
Structure for discharging extreme ultraviolet mask Grant 8,575,573 - Wang , et al. November 5, 2 | 2013-11-05 |
Structure For Discharging Extreme Ultraviolet Mask App 20120292509 - WANG; You-Jin ;   et al. | 2012-11-22 |
Method for venting gas into closed space and gas supply assembly thereof Grant 8,302,420 - Wang November 6, 2 | 2012-11-06 |
Method For Inspecting Euv Reticle And Apparatus Thereof App 20120228494 - KUAN; CHIYAN ;   et al. | 2012-09-13 |
Method for inspecting EUV reticle and apparatus thereof Grant 8,217,349 - Kuan , et al. July 10, 2 | 2012-07-10 |
Method For Inspecting Euv Reticle And Apparatus Thereof App 20120032076 - KUAN; CHIYAN ;   et al. | 2012-02-09 |
Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system Grant 8,110,818 - Wang , et al. February 7, 2 | 2012-02-07 |
Method Of Controlling Particle Absorption On A Wafer Sample Being Inspected By A Charged Particle Beam Imaging System App 20120006984 - WANG; You-Jin ;   et al. | 2012-01-12 |
Apparatus for detecting a sample Grant 8,089,637 - Wang , et al. January 3, 2 | 2012-01-03 |
Z-stage configuration and application thereof Grant 8,031,344 - Wang , et al. October 4, 2 | 2011-10-04 |
Z-stage Configuration And Application Thereof App 20110101222 - WANG; YOU-JIN ;   et al. | 2011-05-05 |
Method and handling apparatus for placing patterning device on support member for charged particle beam imaging Grant 7,868,303 - Wang , et al. January 11, 2 | 2011-01-11 |
Patterning device holding apparatus and application thereof Grant 7,838,848 - Huang , et al. November 23, 2 | 2010-11-23 |
Dischaging Method For Charged Particle Beam Imaging App 20100288923 - Wang; You-Jin ;   et al. | 2010-11-18 |
Method For Venting Gas Into Closed Space And Gas Supply Assembly Thereof App 20100270467 - WANG; YOU-JIN | 2010-10-28 |
Apparatus For Detecting A Sample App 20100165346 - WANG; YOU-JIN ;   et al. | 2010-07-01 |
Patterning Device Holding Apparatus And Application Thereof App 20100102226 - HUANG; Hsuan-Bin ;   et al. | 2010-04-29 |
Method And Handling Apparatus For Placing Patterning Device On Support Member For Charged Particle Beam Imaging App 20100090107 - WANG; You-Jin ;   et al. | 2010-04-15 |
Method Of Controlling Particle Absorption On A Wafer Sample Being Inspected By A Charged Particle Beam Imaging System App 20100084554 - Wang; You-Jin ;   et al. | 2010-04-08 |