Wang; Yen-kun Victor

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wang; Yen-kun Victor.The latest application filed is for "substrate support providing gap height and planarization adjustment in plasma processing chamber".

Company Profile

1.12.15

Wang; Yen-kun Victor - Union City CA
Wang; Yen-Kun Victor - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate support providing gap height and planarization adjustment in plasma processing chamber Grant RE47,275 - Antolik , et al.	2019-03-05
Substrate support providing gap height and planarization adjustment in plasma processing chamber Grant 8,895,452 - Antolik , et al. November 25, 2	2014-11-25
Method for reduction of voltage potential spike during dechucking Grant 8,628,675 - McMillin , et al. January 14, 2	2014-01-14
Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Grant 8,624,210 - Wang , et al. January 7, 2	2014-01-07
Substrate Support Providing Gap Height And Planarization Adjustment In Plasma Processing Chamber App 20130323860 - Antolik; Jerrel Kent ; et al.	2013-12-05
Ozone Plenum As Uv Shutter Or Tunable Uv Filter For Cleaning Semiconductor Substrates App 20130288488 - Wang; Yen-Kun Victor ; et al.	2013-10-31
Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Grant 8,492,736 - Wang , et al. July 23, 2	2013-07-23
Method And Apparatus For Reduction Of Voltage Potential Spike During Dechucking App 20130059447 - McMillin; Brian ; et al.	2013-03-07
Method and apparatus for reduction of voltage potential spike during dechucking Grant 8,313,612 - McMillin , et al. November 20, 2	2012-11-20
Ozone Plenum As Uv Shutter Or Tunable Uv Filter For Cleaning Semiconductor Substrates App 20110306213 - Wang; Yen-Kun Victor ; et al.	2011-12-15
Variable Seal Pressure Slit Valve Doors For Semiconductor Manufacturing Equipment App 20110120017 - Bang; Won B. ; et al.	2011-05-26
Variable seal pressure slit valve doors for semiconductor manufacturing equipment Grant 7,841,582 - Bang , et al. November 30, 2	2010-11-30
Method And Apparatus For Reduction Of Voltage Potential Spike During Dechucking App 20100248490 - McMillin; Brian ; et al.	2010-09-30
Adjusting a spacing between a gas distribution member and a substrate support Grant 7,754,282 - Floyd , et al. July 13, 2	2010-07-13
Gas baffle and distributor for semiconductor processing chamber Grant 7,722,719 - Lei , et al. May 25, 2	2010-05-25
Substrate positioning on a vacuum chuck App 20090197356 - Bang; Won B. ; et al.	2009-08-06
Uniformly Compressed Process Chamber Gate Seal for Semiconductor Processing Chamber App 20090113684 - Bang; Won B. ; et al.	2009-05-07
Substrate placement determination using substrate backside pressure measurement App 20070076345 - Bang; Won B. ; et al.	2007-04-05
Variable seal pressure slit valve doors for semiconductor manufacturing equipment App 20050269334 - Bang, Won B. ; et al.	2005-12-08
Uniformly compressed process chamber gate seal for semiconductor processing chamber App 20050268857 - Bang, Won B. ; et al.	2005-12-08
Bypass set up for integration of remote optical endpoint for CVD chamber App 20040089420 - Ng, Wendy ; et al.	2004-05-13
Bypass set up for integration of remote optical endpoint for CVD chamber App 20030027428 - Ng, Wendy ; et al.	2003-02-06
Low profile thick film heaters in multi-slot bake chamber Grant 6,506,994 - Wang , et al. January 14, 2	2003-01-14
Low Profile Thick Film Heaters In Multi-slot Bake Chamber App 20020190051 - Wang, Yen-Kun Victor ; et al.	2002-12-19

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