Wang; Xiangzhao

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wang; Xiangzhao.The latest application filed is for "apparatus and method for detecting wavefront aberration of objective lens".

Company Profile

1.9.9

Wang; Xiangzhao - Shanghai CN

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus And Method For Detecting Wavefront Aberration Of Objective Lens App 20220299402 - Li; Peng ; et al.	2022-09-22
Method for high-accuracy wavefront measurement base on grating shearing interferometry Grant 11,340,118 - Lu , et al. May 24, 2	2022-05-24
Method For High-accuracy Wavefront Measurement Base On Grating Shearing Interferometry App 20220074793 - LU; Yunjun ; et al.	2022-03-10
Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof Grant 11,215,512 - Tang , et al. January 4, 2	2022-01-04
Light Intensity Fluctuation-insensitive Projection Objective Wave Aberration Detection Device And Detection Method Thereof App 20210208005 - TANG; Feng ; et al.	2021-07-08
Device and method for detecting projection objective wave-front aberration Grant 11,029,611 - Tang , et al. June 8, 2	2021-06-08
Method for wavefront measurement of optical imaging system based on grating shearing interferometry Grant 11,009,336 - Lu , et al. May 18, 2	2021-05-18
Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometer Grant 10,969,274 - Lu , et al. April 6, 2	2021-04-06
Device And Method For Detecting Projection Objective Wave-front Aberration App 20210026250 - Tang; Feng ; et al.	2021-01-28
Method For Detecting Wavefront Aberration For Optical Imaging System Based On Grating Shearing Interferometer App 20200292384 - LU; Yunjun ; et al.	2020-09-17
Method For Wavefront Measurement Of Optical Imaging System Based On Grating Shearing Interferometry App 20200292296 - LU; Yunjun ; et al.	2020-09-17
Measuring device having ideal wavefront generator for detecting point diffraction interferometric wavefront aberration of measured optical system and method for detecting wavefront aberration thereof Grant 9,863,841 - Wang , et al. January 9, 2	2018-01-09
Multi field point aberration parallel metrology device and method for lithographic projection lens Grant 9,766,154 - Dai , et al. September 19, 2	2017-09-19
Measuring Device For Point Diffraction Interferometric Wavefront Aberration And Method For Detecting Wave Aberration App 20170184455 - Wang; Xiangzhao ; et al.	2017-06-29
Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberration Grant 9,658,114 - Tang , et al. May 23, 2	2017-05-23
Multi Field Point Aberration Parallel Metrology Device And Method For Lithographic Projection Lens App 20170131176 - Dai; Fengzhao ; et al.	2017-05-11
Method for in-situ aberration measurement of optical imaging system in lithographic tools Grant 8,035,801 - Wang , et al. October 11, 2	2011-10-11
Method For In-situ Aberration Measurement Of Optical Imaging System In Lithographic Tools App 20100177294 - Wang; Fan ; et al.	2010-07-15

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