Wang; Wei W.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Wang; Wei W..The latest application filed is for "gas flow system".
Company Profile
7.28.35
- Wang; Wei W. - Santa Clara CA
- Wang; Wei W. - Cupertino CA
Patent Activity
| Patent | Date |
|---|---|
| Gas flow system Grant 11,211,230 - Miller , et al. December 28, 2 | 2021-12-28 |
| Methods and apparatus for co-sputtering multiple targets Grant 11,101,117 - Subramani , et al. August 24, 2 | 2021-08-24 |
| Methods and apparatus for multi-cathode substrate processing Grant 11,011,357 - Wu , et al. May 18, 2 | 2021-05-18 |
| Gas Flow System App 20200335310 - MILLER; Keith A. ; et al. | 2020-10-22 |
| Substrate Support Pedestal App 20200312683 - LAVITSKY; Ilya ; et al. | 2020-10-01 |
| Methods And Apparatus For Co-sputtering Multiple Targets App 20200013597 - SUBRAMANI; Anantha K. ; et al. | 2020-01-09 |
| Methods and apparatus for co-sputtering multiple targets Grant 10,468,238 - Subramani , et al. No | 2019-11-05 |
| Physical vapor deposition processing systems target cooling Grant 10,325,763 - Wang , et al. | 2019-06-18 |
| In-situ temperature measurement in a noisy environment Grant 10,249,522 - Wu , et al. | 2019-04-02 |
| Methods And Apparatus For Multi-cathode Substrate Processing App 20180240655 - WU; HANBING ; et al. | 2018-08-23 |
| Physical Vapor Deposition Processing Systems Target Cooling App 20180211826 - Wang; Wei W. ; et al. | 2018-07-26 |
| Rotatable heated electrostatic chuck Grant 9,853,579 - Subramani , et al. December 26, 2 | 2017-12-26 |
| Bipolar collimator utilized in a physical vapor deposition chamber Grant 9,831,074 - Lee , et al. November 28, 2 | 2017-11-28 |
| In-situ Temperature Measurement In A Noisy Environment App 20170271182 - WU; Hanbing ; et al. | 2017-09-21 |
| In-situ temperature measurement in a noisy environment Grant 9,673,074 - Wu , et al. June 6, 2 | 2017-06-06 |
| Methods And Apparatus For Co-sputtering Multiple Targets App 20170053784 - SUBRAMANI; Anantha K. ; et al. | 2017-02-23 |
| Substrate support with radio frequency (RF) return path Grant 9,340,866 - Ritchie , et al. May 17, 2 | 2016-05-17 |
| Rotatable Heated Electrostatic Chuck App 20150170952 - SUBRAMANI; ANANTHA K. ; et al. | 2015-06-18 |
| Substrate Heating Pedestal Having Ceramic Balls App 20150144263 - RIKER; Martin ; et al. | 2015-05-28 |
| Bipolar Collimator Utilized In A Physical Vapor Deposition Chamber App 20150114823 - LEE; Joung Joo ; et al. | 2015-04-30 |
| Substrate cleaning chamber and components Grant 8,980,045 - Riker , et al. March 17, 2 | 2015-03-17 |
| Method for removing oxides Grant 8,846,163 - Kao , et al. September 30, 2 | 2014-09-30 |
| In-situ Temperature Measurement In A Noisy Environment App 20140269826 - WU; Hanbing ; et al. | 2014-09-18 |
| Multi Chamber Processing System App 20140076234 - KAO; Chien-Teh ; et al. | 2014-03-20 |
| Method for metal deposition using hydrogen plasma Grant 8,637,410 - Subramani , et al. January 28, 2 | 2014-01-28 |
| Method And Apparatus For Substrate Preclean With Hydrogen Containing High Frequency Rf Plasma App 20130330920 - Liu; Guojun ; et al. | 2013-12-12 |
| Substrate Support With Radio Frequency (rf) Return Path App 20130256126 - RITCHIE; ALAN ; et al. | 2013-10-03 |
| Method for Metal Deposition Using Hydrogen Plasma App 20120258602 - Subramani; Anantha K. ; et al. | 2012-10-11 |
| Method For Removing Oxides App 20120244704 - KAO; Chien-Teh ; et al. | 2012-09-27 |
| Substrate Cleaning Chamber And Components App 20110232845 - RIKER; Martin ; et al. | 2011-09-29 |
| Method For Removing Oxides App 20110223755 - KAO; CHIEN-TEH ; et al. | 2011-09-15 |
| Substrate cleaning chamber and components Grant 7,942,969 - Riker , et al. May 17, 2 | 2011-05-17 |
| Detachable electrostatic chuck for supporting a substrate in a process chamber Grant 7,907,384 - Brown , et al. March 15, 2 | 2011-03-15 |
| Physical vapor deposition plasma reactor with arcing suppression Grant 7,804,040 - Brown , et al. September 28, 2 | 2010-09-28 |
| Method for front end of line fabrication Grant 7,767,024 - Kao , et al. August 3, 2 | 2010-08-03 |
| Detachable electrostatic chuck Grant 7,697,260 - Brown , et al. April 13, 2 | 2010-04-13 |
| Apparatus and a method for cleaning a dielectric film Grant 7,658,802 - Fu , et al. February 9, 2 | 2010-02-09 |
| Cleaning of native oxide with hydrogen-containing radicals Grant 7,604,708 - Wood , et al. October 20, 2 | 2009-10-20 |
| Detachable electrostatic chuck for supporting a substrate in a process chamber App 20090201622 - Brown; Karl ; et al. | 2009-08-13 |
| Method For Removing Oxides App 20090111280 - Kao; Chien-Teh ; et al. | 2009-04-30 |
| Lid assembly for front end of line fabrication Grant 7,520,957 - Kao , et al. April 21, 2 | 2009-04-21 |
| Detachable electrostatic chuck for supporting a substrate in a process chamber Grant 7,480,129 - Brown , et al. January 20, 2 | 2009-01-20 |
| Substrate Cleaning Chamber And Components App 20080295872 - Riker; Martin ; et al. | 2008-12-04 |
| Method For Front End Of Line Fabrication App 20080268645 - KAO; CHIEN-TEH ; et al. | 2008-10-30 |
| Method for front end of line fabrication Grant 7,396,480 - Kao , et al. July 8, 2 | 2008-07-08 |
| Physical vapor deposition plasma reactor with arcing suppression App 20070193982 - Brown; Karl M. ; et al. | 2007-08-23 |
| Physical vapor deposition plasma reactor with VHF source power applied through the workpiece Grant 7,244,344 - Brown , et al. July 17, 2 | 2007-07-17 |
| Apparatus and a method for cleaning a dielectric film App 20070113868 - Fu; Xinyu ; et al. | 2007-05-24 |
| Physical vapor deposition plasma reactor with VHF source power applied through the workpiece App 20060169576 - Brown; Karl M. ; et al. | 2006-08-03 |
| Detachable electrostatic chuck for supporting a substrate in a process chamber App 20060002053 - Brown; Karl ; et al. | 2006-01-05 |
| In-situ dry clean chamber for front end of line fabrication App 20050230350 - Kao, Chien-Teh ; et al. | 2005-10-20 |
| Lid assembly for front end of line fabrication App 20050218507 - Kao, Chien-Teh ; et al. | 2005-10-06 |
| Substrate support for in-situ dry clean chamber for front end of line fabrication App 20050221552 - Kao, Chien-Teh ; et al. | 2005-10-06 |
| Detachable electrostatic chuck App 20050219786 - Brown, Karl ; et al. | 2005-10-06 |
| Method for front end of line fabrication App 20050205110 - Kao, Chien-Teh ; et al. | 2005-09-22 |
| Cleaning of native oxide with hydrogen-containing radicals App 20040219789 - Wood, Bingxi Sun ; et al. | 2004-11-04 |
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