Wang; Shih-Chi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Wang; Shih-Chi.The latest application filed is for "apparatus for charged particle lithography system".
- Wang; Shih-Chi - Zhubei TW
- WANG; SHIH-CHI - Hsinchu County TW
- Wang; Shih-Chi - Taipei N/A TW
- Wang; Shih-Chi - Taipei City TW
| Patent | Date |
|---|---|
| Apparatus for charged particle lithography system Grant 9,911,575 - Wang , et al. March 6, 2 | 2018-03-06 |
| Apparatus for Charged Particle Lithography System App 20160322199 - WANG; SHIH-CHI ; et al. | 2016-11-03 |
| Apparatus for charged particle lithography system Grant 9,390,891 - Wang , et al. July 12, 2 | 2016-07-12 |
| Apparatus for Charged Particle Lithography System App 20160049278 - Wang; Shih-Chi ; et al. | 2016-02-18 |
| Efficient scan for E-beam lithography Grant 8,987,689 - Chen , et al. March 24, 2 | 2015-03-24 |
| Smart subfield method for E-beam lithography Grant 8,945,803 - Chen , et al. February 3, 2 | 2015-02-03 |
| Data process for E-beam lithography Grant 8,877,410 - Chen , et al. November 4, 2 | 2014-11-04 |
| Smart Subfield Method For E-Beam Lithographny App 20140099582 - Chen; Pei-Shiang ; et al. | 2014-04-10 |
| Apparatus for charged particle lithography system Grant 8,677,511 - Wang , et al. March 18, 2 | 2014-03-18 |
| Data Process for E-Beam Lithography App 20140023972 - Chen; Cheng-Hung ; et al. | 2014-01-23 |
| Smart subfield method for E-beam lithography Grant 8,609,308 - Chen , et al. December 17, 2 | 2013-12-17 |
| Smart Subfield Method For E-beam Lithography App 20130323648 - Chen; Pei-Shiang ; et al. | 2013-12-05 |
| Efficient Scan For E-beam Lithography App 20130320243 - Chen; Cheng-Hung ; et al. | 2013-12-05 |
| Geometric pattern data quality verification for maskless lithography Grant 8,601,407 - Wang , et al. December 3, 2 | 2013-12-03 |
| Apparatus For Charged Particle Lithography System App 20130293899 - Wang; Shih-Chi ; et al. | 2013-11-07 |
| Data process for E-beam lithography Grant 8,563,224 - Chen , et al. October 22, 2 | 2013-10-22 |
| Geometric Pattern Data Quality Verification For Maskless Lithography App 20130055173 - Wang; Hung-Chun ; et al. | 2013-02-28 |
| File-converting Method And Application Thereof App 20100088070 - Wang; Shih-Chi ; et al. | 2010-04-08 |
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