| Patent | Date |
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Multi-zone temperature control for semiconductor wafer
Grant 10,113,233 - Chang , et al. October 30, 2 | 2018-10-30 |
Method and system for tool condition monitoring based on a simulated inline measurement
Grant 10,047,439 - Tsai , et al. August 14, 2 | 2018-08-14 |
System and method for controlling ion implanter
Grant 9,870,896 - Tsai , et al. January 16, 2 | 2018-01-16 |
Qualitative fault detection and classification system for tool condition monitoring and associated methods
Grant 9,727,049 - Ho , et al. August 8, 2 | 2017-08-08 |
Real-time calibration for wafer processing chamber lamp modules
Grant 9,698,065 - Chang , et al. July 4, 2 | 2017-07-04 |
Multi-zone Temperature Control For Semiconductor Wafer
App 20170022611 - CHANG; Chun-Lin ; et al. | 2017-01-26 |
Systems and associated methods for tuning processing tools
Grant 9,519,285 - Tsai , et al. December 13, 2 | 2016-12-13 |
Integrated circuit manufacturing tool condition monitoring system and method
Grant 9,349,660 - Tsai , et al. May 24, 2 | 2016-05-24 |
Systems and methods of automatic boundary control for semiconductor processes
Grant 9,250,619 - Hsu , et al. February 2, 2 | 2016-02-02 |
Real-Time Calibration for Wafer Processing Chamber Lamp Modules
App 20160027708 - Chang; Chih-Tien ; et al. | 2016-01-28 |
Real-time calibration for wafer processing chamber lamp modules
Grant 9,159,597 - Chang , et al. October 13, 2 | 2015-10-13 |
Semiconductor processing dispatch control
Grant 9,158,301 - Wu , et al. October 13, 2 | 2015-10-13 |
Multi-zone Temperature Control For Semiconductor Wafer
App 20150211122 - CHANG; Chun-Lin ; et al. | 2015-07-30 |
System And Method For Controlling Ion Implanter
App 20150162166 - TSAI; Po-Feng ; et al. | 2015-06-11 |
APC model extension using existing APC models
Grant 9,026,239 - Tsai , et al. May 5, 2 | 2015-05-05 |
Multi-zone temperature control for semiconductor wafer
Grant 9,023,664 - Chang , et al. May 5, 2 | 2015-05-05 |
Semiconductor Processing Dispatch Control
App 20140303765 - Wu; Sunny ; et al. | 2014-10-09 |
Tool Optimizing Tuning Systems And Associated Methods
App 20140207271 - Tsai; Po-Feng ; et al. | 2014-07-24 |
Semiconductor processing dispatch control
Grant 8,781,614 - Wu , et al. July 15, 2 | 2014-07-15 |
E-chuck with automated clamped force adjustment and calibration
Grant 8,685,759 - Wang , et al. April 1, 2 | 2014-04-01 |
Adaptive And Automatic Determination Of System Parameters
App 20140074258 - TSAI; Po-Feng ; et al. | 2014-03-13 |
Qualitative Fault Detection And Classification System For Tool Condition Monitoring And Associated Methods
App 20140067324 - Ho; Chia-Tong ; et al. | 2014-03-06 |
Adaptive and automatic determination of system parameters
Grant 8,606,387 - Tsai , et al. December 10, 2 | 2013-12-10 |
Real-time Calibration For Wafer Processing Chamber Lamp Modules
App 20130306621 - Chang; Chih-Tien ; et al. | 2013-11-21 |
Processing exception handling
Grant 8,549,012 - Tsai , et al. October 1, 2 | 2013-10-01 |
Multi-zone Temperature Control For Semiconductor Wafer
App 20130171746 - Chang; Chun-Lin ; et al. | 2013-07-04 |
Method And System For Tool Condition Monitoring
App 20130150997 - Tsai; Po-Feng ; et al. | 2013-06-13 |
Integrated Circuit Manufacturing Tool Condition Monitoring System And Method
App 20130144419 - Tsai; Po-Feng ; et al. | 2013-06-06 |
Systems And Methods Of Automatic Boundary Control For Semiconductor Processes
App 20130144423 - HSU; Chih-Wei ; et al. | 2013-06-06 |
Device performance parmeter tuning method and system
Grant 8,452,439 - Wu , et al. May 28, 2 | 2013-05-28 |
Multi-zone temperature control for semiconductor wafer
Grant 8,404,572 - Chang , et al. March 26, 2 | 2013-03-26 |
Method and system for implementing virtual metrology in semiconductor fabrication
Grant 8,396,583 - Tsai , et al. March 12, 2 | 2013-03-12 |
Semiconductor Processing Dispatch Control
App 20130013097 - Wu; Sunny ; et al. | 2013-01-10 |
Semiconductor processing dispatch control
Grant 8,295,965 - Wu , et al. October 23, 2 | 2012-10-23 |
Device Performance Parmeter Tuning Method And System
App 20120239178 - Wu; Sunny ; et al. | 2012-09-20 |
Advanced process control for new tapeout product
Grant 8,239,056 - Hsu , et al. August 7, 2 | 2012-08-07 |
Physical failure analysis guiding methods
Grant 8,205,173 - Wu , et al. June 19, 2 | 2012-06-19 |
Adaptive And Automatic Determination Of System Parameters
App 20120130525 - TSAI; Po-Feng ; et al. | 2012-05-24 |
System and method for implementing a wafer acceptance test ("WAT") advanced process control ("APC") with novel sampling policy and architecture
Grant 8,108,060 - Tsen , et al. January 31, 2 | 2012-01-31 |
Semiconductor Processing Dispatch Control
App 20120016509 - Wu; Sunny ; et al. | 2012-01-19 |
Physical Failure Analysis Guiding Methods
App 20110314336 - Wu; Sunny ; et al. | 2011-12-22 |
APC Model Extension Using Existing APC Models
App 20110301736 - Tsai; Po-Feng ; et al. | 2011-12-08 |
Processing Exception Handling
App 20110282885 - Tsai; Po-Feng ; et al. | 2011-11-17 |
Method for bin-based control
Grant 8,041,451 - Wu , et al. October 18, 2 | 2011-10-18 |
Method And System For Implementing Virtual Metrology In Semiconductor Fabrication
App 20110238198 - Tsai; Po-Feng ; et al. | 2011-09-29 |
Method and system of monitoring E-beam overlay and providing advanced process control
Grant 7,977,655 - Wang , et al. July 12, 2 | 2011-07-12 |
Advanced Process Control For New Tapeout Product
App 20110112678 - Hsu; Chih-Wei ; et al. | 2011-05-12 |
E-chuck With Automated Clamped Force Adjustment And Calibration
App 20110042006 - Wang; Jo Fei ; et al. | 2011-02-24 |
E-chuck for automated clamped force adjustment and calibration
Grant 7,851,233 - Wang , et al. December 14, 2 | 2010-12-14 |
Method And System Of Monitoring E-beam Overlay And Providing Advanced Process Control
App 20100294955 - Wang; Jo Fei ; et al. | 2010-11-25 |
System And Method For Implementing A Wafer Acceptance Test ("wat") Advanced Process Control ("apc") With Novel Sampling Policy And Architecture
App 20100292824 - Tsen; Andy ; et al. | 2010-11-18 |
Method For Bin-based Control
App 20100268367 - Wu; Sunny ; et al. | 2010-10-21 |
E-chuck For Automated Clamped Force Adjustment And Calibration
App 20100248398 - Wang; Jo Fei ; et al. | 2010-09-30 |
Multi-zone Temperature Control For Semiconductor Wafer
App 20100210041 - Chang; Chun-Lin ; et al. | 2010-08-19 |
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