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Methods For Improving Process Based Contour Information Of Structure In Image
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Method For Training Machine Learning Model For Improving Patterning Process
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Method For Patterning Process Modelling
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Method For Determining Pattern In A Patterning Process
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Method For Determining Stochastic Variation Of Printed Patterns
App 20220137514 - WANG; Chang An ; et al. | 2022-05-05 |
Modeling Post-exposure Processes
App 20210294218 - FAN; Yongfa ; et al. | 2021-09-23 |
Methods Of Determining Process Models By Machine Learning
App 20210271172 - Luo; Ya ; et al. | 2021-09-02 |
Method For Improving A Process For A Patterning Process
App 20210208507 - WANG; Jen-Shiang ; et al. | 2021-07-08 |
Selection of substrate measurement recipes
Grant 10,983,440 - Wang , et al. April 20, 2 | 2021-04-20 |
Methods of determining process models by machine learning
Grant 10,948,831 - Luo , et al. March 16, 2 | 2021-03-16 |
Substrate measurement recipe configuration to improve device matching
Grant 10,691,029 - Gu , et al. | 2020-06-23 |
Methods Of Determining Process Models By Machine Learning
App 20200026196 - LUO; Ya ; et al. | 2020-01-23 |
Methods Of Tuning Process Models
App 20190369498 - FENG; Mu ; et al. | 2019-12-05 |
Etch Bias Characterization And Method Of Using The Same
App 20190354020 - FAN; Yongfa ; et al. | 2019-11-21 |
Selection Of Substrate Measurement Recipes
App 20190258172 - WANG; Jen-Shiang ; et al. | 2019-08-22 |
Substrate Measurement Recipe Configuration To Improve Device Matching
App 20190250519 - GU; Ning ; et al. | 2019-08-15 |
Process based metrology target design
Grant 10,296,681 - Chen , et al. | 2019-05-21 |
Process Based Metrology Target Design
App 20180268093 - CHEN; Guangqing ; et al. | 2018-09-20 |
Process based metrology target design
Grant 10,007,744 - Chen , et al. June 26, 2 | 2018-06-26 |
Metrology method and apparatus
Grant 9,903,823 - Lu , et al. February 27, 2 | 2018-02-27 |
Method And Apparatus For Inspection And Metrology
App 20180046737 - WILLEMS; Lotte Marloes ; et al. | 2018-02-15 |
Method and apparatus for design of a metrology target
Grant 9,804,504 - Chen , et al. October 31, 2 | 2017-10-31 |
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
Grant 9,696,635 - Engelen , et al. July 4, 2 | 2017-07-04 |
Method and apparatus for design of a metrology target
Grant 9,494,874 - Chen , et al. November 15, 2 | 2016-11-15 |
Method And Apparatus For Design Of A Metrology Target
App 20160252820 - CHEN; Guangqing ; et al. | 2016-09-01 |
Method and apparatus for design of a metrology target
Grant 9,355,200 - Chen , et al. May 31, 2 | 2016-05-31 |
Metrology Method And Apparatus
App 20160146740 - Lu; Yen-Wen ; et al. | 2016-05-26 |
Process Based Metrology Target Design
App 20160140267 - CHEN; Guangqing ; et al. | 2016-05-19 |
Method And Apparatus For Design Of A Metrology Target
App 20150186581 - Chen; Guangqing ; et al. | 2015-07-02 |
Method And Apparatus For Design Of A Metrology Target
App 20150185626 - CHEN; Guangqing ; et al. | 2015-07-02 |
Method Of Controlling A Lithographic Apparatus, Device Manufacturing Method, Lithographic Apparatus, Computer Program Product And Method Of Improving A Mathematical Model Of A Lithographic Process
App 20120229786 - ENGELEN; Adrianus Franciscus Petrus ; et al. | 2012-09-13 |
Elastomer spatial light modulators for extreme ultraviolet lithography
Grant 7,092,138 - Wang , et al. August 15, 2 | 2006-08-15 |
Elastomer spatial light modulators for extreme ultraviolet lithography
App 20050146768 - Wang, Jen-Shiang ; et al. | 2005-07-07 |
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