loadpatents
Patent applications and USPTO patent grants for Wang; Deqi.The latest application filed is for "feature fill with nucleation inhibition".
Patent | Date |
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Tungsten feature fill with nucleation inhibition Grant 11,410,883 - Chandrashekar , et al. August 9, 2 | 2022-08-09 |
Display panel including multiple pixel units and display device Grant 11,315,983 - Wang April 26, 2 | 2022-04-26 |
Feature Fill With Nucleation Inhibition App 20220102208 - Chandrashekar; Anand ;   et al. | 2022-03-31 |
Display Panel And Display Device App 20210408156 - WANG; Deqi | 2021-12-30 |
Tungsten Feature Fill App 20210327754 - Chandrashekar; Anand ;   et al. | 2021-10-21 |
Doubled-side Display Device And Manufacturing Method Thereof App 20210305342 - WANG; Deqi | 2021-09-30 |
Tungsten feature fill Grant 11,075,115 - Chandrashekar , et al. July 27, 2 | 2021-07-27 |
Feature fill with multi-stage nucleation inhibition Grant 10,916,434 - Wang , et al. February 9, 2 | 2021-02-09 |
Feature Fill With Multi-stage Nucleation Inhibition App 20200185225 - Wang; Deqi ;   et al. | 2020-06-11 |
Feature Fill With Nucleation Inhibition App 20200185273 - Chandrashekar; Anand ;   et al. | 2020-06-11 |
Feature fill with nucleation inhibition Grant 10,580,695 - Chandrashekar , et al. | 2020-03-03 |
Feature fill with multi-stage nucleation inhibition Grant 10,580,654 - Wang , et al. | 2020-03-03 |
Tungsten Feature Fill With Nucleation Inhibition App 20190326168 - Yang; Tsung-Han ;   et al. | 2019-10-24 |
Tungsten Feature Fill With Nucleation Inhibition App 20190206731 - Chandrashekar; Anand ;   et al. | 2019-07-04 |
Tungsten feature fill with nucleation inhibition Grant 10,256,142 - Chandrashekar , et al. | 2019-04-09 |
Feature Fill With Multi-stage Nucleation Inhibition App 20190080914 - Wang; Deqi ;   et al. | 2019-03-14 |
Chamber conditioning for remote plasma process Grant 10,211,099 - Wang , et al. Feb | 2019-02-19 |
Tungsten Feature Fill App 20190019725 - Chandrashekar; Anand ;   et al. | 2019-01-17 |
Feature fill with multi-stage nucleation inhibition Grant 10,170,320 - Wang , et al. J | 2019-01-01 |
Tungsten feature fill Grant 10,103,058 - Chandrashekar , et al. October 16, 2 | 2018-10-16 |
Feature Fill With Nucleation Inhibition App 20180277431 - Chandrashekar; Anand ;   et al. | 2018-09-27 |
Chamber Conditioning For Remote Plasma Process App 20180174901 - Wang; Deqi ;   et al. | 2018-06-21 |
Feature fill with nucleation inhibition Grant 9,997,405 - Chandrashekar , et al. June 12, 2 | 2018-06-12 |
Tungsten Feature Fill With Nucleation Inhibition App 20170365513 - Yang; Tsung-Han ;   et al. | 2017-12-21 |
Tungsten Feature Fill App 20170278749 - Chandrashekar; Anand ;   et al. | 2017-09-28 |
Tungsten feature fill Grant 9,653,353 - Chandrashekar , et al. May 16, 2 | 2017-05-16 |
Method For Depositing Extremely Low Resistivity Tungsten App 20170133231 - Bamnolker; Hanna ;   et al. | 2017-05-11 |
Method for depositing extremely low resistivity tungsten Grant 9,589,808 - Bamnolker , et al. March 7, 2 | 2017-03-07 |
Feature Fill With Multi-stage Nucleation Inhibition App 20160343612 - Wang; Deqi ;   et al. | 2016-11-24 |
Tungsten Feature Fill App 20160190008 - Chandrashekar; Anand ;   et al. | 2016-06-30 |
Feature Fill With Nucleation Inhibition App 20160093528 - Chandrashekar; Anand ;   et al. | 2016-03-31 |
Tungsten Feature Fill With Nucleation Inhibition App 20160071764 - Chandrashekar; Anand ;   et al. | 2016-03-10 |
Tungsten feature fill Grant 9,240,347 - Chandrashekar , et al. January 19, 2 | 2016-01-19 |
Method For Depositing Extremely Low Resistivity Tungsten App 20150179461 - Bamnolker; Hanna ;   et al. | 2015-06-25 |
Methods of forming tensile tungsten films and compressive tungsten films Grant 9,034,760 - Chen , et al. May 19, 2 | 2015-05-19 |
Tungsten Feature Fill App 20150056803 - Chandrashekar; Anand ;   et al. | 2015-02-26 |
Method for depositing tungsten film with low roughness and low resistivity Grant 8,853,080 - Guan , et al. October 7, 2 | 2014-10-07 |
Method For Depositing Tungsten Film With Low Roughness And Low Resistivity App 20140073135 - Guan; Yan ;   et al. | 2014-03-13 |
Methods Of Forming Tensile Tungsten Films And Compressive Tungsten Films App 20140011358 - Chen; Feng ;   et al. | 2014-01-09 |
Tungsten Feature Fill App 20130302980 - Chandrashekar; Anand ;   et al. | 2013-11-14 |
Tungsten Feature Fill With Nucleation Inhibition App 20130171822 - Chandrashekar; Anand ;   et al. | 2013-07-04 |
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