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Methods And Systems For Compact, Small Spot Size Soft X-Ray Scatterometry
App 20220196576 - Wang; David Y. ; et al. | 2022-06-23 |
Reflective Compact Lens For Magneto-optic Kerr Effect Metrology System
App 20220137380 - ZHENG; Alex ; et al. | 2022-05-05 |
Overlay metrology on bonded wafers
Grant 11,309,202 - Krishnan , et al. April 19, 2 | 2022-04-19 |
Multi-environment polarized infrared reflectometer for semiconductor metrology
Grant 11,231,362 - Zhuang , et al. January 25, 2 | 2022-01-25 |
Mid-infrared spectroscopy for measurement of high aspect ratio structures
Grant 11,137,350 - Wang , et al. October 5, 2 | 2021-10-05 |
Methods and systems for measurement of thick films and high aspect ratio structures
Grant 11,119,050 - Sapiens , et al. September 14, 2 | 2021-09-14 |
Overlay Metrology On Bonded Wafers
App 20210242060 - Krishnan; Shankar ; et al. | 2021-08-05 |
Optical Metrology Tool Equipped With Modulated Illumination Sources
App 20210223166 - Shchegrov; Andrei V. ; et al. | 2021-07-22 |
Magneto-optic Kerr effect metrology systems
Grant 11,043,239 - Wang , et al. June 22, 2 | 2021-06-22 |
Optical metrology tool equipped with modulated illumination sources
Grant 10,969,328 - Shchegrov , et al. April 6, 2 | 2021-04-06 |
Methods and systems for co-located metrology
Grant 10,804,167 - Wang , et al. October 13, 2 | 2020-10-13 |
Semiconductor metrology based on hyperspectral imaging
Grant 10,801,953 - Wang , et al. October 13, 2 | 2020-10-13 |
Magneto-optic Kerr Effect Metrology Systems
App 20200302965 - Wang; Jun ; et al. | 2020-09-24 |
Methods And Systems For Measurement Of Thick Films And High Aspect Ratio Structures
App 20200284733 - Sapiens; Noam ; et al. | 2020-09-10 |
Mid-Infrared Spectroscopy For Measurement Of High Aspect Ratio Structures
App 20200240907 - Wang; David Y. ; et al. | 2020-07-30 |
Methods And Systems For Co-Located Metrology
App 20200243400 - Wang; David Y. ; et al. | 2020-07-30 |
Semiconductor Metrology Based On Hyperspectral Imaging
App 20200225151 - Wang; David Y. ; et al. | 2020-07-16 |
Methods and systems for measurement of thick films and high aspect ratio structures
Grant 10,690,602 - Sapiens , et al. | 2020-06-23 |
Optical Metrology Tool Equipped with Modulated Illumination Sources
App 20190195782 - Shchegrov; Andrei V. ; et al. | 2019-06-27 |
Method of providing photopatterned functional surfaces
Grant 10,234,763 - Owusu-Nkwantabisah , et al. | 2019-03-19 |
Infrared spectroscopic reflectometer for measurement of high aspect ratio structures
Grant 10,215,693 - Krishnan , et al. Feb | 2019-02-26 |
Optical metrology tool equipped with modulated illumination sources
Grant 10,215,688 - Shchegrov , et al. Feb | 2019-02-26 |
Method Of Providing Photopatterned Functional Surfaces
App 20180329302 - Owusu-Nkwantabisah; Silas ; et al. | 2018-11-15 |
Methods And Systems For Measurement Of Thick Films And High Aspect Ratio Structures
App 20180238814 - Sapiens; Noam ; et al. | 2018-08-23 |
Optical metrology with reduced focus error sensitivity
Grant 9,970,863 - Krishnan , et al. May 15, 2 | 2018-05-15 |
Infrared Spectroscopic Reflectometer For Measurement Of High Aspect Ratio Structures
App 20180088040 - Krishnan; Shankar ; et al. | 2018-03-29 |
Simultaneous multi-angle spectroscopy
Grant 9,921,104 - Krishnan , et al. March 20, 2 | 2018-03-20 |
Systems and methods for extended infrared spectroscopic ellipsometry
Grant 9,921,152 - Krishnan , et al. March 20, 2 | 2018-03-20 |
Broadband and wide field angle compensator
Grant 9,857,292 - Rotter , et al. January 2, 2 | 2018-01-02 |
Simultaneous Multi-Angle Spectroscopy
App 20170356800 - Krishnan; Shankar ; et al. | 2017-12-14 |
Finger-driven computer mouse
Grant 9,740,309 - Wang August 22, 2 | 2017-08-22 |
Systems And Methods For Extended Infrared Spectroscopic Ellipsometry
App 20170205342 - Krishnan; Shankar ; et al. | 2017-07-20 |
Broadband And Wide Field Angle Compensator
App 20170052112 - Rotter; Lawrence ; et al. | 2017-02-23 |
Optical Metrology Tool Equipped with Modulated Illumination Sources
App 20170016815 - Shchegrov; Andrei V. ; et al. | 2017-01-19 |
Broadband and wide field angle compensator
Grant 9,519,093 - Rotter , et al. December 13, 2 | 2016-12-13 |
Optical Metrology With Reduced Focus Error Sensitivity
App 20160245741 - Krishnan; Shankar ; et al. | 2016-08-25 |
Optical metrology tool equipped with modulated illumination sources
Grant 9,400,246 - Shchegrov , et al. July 26, 2 | 2016-07-26 |
Multiple angles of incidence semiconductor metrology systems and methods
Grant 9,310,290 - Wang , et al. April 12, 2 | 2016-04-12 |
Dynamically adjustable semiconductor metrology system
Grant 9,228,943 - Wang , et al. January 5, 2 | 2016-01-05 |
Finger-driven Computer Mouse
App 20150363010 - Wang; David Y. | 2015-12-17 |
Multiple Angles Of Incidence Semiconductor Metrology Systems And Methods
App 20150285735 - Wang; David Y. ; et al. | 2015-10-08 |
Light source tracking in optical metrology system
Grant 9,146,156 - Zhuang , et al. September 29, 2 | 2015-09-29 |
Multiple angles of incidence semiconductor metrology systems and methods
Grant 9,116,103 - Wang , et al. August 25, 2 | 2015-08-25 |
Broadband And Wide Field Angle Compensator
App 20150055123 - Rotter; Lawrence ; et al. | 2015-02-26 |
Multiple Angles Of Incidence Semiconductor Metrology Systems And Methods
App 20140375981 - Wang; David Y. ; et al. | 2014-12-25 |
Discrete polarization scatterometry
Grant 8,896,832 - Hill , et al. November 25, 2 | 2014-11-25 |
Metrology systems and methods for high aspect ratio and large lateral dimension structures
Grant 8,860,937 - Dziura , et al. October 14, 2 | 2014-10-14 |
Angle-resolved spectroscopic instrument
Grant 8,643,841 - Rotter , et al. February 4, 2 | 2014-02-04 |
Optical Metrology Tool Equipped with Modulated Illumination Sources
App 20130169966 - Shchegrov; Andrei V. ; et al. | 2013-07-04 |
Dynamically Adjustable Semiconductor Metrology System
App 20130114085 - Wang; David Y. ; et al. | 2013-05-09 |
Light Source Tracking In Optical Metrology System
App 20130033704 - Zhuang; Guorong V. ; et al. | 2013-02-07 |
System and method for performing photothermal measurements and relaxation compensation
Grant 8,111,399 - Rotter , et al. February 7, 2 | 2012-02-07 |
Discrete Polarization Scatterometry
App 20110310388 - Hill; Andrew V. ; et al. | 2011-12-22 |
System And Method For Performing Photothermal Measurements And Relaxation Compensation
App 20100328670 - Rotter; Lawrence D. ; et al. | 2010-12-30 |
Broadband wavelength selective filter
Grant 7,304,735 - Wang , et al. December 4, 2 | 2007-12-04 |
Measurement system with separate optimized beam paths
Grant 7,227,637 - Wang , et al. June 5, 2 | 2007-06-05 |
Techniques for reducing optical noise in metrology systems
App 20070121104 - Hendrix; James L. ; et al. | 2007-05-31 |
Infrared blocking filter for broadband Optical metrology
Grant 7,206,125 - Wang April 17, 2 | 2007-04-17 |
Focusing optics for small spot optical metrology
Grant 7,190,460 - Wang March 13, 2 | 2007-03-13 |
Flat spectrum illumination source for optical metrology
Grant 7,154,607 - Hendrix , et al. December 26, 2 | 2006-12-26 |
Measurement system with separate optimized beam paths
App 20060180761 - Wang; David Y. ; et al. | 2006-08-17 |
Measurement system with separate optimized beam paths
Grant 7,061,614 - Wang , et al. June 13, 2 | 2006-06-13 |
Optical metrology tool having improved contrast
Grant 7,050,162 - Opsal , et al. May 23, 2 | 2006-05-23 |
Method and apparatus for high-speed clock data recovery using low-speed circuits
Grant 7,020,227 - Wang , et al. March 28, 2 | 2006-03-28 |
Broadband wavelength selective filter
App 20050270524 - Wang, David Y. ; et al. | 2005-12-08 |
Infrared blocking filter for broadband optical metrology
App 20050099678 - Wang, David Y. | 2005-05-12 |
Broadband refractive objective for small spot optical metrology
Grant 6,879,449 - Wang , et al. April 12, 2 | 2005-04-12 |
Flat spectrum illumination source for optical metrology
App 20040150828 - Hendrix, James Lee ; et al. | 2004-08-05 |
Cross clocked lock detector circuit for phase locked loop
Grant 6,765,444 - Wang , et al. July 20, 2 | 2004-07-20 |
Spectroscopic ellipsometer wafer mapper for DUV to IR
App 20040135995 - Hendrix, James Lee ; et al. | 2004-07-15 |
Focusing optics for small spot optical metrology
App 20040125369 - Wang, David Y. | 2004-07-01 |
Compact imaging spectrometer
Grant 6,744,505 - Wang , et al. June 1, 2 | 2004-06-01 |
Lock detector circuit for phase locked loop
App 20040095197 - Wang, David Y. ; et al. | 2004-05-20 |
Broadband refractive objective for small spot optical metrology
App 20030214730 - Wang, David Y. ; et al. | 2003-11-20 |
Divide-by-N differential phase interpolator
Grant 6,597,212 - Wang , et al. July 22, 2 | 2003-07-22 |
Measurement system with separate optimized beam paths
App 20030071996 - Wang, David Y. ; et al. | 2003-04-17 |
Flip-flop with metastability reduction
Grant 6,531,905 - Wang March 11, 2 | 2003-03-11 |
Differential active loop filter for phase locked loop circuits
Grant 6,429,734 - Wang , et al. August 6, 2 | 2002-08-06 |
Multi-phase data/clock recovery circuitry and methods for implementing same
Grant 6,266,799 - Lee , et al. July 24, 2 | 2001-07-24 |
Method for deriving reservoir lithology and fluid content from pre-stack inversion of seismic data
Grant 5,583,825 - Carrazzone , et al. December 10, 1 | 1996-12-10 |
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