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Tunnel field-effect transistors with superlattice channels Grant 8,669,163 - Bhuwalka , et al. March 11, 2 | 2014-03-11 |
Contact barrier structure and manufacturing methods Grant 8,030,210 - Wang , et al. October 4, 2 | 2011-10-04 |
Integrated etch and supercritical CO.sub.2 process and chamber design Grant 7,951,723 - Wang , et al. May 31, 2 | 2011-05-31 |
Tunnel Field-Effect Transistors with Superlattice Channels App 20110027959 - Bhuwalka; Krishna Kumar ;   et al. | 2011-02-03 |
Tunnel field-effect transistors with superlattice channels Grant 7,834,345 - Bhuwalka , et al. November 16, 2 | 2010-11-16 |
Contact Barrier Structure and Manufacturing Methods App 20100167485 - Wang; Ching-Ya ;   et al. | 2010-07-01 |
Contact barrier structure and manufacturing methods Grant 7,709,903 - Wang , et al. May 4, 2 | 2010-05-04 |
Method for passivating gate dielectric films Grant 7,667,247 - Wang , et al. February 23, 2 | 2010-02-23 |
Method to create damage-free porous low-k dielectric films and structures resulting therefrom Grant 7,588,995 - Yu , et al. September 15, 2 | 2009-09-15 |
System and method for forming a semiconductor device source/drain contact Grant 7,538,398 - Ke , et al. May 26, 2 | 2009-05-26 |
System and Method for Forming a Semiconductor Device Source/Drain Contact App 20080315321 - Ke; Chung-Hu ;   et al. | 2008-12-25 |
Contact barrier structure and manufacturing methods App 20080290421 - Wang; Ching-Ya ;   et al. | 2008-11-27 |
Method For Passivating Gate Dielectric Films App 20080242071 - Wang; Ching-Ya ;   et al. | 2008-10-02 |
Method for improving low-K dielectrics by supercritical fluid treatments Grant 7,387,973 - Wang , et al. June 17, 2 | 2008-06-17 |
Integrated Etch and Supercritical CO2 Process and Chamber Design App 20080108223 - Wang; Ching-Ya ;   et al. | 2008-05-08 |
Surface modification of a porous organic material through the use of a supercritical fluid Grant 7,354,623 - Wang , et al. April 8, 2 | 2008-04-08 |
Method for forming dual damascenes with supercritical fluid treatments Grant 7,332,449 - Wang , et al. February 19, 2 | 2008-02-19 |
Dual damascene cleaning method Grant 7,329,956 - Yu , et al. February 12, 2 | 2008-02-12 |
Repairing method for low-k dielectric materials Grant 7,314,828 - Lin , et al. January 1, 2 | 2008-01-01 |
Method for forming dual damascenes with supercritical fluid treatments App 20070241455 - Wang; Ching-Ya ;   et al. | 2007-10-18 |
Method to create damage-free porous Low-k dielectric films and structures resulting therefrom App 20070111535 - Yu; Chen-Hua ;   et al. | 2007-05-17 |
Repairing method for low-k dielectric materials App 20070020952 - Lin; Keng-Chu ;   et al. | 2007-01-25 |
Method for improving low-K dielectrics by supercritical fluid treatments App 20060073697 - Wang; Ching-Ya ;   et al. | 2006-04-06 |
Surface modification of a porous organic material through the use of a supercritical fluid App 20050260402 - Wang, Ching-Ya ;   et al. | 2005-11-24 |
Method of integrating post-etching cleaning process with deposition for semiconductor device App 20050158664 - Tseng, Joshua ;   et al. | 2005-07-21 |
System and method for dampening high pressure impact on porous materials Grant 6,875,285 - Wang , et al. April 5, 2 | 2005-04-05 |
System and method for dampening high pressure impact on porous materials App 20040211440 - Wang, Ching-Ya ;   et al. | 2004-10-28 |