Patent | Date |
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Rule-based deployment of assist features Grant 11,022,894 - Hsu , et al. June 1, 2 | 2021-06-01 |
Rule-based Deployment Of Assist Features App 20190294053 - HSU; Duan-Fu Stephen ;   et al. | 2019-09-26 |
Rule-based deployment of assist features Grant 10,331,039 - Hsu , et al. | 2019-06-25 |
Rule-based Deployment Of Assist Features App 20170329235 - HSU; Duan-Fu Stephen ;   et al. | 2017-11-16 |
Scattering bar OPC application method for sub-half wavelength lithography patterning Grant 8,039,180 - Laidig , et al. October 18, 2 | 2011-10-18 |
CPL mask and a method and program product for generating the same Grant 7,998,355 - Van Den Broeke , et al. August 16, 2 | 2011-08-16 |
Method and apparatus for performing model-based layout conversion for use with dipole illumination Grant 7,985,515 - Hsu , et al. July 26, 2 | 2011-07-26 |
Scattering Bar OPC Application Method for Sub-Half Wavelength Lithography Patterning App 20110143268 - Laidig; Thomas ;   et al. | 2011-06-16 |
Scattering bar OPC application method for sub-half wavelength lithography patterning Grant 7,892,707 - Laidig , et al. February 22, 2 | 2011-02-22 |
Method of two dimensional feature model calibration and optimization Grant 7,820,341 - Laidig , et al. October 26, 2 | 2010-10-26 |
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography Grant 7,774,736 - Broeke , et al. August 10, 2 | 2010-08-10 |
Method And Apparatus For Performing Model-based Layout Conversion For Use With Dipole Illumination App 20100167183 - HSU; Duan-Fu Stephen ;   et al. | 2010-07-01 |
Method and apparatus for performing model-based layout conversion for use with dipole illumination Grant 7,666,554 - Hsu , et al. February 23, 2 | 2010-02-23 |
Scattering Bar Opc Application Method For Sub-half Wavelength Lithography Patterning Field Of The Invention App 20090233186 - Laidig; Thomas ;   et al. | 2009-09-17 |
Method and apparatus for performing model based placement of phase-balanced scattering bars for sub-wavelength optical lithography Grant 7,550,235 - Shi , et al. June 23, 2 | 2009-06-23 |
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography Grant 7,549,140 - Van Den Broeke , et al. June 16, 2 | 2009-06-16 |
Scattering bar OPC application method for sub-half wavelength lithography patterning Grant 7,485,396 - Laidig , et al. February 3, 2 | 2009-02-03 |
Method for performing full-chip manufacturing reliability checking and correction Grant 7,434,195 - Hsu , et al. October 7, 2 | 2008-10-07 |
Scattering bar OPC application method for sub-half wavelength lithography patterning App 20080206656 - Laidig; Thomas ;   et al. | 2008-08-28 |
Method, program product and apparatus for generating assist features utilizing an image field map Grant 7,376,930 - Wampler , et al. May 20, 2 | 2008-05-20 |
Scattering bar OPC application method for sub-half wavelength lithography patterning Grant 7,354,681 - Laidig , et al. April 8, 2 | 2008-04-08 |
CPL mask and a method and program product for generating the same App 20080067143 - Broeke; Douglas Van den ;   et al. | 2008-03-20 |
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography Grant 7,247,574 - Broeke , et al. July 24, 2 | 2007-07-24 |
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography App 20070162889 - Broeke; Douglas Van Den ;   et al. | 2007-07-12 |
Method of two dimensional feature model calibration and optimization App 20070117030 - Laidig; Thomas ;   et al. | 2007-05-24 |
Method and apparatus for performing model-based layout conversion for use with dipole illumination App 20070042277 - Hsu; Duan-Fu Stephen ;   et al. | 2007-02-22 |
Method of two dimensional feature model calibration and optimization Grant 7,175,940 - Laidig , et al. February 13, 2 | 2007-02-13 |
Method and apparatus for performing model-based layout conversion for use with dipole illumination Grant 7,138,212 - Hsu , et al. November 21, 2 | 2006-11-21 |
Method for performing full-chip manufacturing reliability checking and correction App 20060080633 - Hsu; Michael ;   et al. | 2006-04-13 |
Method and apparatus for performing model based placement of phase-balanced scattering bars for sub-wavelength optical lithography App 20050142449 - Shi, Xuelong ;   et al. | 2005-06-30 |
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography App 20050125765 - Broeke, Doug Van Den ;   et al. | 2005-06-09 |
Scattering bar OPC application method for sub-half wavelength lithography patterning App 20050074677 - Laidig, Thomas ;   et al. | 2005-04-07 |
Method, program product and apparatus for generating assist features utilizing an image field map App 20050053848 - Wampler, Kurt E. ;   et al. | 2005-03-10 |
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography Grant 6,851,103 - Van Den Broeke , et al. February 1, 2 | 2005-02-01 |
Hybrid phase-shift mask Grant 6,835,510 - Chen , et al. December 28, 2 | 2004-12-28 |
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography App 20040209170 - Broeke, Douglas Van Den ;   et al. | 2004-10-21 |
Method and apparatus for performing model-based layout conversion for use with dipole illumination App 20040142251 - Hsu, Duan-Fu Stephen ;   et al. | 2004-07-22 |
Hybrid phase-shift mask App 20040067423 - Chen, Jang Fung ;   et al. | 2004-04-08 |
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography App 20040010770 - Broeke, Doug Van Den ;   et al. | 2004-01-15 |
Optical proximity correction method utilizing serifs having variable dimensions Grant 6,670,081 - Laidig , et al. December 30, 2 | 2003-12-30 |
Hybrid phase-shift mask Grant 6,623,895 - Chen , et al. September 23, 2 | 2003-09-23 |
Method of two dimensional feature model calibration and optimization App 20030082463 - Laidig, Thomas ;   et al. | 2003-05-01 |
Method of patterning sub-0.25.lambda. line features with high transmission, "attenuated" phase shift masks Grant 6,482,555 - Chen , et al. November 19, 2 | 2002-11-19 |
Method of patterning sub-0.25lambda line features with high transmission, "attenuated" phase shift masks App 20020048708 - Chen, J. Fung ;   et al. | 2002-04-25 |
Optical proximity correction method utilizing serifs having variable dimensions App 20020028393 - Laidig, Thomas ;   et al. | 2002-03-07 |
Hybrid phase-shift mask App 20020015899 - Chen, Jang Fung ;   et al. | 2002-02-07 |
Method of fine feature edge tuning with optically-halftoned mask Grant 6,114,071 - Chen , et al. September 5, 2 | 2000-09-05 |
Method for generating proximity correction features for a lithographic mask pattern Grant 5,663,893 - Wampler , et al. September 2, 1 | 1997-09-02 |