| Patent | Date |
|---|
Process Control For Atmospheric Plasma Treatment Of Surfaces
App 20210339034 - Walther; Steven R. | 2021-11-04 |
Wafer Temperature Measurement In An Ion Implantation System
App 20210242054 - CHEN; Chien-Li ; et al. | 2021-08-05 |
Apparatus and method for plasma ignition with a self-resonating device
Grant 10,076,020 - Smith , et al. September 11, 2 | 2018-09-11 |
Apparatus and Method for Plasma Ignition with a Self-Resonating Device
App 20170303382 - Smith; Shaun T. ; et al. | 2017-10-19 |
Apparatus and method for plasma ignition with a self-resonating device
Grant 9,736,920 - Smith , et al. August 15, 2 | 2017-08-15 |
Apparatus and Method for Plasma Ignition with a Self-Resonating Device
App 20160234924 - Smith; Shaun T. ; et al. | 2016-08-11 |
Apparatus and Method for Metastable Enhanced Plasma Ignition
App 20160233055 - Smith; Shaun ; et al. | 2016-08-11 |
Contoured Support Grid For Hermetically Sealed Thin Film Applications
App 20140209820 - Barry; Kenneth J. ; et al. | 2014-07-31 |
Electron beam exit window in electron beam emitter and method for forming the same
Grant 8,766,523 - Walther , et al. July 1, 2 | 2014-07-01 |
Patterned assembly for manufacturing a solar cell and a method thereof
Grant 8,470,616 - Sullivan , et al. June 25, 2 | 2013-06-25 |
Emitter Exit Window
App 20130009077 - Walther; Steven R. ; et al. | 2013-01-10 |
Methods and apparatuses for reducing heat on an emitter exit window
Grant 8,339,024 - Walther , et al. December 25, 2 | 2012-12-25 |
Technique for low-temperature ion implantation
Grant 8,319,196 - England , et al. November 27, 2 | 2012-11-27 |
Patterned Assembly For Manufacturing A Solar Cell And A Method Thereof
App 20120276684 - Sullivan; Paul ; et al. | 2012-11-01 |
Patterned assembly for manufacturing a solar cell and a method thereof
Grant 8,222,053 - Sullivan , et al. July 17, 2 | 2012-07-17 |
Technique For Low-temperature Ion Implantation
App 20110207308 - ENGLAND; Jonathan G. ; et al. | 2011-08-25 |
Techniques for temperature controlled ion implantation
Grant 7,993,698 - Blake , et al. August 9, 2 | 2011-08-09 |
Wafer bonding activated by ion implantation
Grant 7,939,424 - Erokhin , et al. May 10, 2 | 2011-05-10 |
Technique for low-temperature ion implantation
Grant 7,935,942 - England , et al. May 3, 2 | 2011-05-03 |
Emitter Exit Window
App 20110012495 - Walther; Steven R. ; et al. | 2011-01-20 |
Patterned assembly for manufacturing a solar cell and a method thereof
Grant 7,820,460 - Sullivan , et al. October 26, 2 | 2010-10-26 |
Cleave initiation using varying ion implant dose
Grant 7,820,527 - Nunan , et al. October 26, 2 | 2010-10-26 |
Predicting dose repeatability in an ion implantation
Grant 7,820,987 - Evans , et al. October 26, 2 | 2010-10-26 |
Condensible Gas Cooling System
App 20100155026 - Walther; Steven R. | 2010-06-24 |
Techniques for detecting wafer charging in a plasma processing system
Grant 7,675,730 - Walther , et al. March 9, 2 | 2010-03-09 |
Patterned Assembly For Manufacturing A Solar Cell And A Method Thereof
App 20100041176 - SULLIVAN; Paul ; et al. | 2010-02-18 |
Local pressure sensing in a plasma processing system
Grant 7,638,781 - Walther , et al. December 29, 2 | 2009-12-29 |
Outgassing rate detection
Grant 7,615,748 - Walther , et al. November 10, 2 | 2009-11-10 |
Patterned Assembly For Manufacturing A Solar Cell And A Method Thereof
App 20090227062 - Sullivan; Paul ; et al. | 2009-09-10 |
Cleave Initiation Using Varying Ion Implant Dose
App 20090209084 - Nunan; Peter ; et al. | 2009-08-20 |
Nano-cleave A Thin-film Of Silicon For Solar Cell Fabrication
App 20090181492 - Nunan; Peter ; et al. | 2009-07-16 |
Predicting Dose Repeatability In An Ion Implantation
App 20090162953 - Evans; Morgan ; et al. | 2009-06-25 |
Non-uniform ion implantation
Grant 7,544,957 - Walther , et al. June 9, 2 | 2009-06-09 |
In situ surface contamination removal for ion implanting
Grant 7,544,959 - Walther , et al. June 9, 2 | 2009-06-09 |
Local Pressure Sensing In A Plasma Processing System
App 20090101848 - Walther; Steven R. ; et al. | 2009-04-23 |
Uniformity Control For Ion Beam Assisted Etching
App 20090084757 - Erokhin; Yuri ; et al. | 2009-04-02 |
Wafer Bonding Activated By Ion Implantation
App 20090081848 - EROKHIN; Yuri ; et al. | 2009-03-26 |
Outgassing Rate Detection
App 20090078871 - Walther; Steven R. ; et al. | 2009-03-26 |
Conformal Doping Using High Neutral Density Plasma Implant
App 20090008577 - Walther; Steven R. | 2009-01-08 |
Techniques For Detecting Wafer Charging In A Plasma Processing System
App 20080314731 - Walther; Steven R. ; et al. | 2008-12-25 |
Methods for stable and repeatable ion implantation
Grant 7,396,746 - Walther , et al. July 8, 2 | 2008-07-08 |
Method And Apparatuses For Providing Electrical Contact For Plasma Processing Applications
App 20080160212 - Koo; Bon-Woong ; et al. | 2008-07-03 |
Plasma implantation of deuterium for passivation of semiconductor-device interfaces
Grant 7,378,335 - Walther , et al. May 27, 2 | 2008-05-27 |
Techniques for temperature controlled ion implantation
App 20080076194 - Blake; Julian ; et al. | 2008-03-27 |
Non-uniform ion implantation
App 20080067434 - Walther; Steven R. ; et al. | 2008-03-20 |
Ion beam current monitoring
Grant 7,342,240 - Walther , et al. March 11, 2 | 2008-03-11 |
Technique for low-temperature ion implantation
App 20080044938 - England; Jonathan ; et al. | 2008-02-21 |
Plasma ion implantation systems and methods using solid source of dopant material
Grant 7,326,937 - Mehta , et al. February 5, 2 | 2008-02-05 |
Method and apparatus for controlling ion implantation during vacuum fluctuation
Grant RE40,008 - Walther January 22, 2 | 2008-01-22 |
Ion beam current monitoring
App 20070200075 - Walther; Steven R. ; et al. | 2007-08-30 |
Plasma implantation of deuterium for passivation of semiconductor-device interfaces
App 20070123012 - Walther; Steven R. ; et al. | 2007-05-31 |
Methods and apparatus for plasma implantation with improved dopant profile
App 20070069157 - Mehta; Sandeep ; et al. | 2007-03-29 |
Faraday dose and uniformity monitor for plasma based ion implantation
Grant 7,132,672 - Walther , et al. November 7, 2 | 2006-11-07 |
Plasma ion implantation systems and methods using solid source of dopant material
App 20060219952 - Mehta; Sandeep ; et al. | 2006-10-05 |
Shallow-junction fabrication in semiconductor devices via plasma implantation and deposition
App 20060205192 - Walther; Steven R. ; et al. | 2006-09-14 |
Plasma ion implantation system with axial electrostatic confinement
App 20060121704 - Walther; Steven R. ; et al. | 2006-06-08 |
Plasma implantation using halogenated dopant species to limit deposition of surface layers
App 20060099830 - Walther; Steven R. ; et al. | 2006-05-11 |
Reduction of source and drain parasitic capacitance in CMOS devices
App 20060043531 - Erokhin; Yuri ; et al. | 2006-03-02 |
Methods for stable and repeatable ion implantation
App 20050260837 - Walther, Steven R. ; et al. | 2005-11-24 |
In-situ process chamber preparation methods for plasma ion implantation systems
App 20050260354 - Singh, Vikram ; et al. | 2005-11-24 |
Faraday dose and uniformity monitor for plasma based ion implantation
App 20050223991 - Walther, Steven R. ; et al. | 2005-10-13 |
Methods and apparatus for plasma doping and ion implantation in an integrated processing system
Grant 6,716,727 - Walther April 6, 2 | 2004-04-06 |
Wafer clamping apparatus and method
Grant 6,686,598 - Walther February 3, 2 | 2004-02-03 |
Methods and apparatus for monitoring plasma parameters in plasma doping systems
App 20040016402 - Walther, Steven R. ; et al. | 2004-01-29 |
Plasma implantation system and method with target movement
App 20030116089 - Walther, Steven R. | 2003-06-26 |
Dose uniformity control for plasma doping systems
App 20030101935 - Walther, Steven R. | 2003-06-05 |
Methods and apparatus for plasma doping by anode pulsing
App 20030079688 - Walther, Steven R. ; et al. | 2003-05-01 |
Methods and apparatus for plasma doping and ion implantation in an integrated processing system
App 20030082891 - Walther, Steven R. | 2003-05-01 |
Wide dynamic range ion beam scanners
Grant 6,521,895 - Walther , et al. February 18, 2 | 2003-02-18 |
Method and apparatus for controlling ion implantation during vacuum fluctuation
Grant 6,323,497 - Walther November 27, 2 | 2001-11-27 |
Production of N.sup.+ ions from a multicusp ion beam apparatus
Grant 5,198,677 - Leung , et al. March 30, 1 | 1993-03-30 |
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