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Patent applications and USPTO patent grants for Walther; Jonas.The latest application filed is for "pattern generation systems and high bandwidth focus control system with suppressed reaction forces and noise".
Patent | Date |
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Multi-table lithographic systems, lithography processing tools and methods for processing workpieces Grant 8,488,105 - Walther July 16, 2 | 2013-07-16 |
Pattern generation systems and high bandwidth focus control system with suppressed reaction forces and noise Grant 8,467,117 - Walther , et al. June 18, 2 | 2013-06-18 |
Cartesian coordinate measurement for rotating system Grant 8,314,941 - Walther November 20, 2 | 2012-11-20 |
Pattern generation systems and high bandwidth focus control system with suppressed reaction forces and noise App 20110051211 - Walther; Jonas ;   et al. | 2011-03-03 |
Multi-table Lithographic Systems, Lithography Processing Tools And Methods For Processing Workpieces App 20100214552 - Walther; Jonas | 2010-08-26 |
Cortesian coordinate measurement for rotating system App 20100141966 - Walther; Jonas | 2010-06-10 |
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