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Patent applications and USPTO patent grants for Walters; Mark David.The latest application filed is for "microelectromechanical valves including single crystalline material components".
Patent | Date |
---|---|
Moveable microelectromechanical mirror structures and associated methods Grant 6,428,173 - Dhuler , et al. August 6, 2 | 2002-08-06 |
Microelectromechanical valves including single crystalline material components Grant 6,386,507 - Dhuler , et al. May 14, 2 | 2002-05-14 |
Microelectromechanical valves including single crystalline material components App 20010017358 - Dhuler, Vijayakumar R. ;   et al. | 2001-08-30 |
MEMS variable optical attenuator Grant 6,275,320 - Dhuler , et al. August 14, 2 | 2001-08-14 |
Microactuators including a metal layer on distal portions of an arched beam Grant 6,255,757 - Dhuler , et al. July 3, 2 | 2001-07-03 |
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