loadpatents
Patent applications and USPTO patent grants for Walsh; Thomas A..The latest application filed is for "method of grinding wafer stacks to provide uniform residual silicon thickness".
Patent | Date |
---|---|
Methods and systems for use in grind spindle alignment Grant 9,610,669 - Walsh , et al. April 4, 2 | 2017-04-04 |
Systems and methods of processing substrates Grant 9,393,669 - Kalenian , et al. July 19, 2 | 2016-07-19 |
Method of grinding wafer stacks to provide uniform residual silicon thickness Grant 9,082,713 - Brake , et al. July 14, 2 | 2015-07-14 |
Method Of Grinding Wafer Stacks To Provide Uniform Residual Silicon Thickness App 20150118826 - Kalenian; William J. ;   et al. | 2015-04-30 |
Systems and methods of wafer grinding Grant 8,968,052 - Walsh , et al. March 3, 2 | 2015-03-03 |
Methods And Systems For Use In Grind Spindle Alignment App 20140134927 - Walsh; Thomas A. ;   et al. | 2014-05-15 |
Method, apparatus and system for use in processing wafers Grant 8,565,919 - Kalenian , et al. October 22, 2 | 2013-10-22 |
Systems And Methods Of Processing Substrates App 20130130593 - Kalenian; William J. ;   et al. | 2013-05-23 |
Systems And Methods Of Wafer Grinding App 20130102227 - Walsh; Thomas A. ;   et al. | 2013-04-25 |
Grinding apparatus having an extendable wheel mount Grant 8,133,093 - Vogtmann , et al. March 13, 2 | 2012-03-13 |
Grinding apparatus having an extendable wheel mount App 20100093264 - Vogtmann; Michael ;   et al. | 2010-04-15 |
Grinding apparatus and method Grant 7,458,878 - Walsh , et al. December 2, 2 | 2008-12-02 |
Grinding apparatus and method App 20070128983 - Walsh; Thomas A. ;   et al. | 2007-06-07 |
Wafer Carrier Pivot Mechanism App 20070105491 - Walsh; Thomas A. ;   et al. | 2007-05-10 |
Wafer carrier pivot mechanism Grant 7,156,946 - Walsh , et al. January 2, 2 | 2007-01-02 |
Grinding apparatus and method Grant 7,118,446 - Walsh , et al. October 10, 2 | 2006-10-10 |
Chemical-mechanical planarization tool force calibration method and system App 20060205322 - Kalenian; William ;   et al. | 2006-09-14 |
Chemical-mechanical planarization tool force calibration method and system Grant 7,040,955 - Kalenian , et al. May 9, 2 | 2006-05-09 |
Wafer carrier pivot mechanism App 20040226656 - Walsh, Thomas A. ;   et al. | 2004-11-18 |
Grinding apparatus and method App 20040198196 - Walsh, Thomas A. ;   et al. | 2004-10-07 |
Grinding process and apparatus for planarizing sawed wafers Grant 5,964,646 - Kassir , et al. October 12, 1 | 1999-10-12 |
Semiconductor wafer polishing appartus and method Grant 5,605,487 - Hileman , et al. February 25, 1 | 1997-02-25 |
Lap shaping machine with oscillatable point cutter and selectively rotatable or oscillatable lap Grant 4,380,412 - Walsh April 19, 1 | 1983-04-19 |
Lap milling machine Grant 3,986,433 - Walsh , et al. October 19, 1 | 1976-10-19 |
SEC | 0001441798 | WALSH THOMAS A |
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