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Patent applications and USPTO patent grants for Walsh; Shawn M..The latest application filed is for "self-aligned dual damascene beol structures with patternable low- k material and methods of forming same".
Patent | Date |
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Self-aligned dual damascene BEOL structures with patternable low- K material and methods of forming same Grant 8,519,540 - Chen , et al. August 27, 2 | 2013-08-27 |
Self-aligned dual damascene BEOL structures with patternable low-k material and methods of forming same Grant 8,415,248 - Chen , et al. April 9, 2 | 2013-04-09 |
Self-aligned Dual Damascene Beol Structures With Patternable Low- K Material And Methods Of Forming Same App 20120231622 - Chen; Shyng-Tsong ;   et al. | 2012-09-13 |
Self-aligned Dual Damascene Beol Structures With Patternable Low- K Material And Methods Of Forming Same App 20100314767 - Chen; Shyng-Tsong ;   et al. | 2010-12-16 |
Apparatus and methods for producing tow based patterns App 20030196743 - Borbone, Vincent ;   et al. | 2003-10-23 |
Method and apparatus for the low cost formation and control of images on conformal materials Grant 6,580,413 - Walsh June 17, 2 | 2003-06-17 |
In-situ sensor method and device Grant 5,210,499 - Walsh May 11, 1 | 1993-05-11 |
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