loadpatents
name:-0.014307975769043
name:-0.011235952377319
name:-0.00046086311340332
Wallow; Thomas Patent Filings

Wallow; Thomas

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wallow; Thomas.The latest application filed is for "method for determining suitability of a resist in semiconductor wafer fabrication".

Company Profile
0.15.10
  • Wallow; Thomas - San Carlos CA
  • Wallow; Thomas - Union City CA
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Method for forming a photoresist pattern on a semiconductor wafer using oxidation-based catalysis
Grant 8,852,854 - Wallow , et al. October 7, 2
2014-10-07
Method for producing a high resolution resist pattern on a semiconductor wafer
Grant 8,715,912 - Okoroanyanwu , et al. May 6, 2
2014-05-06
Method for forming a high resolution resist pattern on a semiconductor wafer
Grant 8,586,269 - Okoroanyanwu , et al. November 19, 2
2013-11-19
Method for determining low-noise power spectral density for characterizing line edge roughness in semiconductor wafer processing
Grant 8,067,252 - Ma , et al. November 29, 2
2011-11-29
Method for determining suitability of a resist in semiconductor wafer fabrication
Grant 7,858,276 - Wallow , et al. December 28, 2
2010-12-28
EUV pellicle with increased EUV light transmittance
Grant 7,723,704 - Wood, II , et al. May 25, 2
2010-05-25
EUV debris mitigation filter and method for fabricating semiconductor dies using same
Grant 7,663,127 - Wood, II , et al. February 16, 2
2010-02-16
Methods for enhancing resolution of a chemically amplified photoresist
Grant 7,504,198 - LaFontaine , et al. March 17, 2
2009-03-17
Method for determining suitability of a resist in semiconductor wafer fabrication
App 20090011524 - Wallow; Thomas ;   et al.
2009-01-08
Method for producing a high resolution resist pattern on a semiconductor wafer
App 20080292996 - Okoroanyanwu; Uzodinma ;   et al.
2008-11-27
Method for forming a high resolution resist pattern on a semiconductor wafer
App 20080233494 - Okoroanyanwu; Uzodinma ;   et al.
2008-09-25
EUV debris mitigation filter and method for fabricating semiconductor dies using same
App 20080225245 - Wood; Obert Reeves ;   et al.
2008-09-18
Method for forming a photoresist pattern on a semiconductor wafer using oxidation-based catalysis
App 20080199813 - Wallow; Thomas ;   et al.
2008-08-21
Method for determining low-noise power spectral density for characterizing line edge roughness in semiconductor wafer processing
App 20080194046 - Ma; Yuansheng ;   et al.
2008-08-14
EUV pellicle with increased EUV light transmittance
App 20080113491 - Wood; Obert Reeves ;   et al.
2008-05-15
Methods for enhancing resolution of a chemically amplified photoresist
App 20070275321 - LaFontaine; Bruno ;   et al.
2007-11-29
Modified polycyclic polymers
Grant 6,794,459 - Jayaraman , et al. September 21, 2
2004-09-21
Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
Grant 6,723,486 - Goodall , et al. April 20, 2
2004-04-20
Modified polycyclic polymers
App 20030018153 - Jayaraman, Saikumar ;   et al.
2003-01-23
Modified polycyclic polymers
Grant 6,451,945 - Jayaraman , et al. September 17, 2
2002-09-17
Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
App 20020128408 - Goodall, Brian L. ;   et al.
2002-09-12
Polycyclic resist compositions with increased etch resistance
Grant 6,147,177 - Jayaraman , et al. November 14, 2
2000-11-14

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