Patent | Date |
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Advanced Lithography And Self-assembled Devices App 20220262722 - SCHENKER; Richard E. ;   et al. | 2022-08-18 |
Conductive cap-based approaches for conductive via fabrication and structures resulting therefrom Grant 11,417,567 - Gstrein , et al. August 16, 2 | 2022-08-16 |
Advanced lithography and self-assembled devices Grant 11,373,950 - Schenker , et al. June 28, 2 | 2022-06-28 |
Contact Over Active Gate Structures With Tapered Gate Or Trench Contact For Advanced Integrated Circuit Structure Fabrication App 20220190128 - WALLACE; Charles H. ;   et al. | 2022-06-16 |
Enhanced Grating Aligned Patterning For Euv Direct Print Processes App 20220172857 - M BARGHI; Seyedhamed ;   et al. | 2022-06-02 |
Contact Over Active Gate Structures Using Directed Self-assembly For Advanced Integrated Circuit Structure Fabrication App 20220102210 - NYHUS; Paul A. ;   et al. | 2022-03-31 |
Fabrication Of Gate-all-around Integrated Circuit Structures Having Adjacent Island Structures App 20220093589 - GULER; Leonard P. ;   et al. | 2022-03-24 |
Plug & Trench Architectures For Integrated Circuits & Methods Of Manufacture App 20220068707 - WALLACE; Charles H. ;   et al. | 2022-03-03 |
Pattern Decomposition Lithography Techniques App 20210375807 - WALLACE; Charles H. ;   et al. | 2021-12-02 |
Plug and trench architectures for integrated circuits and methods of manufacture Grant 11,171,043 - Wallace , et al. November 9, 2 | 2021-11-09 |
Conductive via and metal line end fabrication and structures resulting therefrom Grant 11,145,541 - Wallace , et al. October 12, 2 | 2021-10-12 |
Via & Plug Architectures For Integrated Circuit Interconnects & Methods Of Manufacture App 20210313222 - Guler; Leonard P. ;   et al. | 2021-10-07 |
Pattern decomposition lithography techniques Grant 11,107,786 - Wallace , et al. August 31, 2 | 2021-08-31 |
Gate Aligned Contact And Method To Fabricate Same App 20210125866 - GOLONZKA; Oleg ;   et al. | 2021-04-29 |
Self-aligned via and plug patterning for back end of line (BEOL) interconnects Grant 10,991,599 - Wallace , et al. April 27, 2 | 2021-04-27 |
Fuse Lines And Plugs For Semiconductor Devices App 20210104459 - BAINS; BALIJEET S. ;   et al. | 2021-04-08 |
Self-aligned Patterning With Colored Blocking And Structures Resulting Therefrom App 20210090997 - HARAN; Mohit K. ;   et al. | 2021-03-25 |
Contact Over Active Gate Structures With Metal Oxide Layers To Inhibit Shorting App 20210090990 - HOURANI; Rami ;   et al. | 2021-03-25 |
Advanced Lithography And Self-assembled Devices App 20210082800 - SCHENKER; Richard E. ;   et al. | 2021-03-18 |
Gate aligned contact and method to fabricate same Grant 10,910,265 - Golonzka , et al. February 2, 2 | 2021-02-02 |
Advanced lithography and self-assembled devices Grant 10,892,223 - Schenker , et al. January 12, 2 | 2021-01-12 |
1d Vertical Edge Blocking (veb) Via And Plug App 20200388534 - GULER; Leonard P. ;   et al. | 2020-12-10 |
Vertical Edge Blocking (veb) Technique For Increasing Patterning Process Margin App 20200388530 - GULER; Leonard P. ;   et al. | 2020-12-10 |
Method To Repair Edge Placement Errors In A Semiconductor Device App 20200373201 - WALLACE; Charles H. ;   et al. | 2020-11-26 |
Metal Oxycarbide Resists As Leave Behind Plugs App 20200335434 - KRYSAK; Marie ;   et al. | 2020-10-22 |
Methods and masks for line end formation for back end of line (BEOL) interconnects and structures resulting therefrom Grant 10,770,291 - Schenker , et al. Sep | 2020-09-08 |
Gate Aligned Contact And Method To Fabricate Same App 20200194309 - GOLONZKA; Oleg ;   et al. | 2020-06-18 |
Conductive Via And Metal Line End Fabrication And Structures Resulting Therefrom App 20200185271 - WALLACE; Charles H. ;   et al. | 2020-06-11 |
Multi-pass patterning using nonreflecting radiation lithography on an underlying grating Grant 10,678,137 - Chandhok , et al. | 2020-06-09 |
Metal via processing schemes with via critical dimension (CD) control for back end of line (BEOL) interconnects and the resulting structures Grant 10,636,700 - Nyhus , et al. | 2020-04-28 |
Gate aligned contact and method to fabricate same Grant 10,607,884 - Golonzka , et al. | 2020-03-31 |
Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects Grant 10,600,678 - Wallace , et al. | 2020-03-24 |
Pattern Decomposition Lithography Techniques App 20200091101 - WALLACE; CHARLES H. ;   et al. | 2020-03-19 |
Advanced Lithography And Self-assembled Devices App 20200066629 - SCHENKER; Richard E. ;   et al. | 2020-02-27 |
Pitch division patterning approaches with increased overlay margin for back end of line (BEOL) interconnect fabrication and structures resulting therefrom Grant 10,559,529 - Wallace , et al. Feb | 2020-02-11 |
Conductive Cap-based Approaches For Conductive Via Fabrication And Structures Resulting Therefrom App 20190363008 - GSTREIN; Florian ;   et al. | 2019-11-28 |
Pattern decomposition lithography techniques Grant 10,490,519 - Wallace , et al. Nov | 2019-11-26 |
Pattern decomposition lithography techniques Grant 10,409,152 - Wallace , et al. Sept | 2019-09-10 |
Gate Aligned Contact And Method To Fabricate Same App 20190267286 - GOLONZKA; Oleg ;   et al. | 2019-08-29 |
Metal Via Processing Schemes With Via Critical Dimension (cd) Control For Back End Of Line (beol) Interconnects And The Resultin App 20190259656 - NYHUS; Paul A. ;   et al. | 2019-08-22 |
Self-aligned Via And Plug Patterning For Back End Of Line (beol) Interconnects App 20190252208 - WALLACE; Charles H. ;   et al. | 2019-08-15 |
Plug & Trench Architectures For Integrated Circuits & Methods Of Manufacture App 20190206728 - WALLACE; Charles H. ;   et al. | 2019-07-04 |
Underlying absorbing or conducting layer for Ebeam direct write (EBDW) lithography Grant 10,338,474 - Tandon , et al. | 2019-07-02 |
Gate aligned contact and method to fabricate same Grant 10,340,185 - Golonzka , et al. | 2019-07-02 |
Metal via processing schemes with via critical dimension (CD) control for back end of line (BEOL) interconnects and the resulting structures Grant 10,319,625 - Nyhus , et al. | 2019-06-11 |
Self-aligned via and plug patterning for back end of line (BEOL) interconnects Grant 10,297,467 - Wallace , et al. | 2019-05-21 |
Self-aligned Isotropic Etch Of Pre-formed Vias And Plugs For Back End Of Line (beol) Interconnects App 20190148220 - WALLACE; Charles H. ;   et al. | 2019-05-16 |
Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects Grant 10,211,088 - Wallace , et al. Feb | 2019-02-19 |
Previous layer self-aligned via and plug patterning for back end of line (BEOL) interconnects Grant 10,204,830 - Wallace , et al. Feb | 2019-02-12 |
Pitch Division Patterning Approaches With Increased Overlay Margin For Back End Of Line (beol) Interconnect Fabrication And Structures Resulting Therefrom App 20190019748 - WALLACE; Charles H. ;   et al. | 2019-01-17 |
Aligned Pitch-quartered Patterning For Lithography Edge Placement Error Advanced Rectification App 20190013246 - WALLACE; Charles H. ;   et al. | 2019-01-10 |
Metal Via Processing Schemes With Via Critical Dimension (cd) Control For Back End Of Line (beol) Interconnects And The Resulting Structures App 20180323100 - NYHUS; Paul A. ;   et al. | 2018-11-08 |
Pitch Division Using Directed Self-assembly App 20180323078 - BOJARSKI; Stephanie A. ;   et al. | 2018-11-08 |
Grating Based Plugs And Cuts For Feature End Formation For Back End Of Line (beol) Interconnects And Structures Resulting Therefrom App 20180315590 - SCHENKER; Richard E. ;   et al. | 2018-11-01 |
Self-aligned Isotropic Etch Of Pre-formed Vias And Plugs For Back End Of Line (beol) Interconnects App 20180204763 - WALLACE; Charles H. ;   et al. | 2018-07-19 |
Previous Layer Self-aligned Via And Plug Patterning For Back End Of Line (beol) Interconnects App 20180033692 - WALLACE; Charles H. ;   et al. | 2018-02-01 |
Underlying Absorbing or Conducting Layer for Ebeam Direct Write (EBDW) Lithography App 20170338105 - TANDON; Shakul ;   et al. | 2017-11-23 |
Subtractive self-aligned via and plug patterning for back end of line (BEOL) interconnects Grant 9,793,163 - Bristol , et al. October 17, 2 | 2017-10-17 |
Previous layer self-aligned via and plug patterning for back end of line (BEOL) interconnects Grant 9,793,159 - Wallace , et al. October 17, 2 | 2017-10-17 |
Gate Aligned Contact And Method To Fabricate Same App 20170294350 - GOLONZKA; Oleg ;   et al. | 2017-10-12 |
Multi-pass Patterning Using Nonreflecting Radiation Lithography On An Underlying Grating App 20170235228 - CHANDHOK; Manish ;   et al. | 2017-08-17 |
Self-Aligned Via and Plug Patterning for Back End of Line (BEOL) Interconnects App 20170221810 - WALLACE; Charles H. ;   et al. | 2017-08-03 |
Gate aligned contact and method to fabricate same Grant 9,716,037 - Golonzka , et al. July 25, 2 | 2017-07-25 |
Pattern Decomposition Lithography Techniques App 20170207185 - WALLACE; CHARLES H. ;   et al. | 2017-07-20 |
Necked interconnect fuse structure for integrated circuits Grant 9,679,845 - Chen , et al. June 13, 2 | 2017-06-13 |
Methods for single exposure--self-aligned double, triple, and quadruple patterning Grant 9,666,442 - Cinnor , et al. May 30, 2 | 2017-05-30 |
Self-aligned via and plug patterning for back end of line (BEOL) interconnects Grant 9,666,451 - Wallace , et al. May 30, 2 | 2017-05-30 |
Pattern Decomposition Lithography Techniques App 20170139318 - WALLACE; CHARLES H. ;   et al. | 2017-05-18 |
Pattern decomposition lithography techniques Grant 9,558,947 - Wallace , et al. January 31, 2 | 2017-01-31 |
Necked Interconnect Fuse Structure For Integrated Circuits App 20170018499 - Chen; Zhanping ;   et al. | 2017-01-19 |
Self-Aligned Via and Plug Patterning for Back End of Line (BEOL) Interconnects App 20160204002 - WALLACE; CHARLES H. ;   et al. | 2016-07-14 |
Subtractive Self-Aligned Via and Plug Patterning for Back End of Line (BEOL) Interconnects App 20160197011 - BRISTOL; ROBERT L. ;   et al. | 2016-07-07 |
Previous Layer Self-Aligned Via and Plug Patterning for Back End of Line (BEOL)Interconnects App 20160190009 - WALLACE; CHARLES H. ;   et al. | 2016-06-30 |
Pre-patterned hard mask for ultrafast lithographic imaging Grant 9,285,682 - Bristol , et al. March 15, 2 | 2016-03-15 |
Sub-second annealing lithography techniques Grant 9,224,602 - Killampalli , et al. December 29, 2 | 2015-12-29 |
Double patterning lithography techniques Grant 9,142,421 - Wallace , et al. September 22, 2 | 2015-09-22 |
Pre-patterned Hard Mask For Ultrafast Lithographic Imaging App 20150253667 - BRISTOL; ROBERT L. ;   et al. | 2015-09-10 |
Methods For Single Exposure - Self-aligned Double, Triple, And Quadruple Patterning App 20150187592 - CINNOR; Fitih M. ;   et al. | 2015-07-02 |
Lithography mask having sub-resolution phased assist features Grant 9,046,761 - Ogadhoh , et al. June 2, 2 | 2015-06-02 |
Pre-patterned hard mask for ultrafast lithographic imaging Grant 9,005,875 - Bristol , et al. April 14, 2 | 2015-04-14 |
Methods for single exposure--self-aligned double, triple, and quadruple patterning Grant 8,980,757 - Cinnor , et al. March 17, 2 | 2015-03-17 |
Pre-patterned Hard Mask For Ultrafast Lithographic Imaging App 20140272711 - BRISTOL; ROBERT L. ;   et al. | 2014-09-18 |
Pattern Decomposition Lithography Techniques App 20140117488 - Wallace; Charles H. ;   et al. | 2014-05-01 |
Sub-second Annealing Lithography Techniques App 20140117489 - Killampalli; Aravind S. ;   et al. | 2014-05-01 |
Methods For Single Exposure - Self-aligned Double, Triple, And Quadruple Patterning App 20140073137 - Cinnor; Fitih M. ;   et al. | 2014-03-13 |
Double Patterning Lithography Techniques App 20140017899 - Wallace; Charles H. ;   et al. | 2014-01-16 |
Annealing A Sacrificial Layer App 20140011373 - Killampalli; Aravind ;   et al. | 2014-01-09 |
Gate Aligned Contact And Method To Fabricate Same App 20130320456 - Golonzka; Oleg ;   et al. | 2013-12-05 |
Lithography Mask Having Sub-resolution Phased Assist Features App 20130216941 - Ogadhoh; Shem O. ;   et al. | 2013-08-22 |
Patterned nanowires Grant 8,409,690 - Wallace , et al. April 2, 2 | 2013-04-02 |
Patterned Nanowires App 20110274882 - Wallace; Charles H. ;   et al. | 2011-11-10 |
Double patterning techniques and structures Grant 7,915,171 - Wallace , et al. March 29, 2 | 2011-03-29 |
Sub-resolution assist features Grant 7,759,028 - Wallace , et al. July 20, 2 | 2010-07-20 |
Method for Forming Semiconductor Contacts App 20100171156 - Rahhal-Orabi; Nadia ;   et al. | 2010-07-08 |
Method for forming semiconductor contacts Grant 7,709,866 - Rahhal-Orabi , et al. May 4, 2 | 2010-05-04 |
Sub-resolution Assist Features App 20100068633 - WALLACE; CHARLES H. ;   et al. | 2010-03-18 |
Diagonal corner-to-corner sub-resolution assist features for photolithography Grant 7,648,803 - Sivakumar , et al. January 19, 2 | 2010-01-19 |
Sub-resolution assist features Grant 7,632,610 - Wallace , et al. December 15, 2 | 2009-12-15 |
Double Patterning Techniques And Structures App 20090267175 - Wallace; Charles H. ;   et al. | 2009-10-29 |
Non-collinear end-to-end structures with sub-resolution assist features Grant 7,572,557 - Wallace , et al. August 11, 2 | 2009-08-11 |
Sub-resolution assist features for photolithography with trim ends Grant 7,569,310 - Wallace , et al. August 4, 2 | 2009-08-04 |
Cross-shaped sub-resolution assist feature Grant 7,521,157 - Wallace , et al. April 21, 2 | 2009-04-21 |
Method for forming semiconductor contacts App 20090001431 - Rahhal-Orabi; Nadia ;   et al. | 2009-01-01 |
Diagonal corner-to-corner sub-resolution assist features for photolithography App 20070224519 - Sivakumar; Sam ;   et al. | 2007-09-27 |
Cross-shaped sub-resolution assist feature App 20070184355 - Wallace; Charles H. ;   et al. | 2007-08-09 |
Non-collinear end-to-end structures with sub-resolution assist features App 20070128526 - Wallace; Charles H. ;   et al. | 2007-06-07 |
Sub-resolution assist features for photolithography with trim ends App 20070128525 - Wallace; Charles H. ;   et al. | 2007-06-07 |
Sub-resolution assist features App 20060046160 - Wallace; Charles H. ;   et al. | 2006-03-02 |
Rapid synthesis of carbon nanotubes and carbon encapsulated metal nanoparticles by a displacement reaction Grant 6,479,028 - Kaner , et al. November 12, 2 | 2002-11-12 |
Method for changing the internal temperature of meat by the use of gas Grant 4,551,338 - Wallace November 5, 1 | 1985-11-05 |
Methods for computer assisted optimization of meat cuts from carcasses Grant 4,228,685 - Wallace , et al. October 21, 1 | 1980-10-21 |
Lift device arrangement Grant 4,179,021 - Wallace December 18, 1 | 1979-12-18 |
Method and apparatus for measuring carcasses Grant 4,071,957 - Sumption , et al. February 7, 1 | 1978-02-07 |
Hog processing method Grant 3,940,998 - Sourby , et al. March 2, 1 | 1976-03-02 |
Method And Apparatus For Sampling Ground Meat Grant 3,759,105 - Wallace , et al. September 18, 1 | 1973-09-18 |
Method And Apparatus For Slaughtering Animals Grant 3,657,770 - Wallace April 25, 1 | 1972-04-25 |