Waldis; Severin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Waldis; Severin.The latest application filed is for "method for regulating the tilting of a mirror element".

Company Profile

0.16.13

Waldis; Severin - Bern CH
Waldis; Severin - Aalen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical component Grant 10,078,271 - Waldis , et al. September 18, 2	2018-09-18
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method Grant 9,946,161 - Saenger , et al. April 17, 2	2018-04-17
Optical component Grant 9,804,501 - Waldis , et al. October 31, 2	2017-10-31
Mirror array Grant 9,791,691 - Waldis , et al. October 17, 2	2017-10-17
Microlithographic projection exposure apparatus Grant 9,535,336 - Bleidistel , et al. January 3, 2	2017-01-03
Illumination system of a microlithographic projection exposure apparatus having a temperature control device Grant 9,523,922 - Bach , et al. December 20, 2	2016-12-20
Light modulator and illumination system of a microlithographic projection exposure apparatus Grant 9,274,434 - Werber , et al. March 1, 2	2016-03-01
Optical module for guiding a radiation beam Grant 9,116,440 - Hauf , et al. August 25, 2	2015-08-25
Method For Regulating The Tilting Of A Mirror Element App 20150185469 - Horn; Jan ; et al.	2015-07-02
Microlithographic Projection Exposure Apparatus App 20140333912 - Bleidistel; Sascha ; et al.	2014-11-13
Optical Component App 20140327896 - Waldis; Severin ; et al.	2014-11-06
Optical Component App 20140327895 - Waldis; Severin ; et al.	2014-11-06
Illumination System Of A Microlithographic Projection Exposure Apparatus Having A Temperature Control Device App 20140307239 - Bach; Florian ; et al.	2014-10-16
Light Modulator And Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140218708 - Werber; Armin ; et al.	2014-08-07
Illumination system of a microlithographic projection exposure apparatus having a temperature control device Grant 8,797,507 - Bach , et al. August 5, 2	2014-08-05
Optical Module For Guiding A Radiation Beam App 20140211187 - Hauf; Markus ; et al.	2014-07-31
Microlithographic projection exposure apparatus Grant 8,767,176 - Bleidistel , et al. July 1, 2	2014-07-01
Mirror for guiding a radiation bundle Grant 8,717,531 - Waldis , et al. May 6, 2	2014-05-06
Mirror Array App 20140055767 - Waldis; Severin ; et al.	2014-02-27
Illumination optics for EUV microlithography and related system and apparatus Grant 8,587,767 - Fiolka , et al. November 19, 2	2013-11-19
Optical Module For Guiding A Radiation Beam App 20120044474 - Hauf; Markus ; et al.	2012-02-23
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20110181850 - Bach; Florian ; et al.	2011-07-28
Microlithographic Projection Exposure Apparatus App 20110181852 - Bleidistel; Sascha ; et al.	2011-07-28
Illumination Optics For Euv Microlithography And Related System And Apparatus App 20110063598 - Fiolka; Damian ; et al.	2011-03-17
Mirror For Guiding A Radiation Bundle App 20100261120 - Waldis; Severin ; et al.	2010-10-14

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