Waldfried; Carlo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Waldfried; Carlo.The latest application filed is for "substrate with fluorinated yttrium coatings, and methods of preparing and using the substrates".

Company Profile

6.22.48

Waldfried; Carlo - Middleton MA
Waldfried; Carlo - Falls Church VA US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate With Fluorinated Yttrium Coatings, And Methods Of Preparing And Using The Substrates App 20220298639 - Gunda; Nilesh ; et al.	2022-09-22
Chemical resistant multi-layer coatings applied by atomic layer deposition Grant 11,390,943 - Lin , et al. July 19, 2	2022-07-19
Electrostatic Chuck Prepared By Additive Manufacturing, And Related Methods And Structures App 20220208592 - VENKATRAMAN; Chandra ; et al.	2022-06-30
Coatings That Contain Fluorinated Yttrium Oxide And A Metal Oxide, And Methods Of Preparing And Using The Coatings App 20220010426 - WALDFRIED; Carlo ; et al.	2022-01-13
Yttrium Fluoride Films And Methods Of Preparing And Using Yttrium Fluoride Films App 20210317572 - WALDFRIED; Carlo ; et al.	2021-10-14
Metal Body Having Magnesium Fluoride Region Formed Therefrom App 20210198788 - WALDFRIED; Carlo ; et al.	2021-07-01
Diffusion Barriers Made From Multiple Barrier Materials, And Related Articles And Methods App 20210175325 - WALDFRIED; Carlo	2021-06-10
Coatings for glass-shaping molds and molds comprising the same Grant 10,882,774 - Scoggins , et al. January 5, 2	2021-01-05
Coatings For Enhancement Of Properties And Performance Of Substrate Articles And Apparatus App 20200378011 - Hendrix; Bryan C. ; et al.	2020-12-03
Wafer contact surface protrusion profile with improved particle performance Grant 10,770,330 - Glasko , et al. Sep	2020-09-08
Electrostatic chuck and method of making same Grant 10,497,598 - Cooke , et al. De	2019-12-03
Chemical Resistant Multi-layer Coatings Applied By Atomic Layer Deposition App 20190185997 - LIN; I-Kuan ; et al.	2019-06-20
Coatings For Enhancement Of Properties And Performance Of Substrate Articles And Apparatus App 20190100842 - Hendrix; Bryan C. ; et al.	2019-04-04
Coatings For Glass-shaping Molds And Molds Comprising The Same App 20190084862 - SCOGGINS; Troy ; et al.	2019-03-21
Wafer Contact Surface Protrusion Profile With Improved Particle Performance App 20190067069 - Glasko; John Michael ; et al.	2019-02-28
Articles Coated With A Fluoro-annealed Film App 20180202047 - Lin; I-Kuan ; et al.	2018-07-19
Coatings For Enhancement Of Properties And Performance Of Substrate Articles And Apparatus App 20180044800 - Hendrix; Bryan C. ; et al.	2018-02-15
Surface Coating For Chamber Components Used In Plasma Systems App 20170032942 - WALDFRIED; Carlo	2017-02-02
Electrostatic Chuck and Method of Making Same App 20160336210 - Cooke; Richard A. ; et al.	2016-11-17
Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing process Grant 9,128,382 - Berry , et al. September 8, 2	2015-09-08
Liquid Or Vapor Injection Plasma Ashing Systems And Methods App 20150136171 - Waldfried; Carlo ; et al.	2015-05-21
Tuning System And Method For Plasma-based Substrate Processing Systems App 20140263179 - Waldfried; Carlo ; et al.	2014-09-18
Plasma Mediated Ashing Processes That Include Formation Of A Protective Layer Before And/or During The Plasma Mediated Ashing Process App 20140103010 - Berry; Ivan ; et al.	2014-04-17
Plasma Mediated Ashing Processes App 20140076353 - Berry; Ivan L. ; et al.	2014-03-20
Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith Grant 8,580,076 - Becknell , et al. November 12, 2	2013-11-12
Substantially Non-oxidizing Plasma Treatment Devices And Processes App 20130248113 - Geissbuhler; Phillip ; et al.	2013-09-26
Processes for curing silicon based low-k dielectric materials Grant 8,338,315 - Moore , et al. December 25, 2	2012-12-25
Plasma Mediated Ashing Processes App 20120024314 - LUO; SHIJIAN ; et al.	2012-02-02
Plasma Mediated Ashing Processes App 20110226280 - Berry; Ivan L. ; et al.	2011-09-22
Substantially Non-Oxidizing Plasma Treatment Devices and Processes App 20110136346 - Geissbuhler; Phillip ; et al.	2011-06-09
Front End Of Line Plasma Mediated Ashing Processes And Apparatus App 20100130017 - Luo; Shijian ; et al.	2010-05-27
Apparatus and process for treating dielectric materials Grant 7,709,814 - Waldfried , et al. May 4, 2	2010-05-04
Ultraviolet assisted pore sealing of porous low k dielectric films Grant 7,704,872 - Waldfried , et al. April 27, 2	2010-04-27
Ultraviolet assisted pore sealing of porous low k dielectric films Grant 7,678,682 - Waldfried , et al. March 16, 2	2010-03-16
Ultraviolet assisted porogen removal and/or curing processes for forming porous low k dielectrics Grant 7,629,272 - Waldfried , et al. December 8, 2	2009-12-08
Plasma Mediated Ashing Processes That Include Formation Of A Protective Layer Before And/or During The Plasma Mediated Ashing Process App 20090277871 - Berry; Ivan ; et al.	2009-11-12
Processes For Curing Silicon Based Low-k Dielectric Materials App 20090215282 - Moore; Darren L. ; et al.	2009-08-27
Ultraviolet assisted pore sealing of porous low K dielectric films App 20070134935 - Waldfried; Carlo ; et al.	2007-06-14
Ultraviolet curing process for low k dielectric films App 20060274405 - Waldfried; Carlo ; et al.	2006-12-07
Plasma ashing process for removing photoresist and residues during ferroelectric device fabrication Grant 7,078,161 - Waldfried , et al. July 18, 2	2006-07-18
Apparatus and process for treating dielectric materials App 20060141806 - Waldfried; Carlo ; et al.	2006-06-29
Ultraviolet assisted pore sealing of porous low k dielectric films App 20060105566 - Waldfried; Carlo ; et al.	2006-05-18
Fluorine-free plasma curing process for porous low-k materials Grant 7,011,868 - Waldfried , et al. March 14, 2	2006-03-14
Ultraviolet assisted porogen removal and/or curing processes for forming porous low k dielectrics App 20060024976 - Waldfried; Carlo ; et al.	2006-02-02
Ultraviolet curing process for spin-on dielectric materials used in pre-metal and/or shallow trench isolation applications App 20050272220 - Waldfried, Carlo ; et al.	2005-12-08
Plasma ashing process Grant 6,951,823 - Waldfried , et al. October 4, 2	2005-10-04
Plasma curing process for porous low-k materials Grant 6,913,796 - Albano , et al. July 5, 2	2005-07-05
Plasma process for removing polymer and residues from substrates Grant 6,834,656 - Qingyuan , et al. December 28, 2	2004-12-28
Plasma Apparatus, Gas Distribution Assembly For A Plasma Apparatus And Processes Therewith App 20040238123 - Becknell, Alan Frederick ; et al.	2004-12-02
Plasma ashing process for removing photoresist and residues during ferroelectric device fabrication App 20040157170 - Waldfried, Carlo ; et al.	2004-08-12
Plasma curing of MSQ-based porous low-k film materials Grant 6,759,098 - Han , et al. July 6, 2	2004-07-06
Ultraviolet curing processes for advanced low-k materials Grant 6,756,085 - Waldfried , et al. June 29, 2	2004-06-29
Drying process for low-k dielectric films App 20040099283 - Waldfried, Carlo ; et al.	2004-05-27
Plasma ashing process App 20040084412 - Waldfried, Carlo ; et al.	2004-05-06
Low temperature UV pretreating of porous low-k materials App 20040058090 - Waldfried, Carlo ; et al.	2004-03-25
Fluorine-free plasma curing process for porous low-k materials App 20040028916 - Waldfried, Carlo ; et al.	2004-02-12
Ultraviolet curing processes for advanced low-k materials App 20040018319 - Waldfried, Carlo ; et al.	2004-01-29
Plasma ashing process Grant 6,630,406 - Waldfried , et al. October 7, 2	2003-10-07
Plasma curing process for porous silica thin film App 20030175535 - Berry, Ivan L. III ; et al.	2003-09-18
Fluorine-free plasma curing process for porous low-k materials App 20030157267 - Waldfried, Carlo ; et al.	2003-08-21
Plasma curing process for porous silica thin film Grant 6,558,755 - Berry, III , et al. May 6, 2	2003-05-06
Plasma ashing process Grant 6,548,416 - Han , et al. April 15, 2	2003-04-15
Ultraviolet curing process for porous low-K materials App 20030054115 - Albano, Ralph ; et al.	2003-03-20
Plasma ashing process App 20030032300 - Waldfried, Carlo ; et al.	2003-02-13
Plasma Ashing Process App 20030022511 - Han, Qingyuan ; et al.	2003-01-30
Plasma process for removing polymer and residues from substrates App 20020185151 - Qingyuan, Han ; et al.	2002-12-12
Plasma curing process for porous low-k materials App 20020106500 - Albano, Ralph ; et al.	2002-08-08
Plasma curing of MSQ-based porous low-k film materials App 20020102413 - Han, Qingyuan ; et al.	2002-08-01
Plasma curing process for porous silica thin film App 20010038919 - Berry, Ivan L. III ; et al.	2001-11-08

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