Wakui; Shinji

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wakui; Shinji.The latest application filed is for "temperature adjusting system in exposure apparatus".

Company Profile

0.14.5

Wakui; Shinji - Utsunomiya JP
Wakui; Shinji - Komae JP
Wakui; Shinji - Tochigi JP
Wakui, Shinji - Tokyo JP
WAKUI, SHINJI - UTSUNOMIYA-SHI JP
Wakui; Shinji - Kawasaki JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification method Grant 7,072,777 - Wakui , et al. July 4, 2	2006-07-04
Temperature adjusting system in exposure apparatus Grant 6,809,300 - Wakui , et al. October 26, 2	2004-10-26
Active anti-vibration apparatus and exposure apparatus Grant 6,684,132 - Wakui , et al. January 27, 2	2004-01-27
Temperature adjusting system in exposure apparatus App 20030111458 - Wakui, Shinji ; et al.	2003-06-19
Active vibration isolator and exposure apparatus with the active vibration isolator, device manufacturing method App 20030057346 - Wakui, Shinji	2003-03-27
Active vibration isolation device and its control method Grant 6,378,672 - Wakui April 30, 2	2002-04-30
Projection Exposure Apparatus And Method Of Controlling Same App 20020001082 - AKIMOTO, SATOSHI ; et al.	2002-01-03
Exposure apparatus and positioning apparatus Grant 6,327,026 - Wakui December 4, 2	2001-12-04
Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method Grant 6,322,060 - Mayama , et al. November 27, 2	2001-11-27
Anti-vibration Apparatus, Exposure Apparatus Using The Same, Device Manufacturing Method, And Anti-vibration Method App 20010040324 - MAYAMA, TAKEHIKO ; et al.	2001-11-15
Active anti-vibration apparatus and exposure apparatus App 20010011697 - Wakui, Shinji ; et al.	2001-08-09
Anti-vibration apparatus and method Grant 6,128,552 - Iwai , et al. October 3, 2	2000-10-03
Vibration removing apparatus and method thereof Grant 5,653,317 - Wakui August 5, 1	1997-08-05
Position control system Grant 5,568,032 - Wakui October 22, 1	1996-10-22
Positioning system Grant 5,545,962 - Wakui August 13, 1	1996-08-13
Precision positioning apparatus Grant 5,511,930 - Sato , et al. April 30, 1	1996-04-30
Stage driving system Grant 5,504,407 - Wakui , et al. April 2, 1	1996-04-02
Control system for magnetic bearing Grant 5,013,987 - Wakui May 7, 1	1991-05-07
Objective lens apparatus Grant 4,650,294 - Nanno , et al. March 17, 1	1987-03-17

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