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Patent applications and USPTO patent grants for Wakker; Remko.The latest application filed is for "lithographic apparatus and device manufacturing method".
Patent | Date |
---|---|
Lithographic apparatus and device manufacturing method Grant 9,019,476 - Compen , et al. April 28, 2 | 2015-04-28 |
Lithographic Apparatus And Device Manufacturing Method App 20110222045 - COMPEN; Rene Theodorus Petrus ;   et al. | 2011-09-15 |
Lithographic apparatus and device manufacturing method Grant 7,978,308 - Compen , et al. July 12, 2 | 2011-07-12 |
Lithographic apparatus and position sensor Grant 7,830,495 - Van Bruggen , et al. November 9, 2 | 2010-11-09 |
Lithographic apparatus and method for masking a substrate Grant 7,808,612 - Wakker , et al. October 5, 2 | 2010-10-05 |
Lithographic apparatus with mask to prevent exposure of peripheral exposure region of substrate Grant 7,777,863 - Smeets , et al. August 17, 2 | 2010-08-17 |
Lithographic apparatus and position sensor App 20090015246 - Van Bruggen; Olaf Hubertus Wilhelmus ;   et al. | 2009-01-15 |
Lithographic apparatus App 20080297748 - Smeets; Erik Marie Jose ;   et al. | 2008-12-04 |
Lithographic apparatus and method for masking a substrate App 20080246935 - Wakker; Remko ;   et al. | 2008-10-09 |
Lithographic apparatus and device manufacturing method App 20070263200 - Petrus Compen; Rene Theodorus ;   et al. | 2007-11-15 |
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