Wakiyama; Terufumi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Wakiyama; Terufumi.The latest application filed is for "substrate liquid processing apparatus and liquid discharge evaluation method".
- Wakiyama; Terufumi - Kumamoto JP
- Wakiyama; Terufumi - Koshi City JP
- Wakiyama; Terufumi - Koshi JP
| Patent | Date |
|---|---|
| Liquid processing apparatus Grant 11,322,373 - Wakiyama , et al. May 3, 2 | 2022-05-03 |
| Substrate Liquid Processing Apparatus And Liquid Discharge Evaluation Method App 20210260612 - Wakiyama; Terufumi ; et al. | 2021-08-26 |
| Substrate processing apparatus Grant 10,460,962 - Wakiyama , et al. Oc | 2019-10-29 |
| Liquid processing apparatus Grant 10,297,473 - Wakiyama , et al. | 2019-05-21 |
| Substrate processing system Grant 10,276,425 - Wakiyama , et al. | 2019-04-30 |
| Liquid Processing Apparatus App 20180226277 - Wakiyama; Terufumi ; et al. | 2018-08-09 |
| Liquid Processing Apparatus And Liquid Processing Method App 20180185856 - TAKEGUCHI; Hirofumi ; et al. | 2018-07-05 |
| Substrate Processing Apparatus App 20180130677 - Wakiyama; Terufumi ; et al. | 2018-05-10 |
| Substrate liquid processing apparatus Grant 9,953,848 - Wakiyama , et al. April 24, 2 | 2018-04-24 |
| Liquid Processing Apparatus App 20170345689 - Wakiyama; Terufumi ; et al. | 2017-11-30 |
| Liquid processing apparatus Grant 9,773,687 - Wakiyama , et al. September 26, 2 | 2017-09-26 |
| Liquid processing apparatus and cleaning method Grant 9,387,520 - Ogata , et al. July 12, 2 | 2016-07-12 |
| Substrate Processing System App 20160148827 - Wakiyama; Terufumi ; et al. | 2016-05-26 |
| Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein Grant 9,108,231 - Ogata , et al. August 18, 2 | 2015-08-18 |
| Substrate Liquid Processing Apparatus App 20150187613 - Wakiyama; Terufumi ; et al. | 2015-07-02 |
| Liquid Processing Apparatus App 20150090305 - Wakiyama; Terufumi ; et al. | 2015-04-02 |
| Liquid Processing Apparatus, Liquid Processing Method, And Computer-readable Recording Medium Having Program Stored Therein App 20140360540 - Ogata; Nobuhiro ; et al. | 2014-12-11 |
| Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein Grant 8,845,815 - Ogata , et al. September 30, 2 | 2014-09-30 |
| Substrate Processing Apparatus, Substrate Processing Method And Storage Medium App 20140137893 - Otsuka; Takahisa ; et al. | 2014-05-22 |
| Liquid Processing Apparatus And Cleaning Method App 20140026927 - Ogata; Nobuhiro ; et al. | 2014-01-30 |
| Liquid Processing Apparatus, Liquid Processing Method, And Computer-readable Recording Medium Having Program Stored Therein App 20120260946 - OGATA; Nobuhiro ; et al. | 2012-10-18 |
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