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Patent applications and USPTO patent grants for Wakata; Hitoshi.The latest application filed is for "thin film forming apparatus using laser".
Patent | Date |
---|---|
Thin film forming apparatus using laser Grant 6,110,291 - Haruta , et al. August 29, 2 | 2000-08-29 |
Thin film forming apparatus using laser Grant 6,033,741 - Haruta , et al. March 7, 2 | 2000-03-07 |
Wavelength stabilizer for narrow bandwidth laser Grant 5,243,614 - Wakata , et al. September 7, 1 | 1993-09-07 |
Laser device with oscillation wavelength control Grant 5,130,998 - Wakata , et al. July 14, 1 | 1992-07-14 |
Method of stabilizing laser wavelength and laser device with stabilized wavelength Grant 5,107,511 - Nakatani , et al. April 21, 1 | 1992-04-21 |
Laser apparatus Grant 4,977,563 - Nakatani , et al. December 11, 1 | 1990-12-11 |
Laser device with wavelength stabilization control and method of operating the same Grant 4,947,398 - Yasuda , et al. August 7, 1 | 1990-08-07 |
Laser wavelength stabilization Grant 4,914,662 - Nakatani , et al. April 3, 1 | 1990-04-03 |
Discharge excitation type short pulse laser Grant 4,837,773 - Wakata , et al. June 6, 1 | 1989-06-06 |
Excimer laser equipment Grant 4,722,090 - Haruta , et al. January 26, 1 | 1988-01-26 |
Discharge excitation type short pulse laser device Grant 4,686,682 - Haruta , et al. August 11, 1 | 1987-08-11 |
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