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Patent applications and USPTO patent grants for Wakamizu; Shinya.The latest application filed is for "treatment solution supply apparatus".
Patent | Date |
---|---|
Treatment solution supply apparatus Grant 10,518,199 - Sasa , et al. Dec | 2019-12-31 |
Treatment Solution Supply Apparatus App 20180065065 - SASA; Takashi ;   et al. | 2018-03-08 |
Non-transitory storage medium for rinsing or developing sequence Grant 8,398,320 - Takaki , et al. March 19, 2 | 2013-03-19 |
Developing method and developing apparatus Grant 8,054,443 - Kitano , et al. November 8, 2 | 2011-11-08 |
Rinsing Method And Developing Method App 20110229120 - TAKAKI; Yasuhiro ;   et al. | 2011-09-22 |
Rinse treatment method and development process method Grant 7,968,278 - Takaki , et al. June 28, 2 | 2011-06-28 |
Developing Method And Developing Apparatus App 20090079948 - KITANO; Junichi ;   et al. | 2009-03-26 |
Developing method and developing apparatus Grant 7,486,377 - Kitano , et al. February 3, 2 | 2009-02-03 |
Rinse Treatment Method and Development Process Method App 20080274433 - Takaki; Yasuhiro ;   et al. | 2008-11-06 |
Developing method and developing apparatus App 20070099129 - Kitano; Junichi ;   et al. | 2007-05-03 |
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