| Patent | Date |
|---|
Substrate transfer mechanism, substrate processing apparatus, and substrate processing method
Grant 11,404,299 - Wakabayashi August 2, 2 | 2022-08-02 |
Transfer device
Grant 11,335,586 - Shindo , et al. May 17, 2 | 2022-05-17 |
Vacuum Process Apparatus And Substrate Transfer Method
App 20220044952 - WAKABAYASHI; Shinji | 2022-02-10 |
Transfer Device
App 20210305081 - SHINDO; Takehiro ; et al. | 2021-09-30 |
Substrate processing device
Grant 10,906,756 - Wakabayashi , et al. February 2, 2 | 2021-02-02 |
Substrate Transfer Mechanism, Substrate Processing Apparatus, And Substrate Processing Method
App 20200075377 - WAKABAYASHI; Shinji | 2020-03-05 |
Substrate detection apparatus, substrate detection method and substrate processing system
Grant 10,429,543 - Kodama , et al. O | 2019-10-01 |
Load lock apparatus and substrate processing system
Grant 10,431,481 - Wakabayashi O | 2019-10-01 |
Carrier transport device and carrier transport method
Grant 10,403,529 - Wakabayashi , et al. Sep | 2019-09-03 |
Substrate Processing Device
App 20190152722 - WAKABAYASHI; Shinji ; et al. | 2019-05-23 |
Substrate transfer chamber and container connecting mechanism with lid opening mechanisms
Grant 10,229,847 - Wakabayashi , et al. | 2019-03-12 |
Substrate conveyance apparatus
Grant 9,962,840 - Wakabayashi May 8, 2 | 2018-05-08 |
Substrate processing device and substrate transfer method
Grant 9,929,030 - Wakabayashi March 27, 2 | 2018-03-27 |
Substrate processing apparatus, cover opening and closing mechanism,shielding mechanism, and method for purging container
Grant 9,887,115 - Wakabayashi February 6, 2 | 2018-02-06 |
Carrier Transport Device And Carrier Transport Method
App 20180033663 - WAKABAYASHI; Shinji ; et al. | 2018-02-01 |
Gate valve and substrate processing system
Grant 9,732,881 - Wakabayashi , et al. August 15, 2 | 2017-08-15 |
Substrate Transfer Chamber And Container Connecting Mechanism
App 20170154799 - WAKABAYASHI; Shinji ; et al. | 2017-06-01 |
Load Lock Apparatus And Substrate Processing System
App 20170025290 - WAKABAYASHI; Shinji | 2017-01-26 |
Vacuum processing apparatus
Grant 9,443,749 - Wakabayashi , et al. September 13, 2 | 2016-09-13 |
Substrate Detection Apparatus, Substrate Detection Method and Substrate Processing System
App 20160240412 - KODAMA; Toshiaki ; et al. | 2016-08-18 |
Method for setting substrate-treatment time, and storage medium
Grant 9,389,607 - Wakabayashi July 12, 2 | 2016-07-12 |
Substrate processing apparatus
Grant 9,330,950 - Wakabayashi May 3, 2 | 2016-05-03 |
Gate Valve And Substrate Processing System
App 20160084389 - Wakabayashi; Shinji ; et al. | 2016-03-24 |
Substrate Conveyance Apparatus
App 20160082599 - Wakabayashi; Shinji | 2016-03-24 |
Substrate relay apparatus, substrate relay method, and substrate processing apparatus
Grant 9,269,599 - Wakabayashi February 23, 2 | 2016-02-23 |
Substrate Processing Apparatus, Cover Opening And Closing Mechanism,shielding Mechanism, And Method For Purging Container
App 20150340259 - WAKABAYASHI; Shinji | 2015-11-26 |
Substrate Processing Device And Substrate Transfer Method
App 20150303083 - WAKABAYASHI; Shinji | 2015-10-22 |
Container Interchanging Method
App 20150221537 - WAKABAYASHI; Shinji | 2015-08-06 |
Electric actuator
Grant 9,096,395 - Wakabayashi August 4, 2 | 2015-08-04 |
Substrate Transfer Method
App 20150098790 - WAKABAYASHI; Shinji | 2015-04-09 |
Substrate Transfer Chamber And Container Connecting Mechanism
App 20150098788 - WAKABAYASHI; Shinji ; et al. | 2015-04-09 |
Substrate processing system, substrate processing method and storage medium
Grant 8,999,103 - Wakabayashi April 7, 2 | 2015-04-07 |
Method For Setting Substrate-treatment Time, And Storage Medium
App 20140188267 - Wakabayashi; Shinji | 2014-07-03 |
Electric Actuator
App 20140110224 - Wakabayashi; Shinji | 2014-04-24 |
Substrate Relay Apparatus, Substrate Relay Method, And Substrate Processing Apparatus
App 20130309047 - Wakabayashi; Shinji | 2013-11-21 |
Vacuum Processing Apparatus
App 20130302115 - Wakabayashi; Shinji ; et al. | 2013-11-14 |
Video player and video playback control method
Grant 8,472,778 - Kimura , et al. June 25, 2 | 2013-06-25 |
Alcohol concentration sensor disposed in fuel tank of automotive vehicle
Grant 8,230,728 - Wakabayashi , et al. July 31, 2 | 2012-07-31 |
In-vehicle apparatus for performing route guidance or content playback in cooperation with a portable terminal
Grant 8,214,150 - Kohno , et al. July 3, 2 | 2012-07-03 |
Container changing system and container changing method
Grant 8,123,456 - Wakabayashi February 28, 2 | 2012-02-28 |
Wafer transfer apparatus, wafer transfer method and storage medium
Grant 8,025,475 - Wakabayashi September 27, 2 | 2011-09-27 |
Substrate carrying apparatus and substrate carrying method
Grant 8,021,513 - Wakabayashi September 20, 2 | 2011-09-20 |
Substrate Processing Apparatus
App 20100236718 - WAKABAYASHI; Shinji | 2010-09-23 |
Method and apparatus for multimedia reproduction
Grant 7,720,988 - Kusano , et al. May 18, 2 | 2010-05-18 |
Check Valve And Substrate Processing Apparatus Using Same
App 20090116938 - WAKABAYASHI; Shinji | 2009-05-07 |
Alcohol Density Sensor Disposed In Fuel Tank Of Automotive Vehicle
App 20090107215 - Wakabayashi; Shinji ; et al. | 2009-04-30 |
Container Changing System And Container Changing Method
App 20090060697 - WAKABAYASHI; Shinji | 2009-03-05 |
Substrate Positional Misalignment Detection System
App 20090060692 - WAKABAYASHI; Shinji | 2009-03-05 |
Substrate Receiving Apparatus And Substrate Receiving Method
App 20090060691 - WAKABAYASHI; Shinji | 2009-03-05 |
Wafer transfer apparatus, wafer transfer method and storage medium
App 20090053023 - Wakabayashi; Shinji | 2009-02-26 |
Communication system and method, and distributed control system and method
Grant 7,487,266 - Wakabayashi February 3, 2 | 2009-02-03 |
Navigation System, In-Vehcile Apparatus, And Portable Terminal
App 20080300782 - Kohno; Shigeru ; et al. | 2008-12-04 |
Video Player And Video Playback Control Method
App 20080253737 - Kimura; Masaru ; et al. | 2008-10-16 |
Substrate processing system, substrate processing method and storage medium
App 20080053957 - Wakabayashi; Shinji | 2008-03-06 |
Substrate carrying apparatus and substrate carrying method
App 20080050924 - Wakabayashi; Shinji | 2008-02-28 |
Recording and playback apparatus, music-data recording and playback method, and music-data recording and playback program
Grant 7,307,935 - Kusano , et al. December 11, 2 | 2007-12-11 |
Magnetic sensor apparatus and manufacturing method thereof
Grant 7,221,157 - Wakabayashi , et al. May 22, 2 | 2007-05-22 |
Communication system and method, and distributed control system and method
App 20070088883 - Wakabayashi; Shinji | 2007-04-19 |
Processing apparatus, and system and program for monitoring and controlling fan filter unit
App 20060222478 - Wakabayashi; Shinji | 2006-10-05 |
Processing apparatus and recording medium
App 20060215347 - Wakabayashi; Shinji | 2006-09-28 |
Method and apparatus for playing back a multisession disc
Grant 7,113,456 - Kusano , et al. September 26, 2 | 2006-09-26 |
Oil deterioration detection apparatus
Grant 7,038,459 - Wakabayashi May 2, 2 | 2006-05-02 |
Magnetic sensor apparatus and manufacturing method thereof
App 20050174112 - Wakabayashi, Shinji ; et al. | 2005-08-11 |
Recording and playback apparatus, music-data recording and playback method, and music-data recording and playback program
App 20050088933 - Kusano, Manabu ; et al. | 2005-04-28 |
Method and apparatus for multimedia reproduction
App 20040143624 - Kusano, Manabu ; et al. | 2004-07-22 |
Oil deterioration detection apparatus
App 20040100291 - Wakabayashi, Shinji | 2004-05-27 |
Method and apparatus for playing back a multisession disc
App 20040032771 - Kusano, Manabu ; et al. | 2004-02-19 |
Raindrop detecting method and apparatus having temperature-dependent characteristic compensation
Grant 6,686,992 - Wakabayashi , et al. February 3, 2 | 2004-02-03 |
Raindrop detecting method and apparatus having temperature-dependent characteristic compensation
App 20010050766 - Wakabayashi, Shinji ; et al. | 2001-12-13 |
Rotational speed sensor with unfixed and/or fixed edge speed calculation modes
Grant 4,908,572 - Sakai , et al. March 13, 1 | 1990-03-13 |
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