loadpatents
Patent applications and USPTO patent grants for Wakabayashi; Satoshi.The latest application filed is for "film forming method and film forming apparatus".
Patent | Date |
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Source gas supply apparatus, film forming apparatus, and source gas supply method Grant 11,248,296 - Wakabayashi February 15, 2 | 2022-02-15 |
Film Forming Method And Film Forming Apparatus App 20210363638 - WAKABAYASHI; Satoshi ;   et al. | 2021-11-25 |
Non-transitory computer-readable storage medium, and information processing device using unique file-specific information for decryption of a target file Grant 10,783,264 - Hamano , et al. Sept | 2020-09-22 |
Source Gas Supply Apparatus, Film Forming Apparatus, And Source Gas Supply Method App 20200115801 - WAKABAYASHI; Satoshi | 2020-04-16 |
Method Of Forming Metal Film And Film Forming Apparatus App 20190385843 - WAKABAYASHI; Satoshi ;   et al. | 2019-12-19 |
Film-forming Method And Film-forming Apparatus App 20190371572 - WAKABAYASHI; Satoshi ;   et al. | 2019-12-05 |
Substrate processing method and recording medium Grant 10,242,878 - Urano , et al. | 2019-03-26 |
Non-transitory Computer-readable Storage Medium, And Information Processing Device App 20180068127 - Hamano; Takanori ;   et al. | 2018-03-08 |
Display Method, Display Device, And Non-transitory Computer-readable Recording Medium App 20180068477 - YUFU; Yoshimi ;   et al. | 2018-03-08 |
Substrate Processing Method And Recording Medium App 20170250086 - URANO; Tomonari ;   et al. | 2017-08-31 |
Method of forming Ti film Grant 9,620,370 - Murakami , et al. April 11, 2 | 2017-04-11 |
Method of forming contact layer Grant 9,349,642 - Murakami , et al. May 24, 2 | 2016-05-24 |
Method Of Forming Ti Film App 20150179462 - MURAKAMI; Seishi ;   et al. | 2015-06-25 |
Method Of Forming Contact Layer App 20150179518 - MURAKAMI; Seishi ;   et al. | 2015-06-25 |
Ti-based film forming method and storage medium Grant 8,263,181 - Narushima , et al. September 11, 2 | 2012-09-11 |
Ti-containing film formation method and storage medium Grant 8,257,790 - Narushima , et al. September 4, 2 | 2012-09-04 |
Fish hook Grant D660,398 - Wakabayashi May 22, 2 | 2012-05-22 |
Film forming method and substrate processing apparatus Grant 7,981,794 - Narushima , et al. July 19, 2 | 2011-07-19 |
Gas treatment method and computer readable storage medium Grant 7,906,442 - Narushima , et al. March 15, 2 | 2011-03-15 |
Polishing device and substrate processing device Grant 7,850,817 - Wakabayashi , et al. December 14, 2 | 2010-12-14 |
Film Forming Method And Substrate Processing Apparatus App 20100304561 - Narushima; Kensaku ;   et al. | 2010-12-02 |
Film Formation Method And Apparatus Utilizing Plasma Cvd App 20100240216 - TADA; Kunihiro ;   et al. | 2010-09-23 |
METHOD FOR FORMING Ti-BASED FILM AND STORAGE MEDIUM App 20100227062 - Narushima; Kensaku ;   et al. | 2010-09-09 |
Method For Forming Ti Film And Tin Film, Contact Structure, Computer Readable Storage Medium And Computer Program App 20100216304 - Tada; Kunihiro ;   et al. | 2010-08-26 |
Method for forming Ti film and TiN film, contact structure, computer readable storing medium and computer program Grant 7,737,005 - Tada , et al. June 15, 2 | 2010-06-15 |
Gas Treatment Method And Computer Readable Storage Medium App 20100081292 - Narushima; Kensaku ;   et al. | 2010-04-01 |
Substrate delivery mechanism Grant 7,645,185 - Isobe , et al. January 12, 2 | 2010-01-12 |
Polishing apparatus Grant 7,632,378 - Sakurai , et al. December 15, 2 | 2009-12-15 |
Ti-BASED FILM FORMING METHOD AND STORAGE MEDIUM App 20090208650 - NARUSHIMA; Kensaku ;   et al. | 2009-08-20 |
Precoat film forming method Grant 7,514,120 - Wakabayashi , et al. April 7, 2 | 2009-04-07 |
Precoat film forming method, idling method of film forming device, loading table structure, film forming device and film forming method App 20080226822 - Wakabayashi; Satoshi ;   et al. | 2008-09-18 |
Film-Forming Method and Recording Medium App 20080107825 - Ishizaka; Tadahiro ;   et al. | 2008-05-08 |
Substrate delivery mechanism App 20070264914 - Isobe; Soichi ;   et al. | 2007-11-15 |
Method for Forming Ti Film and Tin Film, Contact Structure, Computer Readable Storing Medium and Computer Program App 20070257372 - Tada; Kunihiro ;   et al. | 2007-11-08 |
Gas Supplying unit and substrate processing apparatus App 20070131168 - Gomi; Hisashi ;   et al. | 2007-06-14 |
Substrate delivery mechanism App 20070093186 - Isobe; Soichi ;   et al. | 2007-04-26 |
Substrate delivery mechanism Grant 7,160,180 - Isobe , et al. January 9, 2 | 2007-01-09 |
Substrate delivery mechanism App 20060199478 - Isobe; Soichi ;   et al. | 2006-09-07 |
Substrate delivery mechanism Grant 7,063,598 - Isobe , et al. June 20, 2 | 2006-06-20 |
Worktable device, film formation apparatus, and film formation method for semiconductor process App 20050257747 - Wakabayashi, Satoshi ;   et al. | 2005-11-24 |
Film formation method and apparatus utilizing plasma CVD App 20050233093 - Tada, Kunihiro ;   et al. | 2005-10-20 |
Precoat film forming method App 20050221005 - Wakabayashi, Satoshi ;   et al. | 2005-10-06 |
Polishing apparatus App 20050159082 - Sakurai, Kunihiko ;   et al. | 2005-07-21 |
Polishing apparatus Grant 6,916,231 - Wakabayashi July 12, 2 | 2005-07-12 |
Precoat film forming method, idling method of film forming device, loading table structure, film forming device and film forming method App 20050098109 - Wakabayashi, Satoshi ;   et al. | 2005-05-12 |
Polishing apparatus Grant 6,878,044 - Sakurai , et al. April 12, 2 | 2005-04-12 |
Polishing device and substrate processing device App 20040261944 - Wakabayashi, Satoshi ;   et al. | 2004-12-30 |
Polishing apparatus App 20040137823 - Sakurai, Kunihiko ;   et al. | 2004-07-15 |
Polishing apparatus App 20040072499 - Wakabayashi, Satoshi | 2004-04-15 |
Polishing apparatus and method of bonding and removing expendable replacement components thereof App 20040053559 - Torii, Hiroomi ;   et al. | 2004-03-18 |
Polishing apparatus Grant 6,682,408 - Sakurai , et al. January 27, 2 | 2004-01-27 |
Precoat film forming method App 20030235652 - Wakabayashi, Satoshi ;   et al. | 2003-12-25 |
Substrate delivery method, a substrate delivery mechanism and a substrate polishing apparatus App 20030211812 - Isobe, Soichi ;   et al. | 2003-11-13 |
Precoat film forming method, idling method of film forming device, loading table structure, film forming device and film forming method App 20030165620 - Wakabayashi, Satoshi ;   et al. | 2003-09-04 |
Dressing apparatus and polishing apparatus Grant 6,609,962 - Wakabayashi , et al. August 26, 2 | 2003-08-26 |
Dressing apparatus Grant 6,602,119 - Togawa , et al. August 5, 2 | 2003-08-05 |
Substrate holder and substrate transfer apparatus using the same Grant 6,578,891 - Suzuki , et al. June 17, 2 | 2003-06-17 |
Polishing apparatus Grant 6,390,901 - Hiyama , et al. May 21, 2 | 2002-05-21 |
Polishing apparatus App 20020045410 - Sakurai, Kunihiko ;   et al. | 2002-04-18 |
Polishing apparatus Grant 6,358,131 - Sakurai , et al. March 19, 2 | 2002-03-19 |
Polishing apparatus Grant 6,358,126 - Jackson , et al. March 19, 2 | 2002-03-19 |
Polishing apparatus Grant 6,358,128 - Sakurai , et al. March 19, 2 | 2002-03-19 |
Polishing apparatus Grant 6,354,922 - Sakurai , et al. March 12, 2 | 2002-03-12 |
Input device having double-layer adhesive conductive connecting portions Grant 5,179,460 - Hinata , et al. January 12, 1 | 1993-01-12 |
Electro-optical device and method for manufacturing same Grant 4,966,442 - Ono , et al. October 30, 1 | 1990-10-30 |
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