Wahlsten; Mikael

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wahlsten; Mikael.The latest application filed is for "methods and apparatuses for generating patterns on workpieces".

Company Profile

0.21.14

Wahlsten; Mikael - Stockholm SE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Pick-and-place tool Grant 9,648,795 - Gustafsson , et al. May 9, 2	2017-05-09
Method and apparatus for performing pattern alignment to die Grant 9,341,962 - Wahlsten , et al. May 17, 2	2016-05-17
Apparatuses and methods for compensation of carrier distortions from measurement machines Grant 9,210,814 - Wahlsten December 8, 2	2015-12-08
Apparatus for generating patterns on workpieces Grant 9,032,611 - Gustafsson , et al. May 19, 2	2015-05-19
Method and apparatus for alignment optimization with respect to plurality of layers Grant 9,032,342 - Wahlsten , et al. May 12, 2	2015-05-12
Methods And Apparatuses For Generating Patterns On Workpieces App 20150082620 - GUSTAFSSON; Per-Erik ; et al.	2015-03-26
Method and apparatus for performing alignment using reference board Grant 8,934,081 - Wahlsten , et al. January 13, 2	2015-01-13
Method and apparatus for alignment optimization with respect to plurality of layers for writing different layers with different machine configurations Grant 8,594,825 - Wahlsten , et al. November 26, 2	2013-11-26
Method and apparatus for performing pattern alignment to plurality of dies Grant 8,594,824 - Wahlsten , et al. November 26, 2	2013-11-26
Method and apparatus for performing pattern reconnection after individual or multipart alignment Grant 8,530,120 - Wahlsten , et al. September 10, 2	2013-09-10
Methods and Apparatuses For Generating Patterns On Workpieces App 20120066898 - Gustafsson; Per-Erik ; et al.	2012-03-22
Method and apparatus for overlay compensation between subsequently patterned layers on workpiece Grant 8,137,875 - Sjostrom , et al. March 20, 2	2012-03-20
Apparatuses And Methods For Compensation Of Carrier Distortions From Measurement Machines App 20120062862 - Wahlsten; Mikael	2012-03-15
Method of iterative compensation for non-linear effects in three-dimensional exposure of resist Grant 8,067,134 - Sandstrom , et al. November 29, 2	2011-11-29
Method of compensation for bleaching of resist during three-dimensional exposure of resist Grant 8,057,971 - Sandstrom , et al. November 15, 2	2011-11-15
Method and apparatus for performing pattern reconnection after individual or multipart alignment App 20110257777 - Wahlsten; Mikael ; et al.	2011-10-20
Method and apparatus for performing alignment using reference board App 20110228242 - Wahlsten; Mikael ; et al.	2011-09-22
Method and apparatus for performing pattern alignment to die App 20110213479 - Wahlsten; Mikael ; et al.	2011-09-01
Method and apparatus for performing pattern alignment to plurality of dies App 20110213484 - Wahlsten; Mikael ; et al.	2011-09-01
Method and apparatus for alignment optimization with respect to plurality of layers App 20110210104 - Wahlsten; Mikael ; et al.	2011-09-01
Method and apparatus for alignment optimization with respect to plurality of layers for writing different layers with different machine configurations App 20110213487 - Wahlsten; Mikael ; et al.	2011-09-01
Multi-focus method of enhanced three-dimensional exposure of resist Grant 7,923,182 - Sandstrom , et al. April 12, 2	2011-04-12
Multi-focus Method Of Enhanced Three-dimensional Exposure Of Resist App 20100099051 - Sandstrom; Torbjorn ; et al.	2010-04-22
Method Of Compensation For Bleaching Of Resist During Three-dimensional Exposure Of Resist App 20100099034 - Sandstrom; Torbjorn ; et al.	2010-04-22
Method Of Iterative Compensation For Non-linear Effects In Three-dimensional Exposure Of Resist App 20100099035 - Sandstrom; Torbjorn ; et al.	2010-04-22
Method and apparatus for overlay compensation between subsequently patterned layers on workpiece App 20090325088 - Sjostrom; Fredrik ; et al.	2009-12-31
Apparatuses, Methods And Computer Programs For Artificial Resolution Enhancement In Optical Systems App 20070201732 - Wahlsten; Mikael	2007-08-30

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