| Patent | Date |
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Multilayered semiconductor wafer and process for manufacturing the same
Grant 8,395,164 - Murphy , et al. March 12, 2 | 2013-03-12 |
SOI wafer and method for producing it
Grant 8,323,403 - Graef , et al. December 4, 2 | 2012-12-04 |
Multilayered Semiconductor Wafer and Process For Manufacturing The Same
App 20110316003 - Murphy; Brian ; et al. | 2011-12-29 |
Multilayered semiconductor wafer and process for manufacturing the same
Grant 8,039,361 - Murphy , et al. October 18, 2 | 2011-10-18 |
Method for reducing and homogenizing the thickness of a semiconductor layer which lies on the surface of an electrically insulating material
Grant 7,988,876 - Feijoo , et al. August 2, 2 | 2011-08-02 |
Silicon wafer and process for the heat treatment of a silicon wafer
Grant 7,828,893 - Mueller , et al. November 9, 2 | 2010-11-09 |
Layered semiconductor wafer with low warp and bow, and process for producing it
Grant 7,820,549 - Blietz , et al. October 26, 2 | 2010-10-26 |
Semiconductor substrate and process for producing it
Grant 7,803,695 - Dantz , et al. September 28, 2 | 2010-09-28 |
Method and apparatus for the treatment of a semiconductor wafer
Grant 7,799,692 - Murphy , et al. September 21, 2 | 2010-09-21 |
Multilayered Semiconductor Wafer And Process For Manufacturing The Same
App 20090321747 - Murphy; Brian ; et al. | 2009-12-31 |
Silicon wafer and process for producing it
Grant 7,537,657 - Seuring , et al. May 26, 2 | 2009-05-26 |
Semiconductor Substrate And Process For Producing It
App 20090065891 - Dantz; Dirk ; et al. | 2009-03-12 |
Semiconductor substrate and process for producing it
Grant 7,491,966 - Dantz , et al. February 17, 2 | 2009-02-17 |
Film or layer of semiconducting material, and process for producing the film or layer
Grant 7,417,297 - Murphy , et al. August 26, 2 | 2008-08-26 |
Method For Reducing And Homogenizing The Thickness Of A Semiconductor Layer Which Lies On The Surface Of An Electrically Insulating Material
App 20080188084 - Feijoo; Diego ; et al. | 2008-08-07 |
Method and apparatus for leveling a semiconductor wafer, and semiconductor wafer with improved flatness
Grant 7,407,891 - Bauer , et al. August 5, 2 | 2008-08-05 |
SOI wafer and method for producing it
Grant 7,394,129 - Graf , et al. July 1, 2 | 2008-07-01 |
Soi Wafer And Method For Producing It
App 20080153259 - Graef; Dieter ; et al. | 2008-06-26 |
Layered Semiconductor Wafer With Low Warp And Bow, And Process For Producing It
App 20080122043 - Blietz; Markus ; et al. | 2008-05-29 |
Semiconductor Substrate And Process For Producing It
App 20070281441 - Dantz; Dirk ; et al. | 2007-12-06 |
Method And Apparatus For The Treatment Of A Semiconductor Wafer
App 20070267142 - Murphy; Brian ; et al. | 2007-11-22 |
Semiconductor substrate and process for producing it
Grant 7,279,700 - Dantz , et al. October 9, 2 | 2007-10-09 |
Silicon wafer and process for producing it
Grant 7,235,863 - Seuring , et al. June 26, 2 | 2007-06-26 |
Silicon wafer and process for producing it
App 20060278157 - Seuring; Christoph ; et al. | 2006-12-14 |
SOI wafer and process for producing it
Grant 7,122,865 - Holzl , et al. October 17, 2 | 2006-10-17 |
Silicon wafer and process for the heat treatment of a silicon wafer
App 20060213424 - Mueller; Timo ; et al. | 2006-09-28 |
Film or layer of semiconducting material, and process for producing the film or layer
App 20060202310 - Murphy; Brian ; et al. | 2006-09-14 |
Semiconductor wafer having a silicon-germanium layer, and method for its production
App 20060145188 - Dantz; Dirk ; et al. | 2006-07-06 |
Semiconductor wafer having a semiconductor layer and an electrically insulating layer beneath it, and process for producing it
App 20060138540 - Dantz; Dirk ; et al. | 2006-06-29 |
Film or layer made of semi-conductive material and method for producing said film or layer
Grant 7,052,948 - Murphy , et al. May 30, 2 | 2006-05-30 |
Method and apparatus for leveling a semiconductor wafer, and semiconductor wafer with improved flatness
App 20060097355 - Bauer; Theresia ; et al. | 2006-05-11 |
Semiconductor substrate and process for producing it
App 20060097317 - Dantz; Dirk ; et al. | 2006-05-11 |
Layered semiconductor wafer with low warp and bow, and process for producing it
App 20060046431 - Blietz; Markus ; et al. | 2006-03-02 |
Semiconductor substrate and process for producing it
App 20050287767 - Dantz, Dirk ; et al. | 2005-12-29 |
SOI wafer and method for producing it
App 20050245048 - Graf, Dieter ; et al. | 2005-11-03 |
Silicon wafer and process for producing it
App 20050032376 - Seuring, Christoph ; et al. | 2005-02-10 |
SOI wafer and process for producing IT
App 20040251500 - Holzl, Robert ; et al. | 2004-12-16 |
Process for the heat treatment of a silicon wafer, and silicon wafer produced
Grant 6,803,331 - Holzl , et al. October 12, 2 | 2004-10-12 |
Film or layer made of semi-conductive material and method for producing said film or layer
App 20040142542 - Murphy, Brian ; et al. | 2004-07-22 |
Process for the heat treatment of a silicon wafer, and silicon wafer produced
App 20030148634 - Holzl, Robert ; et al. | 2003-08-07 |
Semiconductor Wafer With Crystal Lattice Defects, And Process For Producing This Semiconductor Wafer
App 20030129834 - Obermeier, Dr. Gunther ; et al. | 2003-07-10 |
Process for producing silicon semiconductor wafers with low defect density
Grant 5,935,320 - Graef , et al. August 10, 1 | 1999-08-10 |
Process for the surface treatment of semiconductor slices
Grant 5,164,323 - Brehm , et al. November 17, 1 | 1992-11-17 |
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