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Patent applications and USPTO patent grants for Wagner; Thomas M..The latest application filed is for "photoresist trimming process".
Patent | Date |
---|---|
Photoresist trimming process Grant 7,960,288 - Crawford , et al. June 14, 2 | 2011-06-14 |
Photoresist trimming process Grant 7,955,988 - Crawford , et al. June 7, 2 | 2011-06-07 |
Photoresist Trimming Process App 20080032214 - Crawford; Shaun ;   et al. | 2008-02-07 |
Photoresist Trimming Process App 20080020586 - CRAWFORD; Shaun ;   et al. | 2008-01-24 |
Photoresist trimming process Grant 7,304,000 - Crawford , et al. December 4, 2 | 2007-12-04 |
CD uniformity of chrome etch to photomask process Grant 7,014,959 - Crawford , et al. March 21, 2 | 2006-03-21 |
Photoresist Trimming Process App 20060040504 - Crawford; Shaun ;   et al. | 2006-02-23 |
Improved Cd Uniformity Of Chrome Etch To Photomask Process App 20040262264 - Crawford, Shaun B. ;   et al. | 2004-12-30 |
Method of inhibiting contaminants using dilute acid rinse Grant 6,758,912 - Chao , et al. July 6, 2 | 2004-07-06 |
Method of inhibiting contaminants using dilute acid rinse App 20030051740 - Chao, Virginia Chi-Chuen ;   et al. | 2003-03-20 |
Method of minimizing contaminating deposits using dilute acid rinse Grant 6,494,966 - Chao , et al. December 17, 2 | 2002-12-17 |
Method of minimizing contaminating deposits using dilute acid rinse App 20010001958 - Chao, Virginia Chi-Chuen ;   et al. | 2001-05-31 |
Dilute acid rinse after develop for chrome etch Grant 6,162,565 - Chao , et al. December 19, 2 | 2000-12-19 |
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