Wagner; Mark I.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wagner; Mark I..The latest application filed is for "methods and apparatus for displacing fluids from substrates using supercritical co2".

Company Profile

0.13.11

Wagner; Mark I. - Austin TX
Wagner; Mark I. - Raleigh NC

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods for preventing precipitation of etch byproducts during an etch process and/or subsequent rinse process Grant 9,620,410 - Wagner , et al. April 11, 2	2017-04-11
Methods and apparatus for displacing fluids from substrates using supercritical CO2 Grant 9,004,086 - Nixon , et al. April 14, 2	2015-04-14
Method and system of drying a microelectronic topography Grant 8,961,701 - Wagner , et al. February 24, 2	2015-02-24
Methods And Apparatus For Displacing Fluids From Substrates Using Supercritical Co2 App 20120111379 - Nixon; Ronda K. ; et al.	2012-05-10
Methods and systems for preventing feature collapse during microelectronic topography fabrication Grant 8,153,533 - DeYoung , et al. April 10, 2	2012-04-10
Methods for Preventing Precipitation of Etch Byproducts During an Etch Process and/or Subsequent Rinse Process App 20100184301 - Wagner; Mark I. ; et al.	2010-07-22
Method And System Of Drying A Microelectronic Topography App 20100071726 - Wagner; Mark I. ; et al.	2010-03-25
Methods and Systems for Preventing Feature Collapse During Microelectronic Topography Fabrication App 20100072169 - DeYoung; James P. ; et al.	2010-03-25
Method of coating microelectronic substrates Grant 7,592,035 - DeYoung , et al. September 22, 2	2009-09-22
Method of treating microelectronic substrates Grant 7,141,496 - DeYoung , et al. November 28, 2	2006-11-28
Method of coating microelectronic substrates App 20060035014 - DeYoung; James P. ; et al.	2006-02-16
Method of coating microelectronic substrates Grant 6,989,172 - DeYoung , et al. January 24, 2	2006-01-24
Compositions of transition metal species in dense phase carbon dioxide and methods of use thereof Grant 6,953,041 - DeYoung , et al. October 11, 2	2005-10-11
Method of treating microelectronic substrates App 20050161819 - DeYoung, James P. ; et al.	2005-07-28
Methods for transferring supercritical fluids in microelectronic and other industrial processes Grant 6,905,555 - DeYoung , et al. June 14, 2	2005-06-14
Method of coating microelectronic substrates App 20040146636 - DeYoung, James P. ; et al.	2004-07-29
Compositions of transition metal species in dense phase carbon dioxide and methods of use thereof App 20040071873 - DeYoung, James P. ; et al.	2004-04-15
Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide App 20040045588 - DeYoung, James P. ; et al.	2004-03-11
Methods for transferring supercritical fluids in microelectronic and other industrial processes App 20040020518 - DeYoung, James P. ; et al.	2004-02-05
Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide Grant 6,669,785 - DeYoung , et al. December 30, 2	2003-12-30
Methods And Compositions For Etch Cleaning Microelectronic Substrates In Carbon Dioxide App 20030216269 - DeYoung, James P. ; et al.	2003-11-20

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