| Patent | Date |
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Protection of photomasks from 193nm radiation damage using thin coatings of ALD Al2O3
Grant 11,143,953 - Sandstrom , et al. October 12, 2 | 2021-10-12 |
Communication System For Automation And Process Engineering, And Y Selector Switch Unit For Such A Communication System
App 20210195302 - WAGNER; Alfred | 2021-06-24 |
Communication System For Automation And Process Engineering, And Y Selector Switch Unit For Such A Communication System
App 20210149358 - WAGNER; Alfred ; et al. | 2021-05-20 |
PROTECTION OF PHOTOMASKS FROM 193nm RADIATION DAMAGE USING THIN COATINGS OF ALD Al2O3.
App 20200301270 - Sandstrom; Robert L. ; et al. | 2020-09-24 |
Laser surgical apparatus and methods of its use minimizing damage during the ablation of tissue using a focused ultrashort pulsed laser beam wherein the slope of fluence breakdown is a function of the pulse width
Grant 10,058,388 - Haight , et al. August 28, 2 | 2018-08-28 |
Method for the contactless tapping of communication signals
Grant 9,847,812 - Hoch , et al. December 19, 2 | 2017-12-19 |
Method For The Contactless Tapping Of Communication Signals
App 20170317716 - Hoch; Werner ; et al. | 2017-11-02 |
Laser Surgical Apparatus and Methods of its Use Minimizing Damage During the Ablation of Tissue Using a Focused Ultrashort Pulsed Laser Beam Wherein the Slope of Fluence Breakdown is a Function of the Pulse Width
App 20150265351 - Haight; Richard Alan ; et al. | 2015-09-24 |
Debris minimization and improved spatial resolution in pulsed laser ablation of materials
Grant 9,102,008 - Haight , et al. August 11, 2 | 2015-08-11 |
Extreme ultraviolet (EUV) multilayer defect compensation and EUV masks
Grant 9,052,617 - Gallagher , et al. June 9, 2 | 2015-06-09 |
Extreme Ultraviolet (euv) Multilayer Defect Compensation And Euv Masks
App 20140272687 - GALLAGHER; Emily E. ; et al. | 2014-09-18 |
Extreme ultraviolet (EUV) multilayer defect compensation and EUV masks
Grant 8,748,063 - Gallagher , et al. June 10, 2 | 2014-06-10 |
Mitigation of mask defects by pattern shifting
Grant 8,726,202 - Wagner May 13, 2 | 2014-05-13 |
Extreme Ultraviolet (euv) Multilayer Defect Compensation And Euv Masks
App 20140038087 - GALLAGHER; Emily E. ; et al. | 2014-02-06 |
Techniques for reducing degradation and/or modifying feature size of photomasks
Grant 8,568,959 - Bartlau , et al. October 29, 2 | 2013-10-29 |
Mitigation Of Mask Defects By Pattern Shifting
App 20130273463 - Wagner; Alfred | 2013-10-17 |
Apparatus for Minimizing Sample Damage During the Ablation of Biological Tissue Using a Focused Ultrashort Pulsed Laser Beam Wherein the Slope of Fluence Breakdown is a Function of the Pulse Width
App 20130211388 - Haight; Richard Alan ; et al. | 2013-08-15 |
Mitigation of mask defects by pattern shifting
Grant 8,458,623 - Wagner June 4, 2 | 2013-06-04 |
Evaluation of image processing algorithms
Grant 8,442,299 - Longo , et al. May 14, 2 | 2013-05-14 |
Method for minimizing sample damage during the ablation of a first biological material disposed on a second biological material using a focused ultrashort pulsed laser beam wherein the slope of fluence breakdown is a function of the pulse width
Grant 8,389,890 - Haight , et al. March 5, 2 | 2013-03-05 |
Enhanced quality of laser ablation by controlling laser repetition rate
Grant 8,344,286 - Longo , et al. January 1, 2 | 2013-01-01 |
Motor vehicle having a preventatively acting safety system
Grant 8,275,519 - Bernzen , et al. September 25, 2 | 2012-09-25 |
Debris minimization and improved spatial resolution in pulsed laser ablation of materials
Grant 7,994,450 - Haight , et al. August 9, 2 | 2011-08-09 |
Evaluation of Image Processing Algorithms
App 20110110578 - Longo; Peter P. ; et al. | 2011-05-12 |
Motor vehicle having a preventive action protection system
Grant 7,908,059 - Bullinger , et al. March 15, 2 | 2011-03-15 |
Method and device for drilling, particularly percussion or rotary percussion drilling, a hole in soil or rock material
Grant 7,874,380 - Mocivnik , et al. January 25, 2 | 2011-01-25 |
Enhanced Quality Of Laser Ablation By Controlling Laser Repetition Rate
App 20100289186 - Longo; Peter P. ; et al. | 2010-11-18 |
System And Method For Eliminating The Structure And Edge Roughness Produced During Laser Ablation Of A Material
App 20100219168 - Wagner; Alfred | 2010-09-02 |
Method and apparatus for repair of reflective photomasks
Grant 7,759,606 - Haight , et al. July 20, 2 | 2010-07-20 |
System and method for eliminating the structure and edge roughness produced during laser ablation of a material
Grant 7,732,104 - Wagner June 8, 2 | 2010-06-08 |
Techniques For Reducing Degradation And/or Modifying Feature Size Of Photomasks
App 20100086876 - Bartlau; Peter H. ; et al. | 2010-04-08 |
Process, sensor and diagnosis device for pump diagnosis
Grant 7,693,684 - Halbinger , et al. April 6, 2 | 2010-04-06 |
Electrical connector and process for decentralized storage of the parameters of a sensor
Grant 7,668,685 - Kathan , et al. February 23, 2 | 2010-02-23 |
Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed laser beam
Grant 7,649,153 - Haight , et al. January 19, 2 | 2010-01-19 |
Method For Minimizing Sample Damage During The Ablation Of Material Using A Focused Ultrashort Pulsed Laser Beam Wherein The Slope Of Fluence Breakdown Is A Function Of The Pulse Width
App 20100006550 - Haight; Richard Alan ; et al. | 2010-01-14 |
Method for controlling the operation of a reversible belt retractor in a motor vehicle
Grant 7,597,170 - Bogenrieder , et al. October 6, 2 | 2009-10-06 |
Pipe Connection
App 20090230679 - Mocivnik; Josef ; et al. | 2009-09-17 |
Restraint System Comprising an Adjustable Outlet Cross Section
App 20090194979 - Bacher; Werner ; et al. | 2009-08-06 |
Motor vehicle with a safety system with a preventive action
App 20090150028 - Bernzen; Werner ; et al. | 2009-06-11 |
Method and device for drilling, particularly percussion or rotary percussion drilling, a hole in soil or rock material
App 20090133933 - Karpellus; Walter ; et al. | 2009-05-28 |
Method and Device for Drilling, Particularly Percussion or Rotary Percussion Drilling ,a Hole in Soil or Rock Material
App 20090114402 - Mocivnik; Josef ; et al. | 2009-05-07 |
Debris Minimization And Improved Spatial Resolution In Pulsed Laser Ablation Of Materials
App 20090107964 - Haight; Richard A. ; et al. | 2009-04-30 |
Electrical transducer
Grant 7,496,458 - Walter , et al. February 24, 2 | 2009-02-24 |
Method for a Preventive-Action Protection System In a Motor Vehicle Having an Inter-Vehicle Distance Sensor System
App 20090024282 - Roehm; Hans ; et al. | 2009-01-22 |
Motor Vehicle Having a Preventatively Acting Safety System
App 20080319615 - Bernzen; Werner ; et al. | 2008-12-25 |
System And Method For Eliminating The Structure And Edge Roughness Produced During Laser Ablation Of A Material
App 20080176147 - Wagner; Alfred | 2008-07-24 |
Method and device for producing pretensioned anchorings
Grant 7,320,371 - Mocivnik , et al. January 22, 2 | 2008-01-22 |
Process, sensor and diagnosis device for pump diagnosis
App 20070239371 - HALBINGER; Lorenz ; et al. | 2007-10-11 |
Method for controlling the operation of a reversible belt retractor in a motor vehicle
App 20070158488 - Bogenrieder; Ralf ; et al. | 2007-07-12 |
Motor vehicle provided with a pre-safe system
App 20070131468 - Bullinger; Wilfried ; et al. | 2007-06-14 |
Electrical connector and process for decentralized storage of the parameters of a sensor
App 20070126570 - KATHAN; Benno ; et al. | 2007-06-07 |
Method and apparatus for performing laser CVD
Grant 7,211,300 - Haight , et al. May 1, 2 | 2007-05-01 |
Method and apparatus for repair of reflective photomasks
Grant 7,170,030 - Haight , et al. January 30, 2 | 2007-01-30 |
Method and device for producing pretensioned anchorings
App 20070012482 - Mocivnik; Josef ; et al. | 2007-01-18 |
Method And Apparatus For Repair Of Reflective Photomasks
App 20060243712 - Haight; Richard A. ; et al. | 2006-11-02 |
Method and apparatus for repair of reflective photomasks
App 20050056625 - Haight, Richard A. ; et al. | 2005-03-17 |
Electrical measurement means
Grant 6,831,465 - Kathan , et al. December 14, 2 | 2004-12-14 |
Measurement apparatus and process for determining the position of an object relative to a reference surface
Grant 6,807,845 - Halbinger , et al. October 26, 2 | 2004-10-26 |
Method and apparatus for performing laser CVD
App 20040091638 - Haight, Richard A. ; et al. | 2004-05-13 |
Electrical measurement means
App 20040012394 - Kathan, Benno ; et al. | 2004-01-22 |
Method and apparatus for performing laser CVD
Grant 6,656,539 - Haight , et al. December 2, 2 | 2003-12-02 |
Debris minimization and improved spatial resolution in pulsed laser ablation of materials
App 20030127441 - Haight, Richard A. ; et al. | 2003-07-10 |
System And Method For Modifying Enclosed Areas For Ion Beam And Laser Beam Bias Effects
App 20030105547 - Haight, Richard A. ; et al. | 2003-06-05 |
Measurement apparatus and process for determining the position of an object relative to a reference surface
App 20030079525 - Halbinger, Lorenz ; et al. | 2003-05-01 |
Electrical transducer
App 20020145528 - Walter, Heinz ; et al. | 2002-10-10 |
Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed laser beam
App 20020125230 - Haight, Richard Alan ; et al. | 2002-09-12 |
Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed beam
Grant 6,333,485 - Haight , et al. December 25, 2 | 2001-12-25 |
Methods for repair of photomasks
Grant 6,165,649 - Grenon , et al. December 26, 2 | 2000-12-26 |
Method for repair of photomasks
Grant 6,156,461 - Grenon , et al. December 5, 2 | 2000-12-05 |
Methods for repair of photomasks
Grant 6,090,507 - Grenon , et al. July 18, 2 | 2000-07-18 |
Focused ion beam metrology
Grant 5,798,529 - Wagner August 25, 1 | 1998-08-25 |
Grid structure for reducing current density in focussed ion beam
Grant 5,159,170 - Levin , et al. October 27, 1 | 1992-10-27 |
Gas delivery for ion beam deposition and etching
Grant 5,149,974 - Kirch , et al. September 22, 1 | 1992-09-22 |
Capsules
Grant 4,822,618 - Schweiger , et al. April 18, 1 | 1989-04-18 |
Device for indirect extrusion of a hollow section
Grant 4,557,131 - Wagner , et al. December 10, 1 | 1985-12-10 |
Correction of lithographic masks
Grant 4,548,883 - Wagner October 22, 1 | 1985-10-22 |
Process for manufacturing plastically deformed light metal objects and shaped bodies having a light metal part
Grant 4,441,646 - Wagner , et al. April 10, 1 | 1984-04-10 |
Process for manufacturing plastically deformed light metal objects having a connector part of a different metal
Grant 4,397,413 - Wagner , et al. August 9, 1 | 1983-08-09 |
Extruded composite section
Grant 4,005,255 - Wagner , et al. January 25, 1 | 1977-01-25 |
Method And Apparatus For Extrusion Of Workpieces
Grant 3,808,865 - Wagner , et al. May 7, 1 | 1974-05-07 |
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