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Patent applications and USPTO patent grants for Waeterloos; Joost J. M..The latest application filed is for "organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices".
Patent | Date |
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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices Grant 7,115,531 - Shaffer, II , et al. October 3, 2 | 2006-10-03 |
Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices App 20060063393 - Shaffer; Edward O. II ;   et al. | 2006-03-23 |
Tri-layer masking architecture for patterning dual damascene interconnects Grant 6,815,333 - Townsend, III , et al. November 9, 2 | 2004-11-09 |
Tri-layer masking architecture for patterning dual damascene interconnects App 20030219973 - Townsend, Paul H. III ;   et al. | 2003-11-27 |
Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices App 20020052125 - Shaffer, Edward O. II ;   et al. | 2002-05-02 |
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