| Patent | Date |
|---|
Method and device for the comminution of semiconductor material
Grant 5,660,335 - Koppl , et al. August 26, 1 | 1997-08-26 |
Method for the contamination-free size reduction of semiconductor material, especially silicon
Grant 5,464,159 - Wolf , et al. November 7, 1 | 1995-11-07 |
Process for manufacturing semiconductor wafers having deformation ground in a defined way
Grant 5,400,548 - Huber , et al. March 28, 1 | 1995-03-28 |
Epitaxially coated semiconductor wafers having low-oxygen zone of adjustable extent and process for producing same
Grant 5,355,831 - Schauer October 18, 1 | 1994-10-18 |
Process for producing storage-stable silicon wafer surfaces having advantageous oxidation properties and silicon wafer fored thereby
Grant 5,352,637 - Fabry , et al. October 4, 1 | 1994-10-04 |
Method and device for producing seamless ribbon and wire loops, and their use as cuttings tools in ribbon and wire saws
Grant 5,287,774 - Seifert February 22, 1 | 1994-02-22 |
Process for producing storage-stable surfaces of polished silicon wafers
Grant 5,219,613 - Fabry , et al. June 15, 1 | 1993-06-15 |
Apparatus and method of automatically separating stacked wafers
Grant 5,213,451 - Frank , et al. May 25, 1 | 1993-05-25 |
Process for the surface treatment of semiconductor slices
Grant 5,164,323 - Brehm , et al. November 17, 1 | 1992-11-17 |
Process and apparatus for double-sided chemomechanical polishing of semiconductor wafers and semiconductor wafers obtainable thereby
Grant 5,110,428 - Prigge , et al. May 5, 1 | 1992-05-05 |
Device for transporting and positioning semiconductor wafer-type workpieces
Grant 5,108,513 - Muller , et al. April 28, 1 | 1992-04-28 |
Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds
Grant 5,051,117 - Prigge , et al. September 24, 1 | 1991-09-24 |
Process for the hydrophilizing and/or cement-residue-removing surface treatment of silicon wafers
Grant 5,049,200 - Brunner , et al. September 17, 1 | 1991-09-17 |
Method and apparatus for sawing bar-shaped workpieces into slices
Grant 4,991,475 - Malcok , et al. February 12, 1 | 1991-02-12 |
Process for removing n-type impurities from liquid or gaseous substances produced in the gas-phase deposition of silicon
Grant 4,892,568 - Prigge , et al. January 9, 1 | 1990-01-09 |
Process for sawing crystal rods or blocks into thin wafers
Grant 4,844,047 - Brehm , et al. July 4, 1 | 1989-07-04 |
Process for polishing silicon wafers
Grant 4,692,223 - Lampert , et al. September 8, 1 | 1987-09-08 |
Process for the backside-gettering surface treatment of semiconductor wafers
Grant 4,587,771 - Buchner , et al. May 13, 1 | 1986-05-13 |
Method for producing articles of high-purity synthetic quartz glass
Grant 4,572,729 - Lang , et al. February 25, 1 | 1986-02-25 |
Method of making reference surface markings on semiconductor wafers by laser beam
Grant 4,522,656 - Kuhn-Kuhnenfeld , et al. June 11, 1 | 1985-06-11 |
Process for processing waste gases resulting during the production of silicon
Grant 4,515,762 - Griesshammer , et al. May 7, 1 | 1985-05-07 |
Method of sawing crystalline rods, and multiple-blade internal-hole saw for carrying out the method
Grant 4,513,544 - Lossl , et al. April 30, 1 | 1985-04-30 |
Process for polishing III-V-semiconductor surfaces
Grant 4,448,634 - Lampert May 15, 1 | 1984-05-15 |
Apparatus for supporting crystalline wafers
Grant 4,445,494 - Schiele , et al. May 1, 1 | 1984-05-01 |
Method for making a very pure silicon
Grant 4,331,698 - Behensky , et al. May 25, 1 | 1982-05-25 |
Device and process for pulling high-purity semiconductor rods from a melt
Grant 4,330,362 - Zulehner May 18, 1 | 1982-05-18 |
Method for the deposition of pure semiconductor material
Grant 4,311,545 - Bugl , et al. January 19, 1 | 1982-01-19 |
Process for cementing semiconductor discs onto a carrier plate
Grant 4,283,242 - Regler , et al. August 11, 1 | 1981-08-11 |
Process for evening out the amount of material removed from discs in polishing
Grant 4,270,316 - Kramer , et al. June 2, 1 | 1981-06-02 |
Process for working up hydrolyzable and/or water-soluble compounds
Grant 4,252,780 - Koppl , et al. February 24, 1 | 1981-02-24 |
Lap cutting abrasive
Grant 4,246,003 - Regler , et al. January 20, 1 | 1981-01-20 |
Process for producing semiconductor materials and metals of highest purity
Grant 4,215,154 - Behensky , et al. July 29, 1 | 1980-07-29 |
Process for the deposition of pure semiconductor material
Grant 4,179,530 - Koppl , et al. December 18, 1 | 1979-12-18 |
Process and apparatus for the semicontinuous production of silicon moldings
Grant 4,175,610 - Zauhar , et al. November 27, 1 | 1979-11-27 |
Silverplated vapor deposition chamber
Grant 4,173,944 - Koppl , et al. November 13, 1 | 1979-11-13 |
Process for cleaning semi-conductor discs
Grant 4,156,619 - Griesshammer May 29, 1 | 1979-05-29 |
Process for producing large-size, self-supporting plates of silicon
Grant 4,131,659 - Authier , et al. December 26, 1 | 1978-12-26 |
Tool for the contact-free support of discs
Grant 4,118,058 - Rahn , et al. October 3, 1 | 1978-10-03 |
Process for producing large-size substrate-based semiconductor material utilizing vapor-phase deposition and subsequent resolidification
Grant 4,113,532 - Authier , et al. September 12, 1 | 1978-09-12 |
Process for purifying halogenosilanes
Grant 4,112,057 - Lang , et al. September 5, 1 | 1978-09-05 |
Etching agent for III/V semiconductors
Grant 4,100,014 - Kuhn-Kuhnenfeld , et al. July 11, 1 | 1978-07-11 |
Process for the production of monocrystalline silicon rods
Grant 4,097,329 - Stock , et al. June 27, 1 | 1978-06-27 |
Process for determining the donor content of polycrystalline silicon of high purity to be used in the semiconductor industries
Grant 4,057,395 - Schmidt , et al. November 8, 1 | 1977-11-08 |
Process for the removal of specific crystal structure defects from semiconductor discs and the product thereof
Grant 4,042,419 - Heinke , et al. August 16, 1 | 1977-08-16 |
Method and apparatus for making a metal to semiconductor contact
Grant 4,021,735 - Vieweg-Gutberlet , et al. May 3, 1 | 1977-05-03 |
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