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Inspection system with non-circular pupil
Grant 11,112,691 - Kvamme , et al. September 7, 2 | 2021-09-07 |
Fast Phase-shift Interferometry By Laser Frequency Shift
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Optical Etendue Matching Methods for Extreme Ultraviolet Metrology
App 20200383200 - Marks; Zefram ; et al. | 2020-12-03 |
Inspection System with Non-Circular Pupil
App 20200225574 - Kvamme; Damon F. ; et al. | 2020-07-16 |
System and method for generation of extreme ultraviolet light
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System and Method for Generation of Extreme Ultraviolet Light
App 20150076359 - Bykanov; Alexander ; et al. | 2015-03-19 |
Optical characterization systems employing compact synchrotron radiation sources
Grant 8,941,336 - Liu , et al. January 27, 2 | 2015-01-27 |
Apparatus for EUV imaging and methods of using same
Grant 8,842,272 - Wack , et al. September 23, 2 | 2014-09-23 |
Optical characterization systems employing compact synchrotron radiation sources
Grant 8,749,179 - Liu , et al. June 10, 2 | 2014-06-10 |
Optical Characterization Systems Employing Compact Synchrotron Radiation Sources
App 20140048707 - Liu; Yanwei ; et al. | 2014-02-20 |
Apparatus For Euv Imaging And Methods Of Using Same
App 20130083321 - Wack; Daniel C. ; et al. | 2013-04-04 |
Bright and dark field scatterometry systems for line roughness metrology
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Measurement and control of strained devices
Grant 7,951,672 - Wack , et al. May 31, 2 | 2011-05-31 |
Measurement and control of strained devices
App 20110027919 - Wack; Daniel C. ; et al. | 2011-02-03 |
Measurement and control of strained devices
Grant 7,838,309 - Wack , et al. November 23, 2 | 2010-11-23 |
Parametric profiling using optical spectroscopic systems
Grant 7,826,071 - Shchegrov , et al. November 2, 2 | 2010-11-02 |
Method for optimizing the configuration of a scatterometry measurement system
Grant 7,826,072 - Wack , et al. November 2, 2 | 2010-11-02 |
System for scatterometric measurements and applications
Grant 7,821,654 - Fabrikant , et al. October 26, 2 | 2010-10-26 |
Model-based measurement of semiconductor device features with feed forward use of data for dimensionality reduction
Grant 7,716,003 - Wack , et al. May 11, 2 | 2010-05-11 |
System For Scatterometric Measurements And Applications
App 20090195779 - Fabrikant; Anatoly ; et al. | 2009-08-06 |
System For Measuring A Sample With A Layer Containing A Periodic Diffracting Structure
App 20090190141 - Bareket; Noah ; et al. | 2009-07-30 |
Parametric Profiling Using Optical Spectroscopic Systems
App 20090135416 - Shchegrov; Andrei V. ; et al. | 2009-05-28 |
System for measuring a sample with a layer containing a periodic diffracting structure
Grant 7,515,253 - Bareket , et al. April 7, 2 | 2009-04-07 |
System for scatterometric measurements and applications
Grant 7,511,830 - Fabrikant , et al. March 31, 2 | 2009-03-31 |
System for Scatterometric Measurements and Applications
App 20080084567 - Fabrikant; Anatoly ; et al. | 2008-04-10 |
System for measuring a sample with a layer containing a periodic diffracting structure
App 20080037005 - Bareket; Noah ; et al. | 2008-02-14 |
System for scatterometric measurements and applications
Grant 7,301,649 - Fabrikant , et al. November 27, 2 | 2007-11-27 |
Parametric profiling using optical spectroscopic systems
Grant 7,280,230 - Shchegrov , et al. October 9, 2 | 2007-10-09 |
System for scatterometric measurements and applications
Grant 7,099,005 - Fabrikant , et al. August 29, 2 | 2006-08-29 |
System for scatterometric measurements and applications
App 20050274901 - Fabrikant, Anatoly ; et al. | 2005-12-15 |
Parametric profiling using optical spectroscopic systems
App 20040070772 - Shchegrov, Andrei V. ; et al. | 2004-04-15 |
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