Vyne; Robert M
Patent Applications and Registrations
Patent applications and USPTO patent grants for Vyne; Robert M.The latest application filed is for "porous substrate holder with thinned portions".
- Vyne; Robert M - Chandler AZ
- Vyne; Robert M. - Gilbert AZ
- Vyne, Robert M. - Tempe AZ
| Patent | Date |
|---|---|
| Susceptor Grant D743,357 - Vyne November 17, 2 | 2015-11-17 |
| Wafer support system Grant 7,655,093 - Halpin , et al. February 2, 2 | 2010-02-02 |
| Porous Substrate Holder With Thinned Portions App 20090280248 - Goodman; Matthew G. ; et al. | 2009-11-12 |
| Wafer Support System App 20070131173 - Halpin; Michael W. ; et al. | 2007-06-14 |
| Wafer support system Grant 7,186,298 - Halpin , et al. March 6, 2 | 2007-03-06 |
| Wafer support system App 20040198153 - Halpin, Michael W. ; et al. | 2004-10-07 |
| Wafer support system Grant 6,692,576 - Halpin , et al. February 17, 2 | 2004-02-17 |
| Wafer support system App 20030075274 - Halpin, Michael W. ; et al. | 2003-04-24 |
| Wafer support system Grant 6,491,757 - Halpin , et al. December 10, 2 | 2002-12-10 |
| Process chamber with rectangular temperature compensation ring App 20020179586 - Wengert, John F. ; et al. | 2002-12-05 |
| Process chamber with downstream getter plate Grant 6,464,792 - Wengert , et al. October 15, 2 | 2002-10-15 |
| Wafer support system Grant 6,343,183 - Halpin , et al. January 29, 2 | 2002-01-29 |
| Wafer support system App 20010054390 - Halpin, Michael W. ; et al. | 2001-12-27 |
| Wafer support system Grant 6,203,622 - Halpin , et al. March 20, 2 | 2001-03-20 |
| Wafer support system Grant 6,113,702 - Halpin , et al. September 5, 2 | 2000-09-05 |
| Process chamber with inner support Grant 6,093,252 - Wengert , et al. July 25, 2 | 2000-07-25 |
| Wafer support system Grant 6,053,982 - Halpin , et al. April 25, 2 | 2000-04-25 |
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