VUONG; Vi

Patent Applications and Registrations

Patent applications and USPTO patent grants for VUONG; Vi.The latest application filed is for "synthetic wavelengths for endpoint detection in plasma etching".

Company Profile

0.43.42

VUONG; Vi - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Synthetic Wavelengths For Endpoint Detection In Plasma Etching App 20210057195 - CHEN; Yan ; et al.	2021-02-25
Synthetic wavelengths for endpoint detection in plasma etching Grant 10,910,201 - Chen , et al. February 2, 2	2021-02-02
Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber Grant 10,692,705 - Mihaylov , et al.	2020-06-23
Advanced Optical Sensor, System, And Methodologies For Etch Processing Monitoring App 20180286643 - TUITJE; Holger ; et al.	2018-10-04
Method of endpoint detection of plasma etching process using multivariate analysis Grant 10,002,804 - Chen , et al. June 19, 2	2018-06-19
Advanced Optical Sensor And Method For Plasma Chamber App 20170140905 - Mihaylov; Mihail ; et al.	2017-05-18
Accurate and fast neural network training for library-based critical dimension (CD) metrology Grant 9,607,265 - Jin , et al. March 28, 2	2017-03-28
Method Of Endpoint Detection Of Plasma Etching Process Using Multivariate Analysis App 20160172258 - Chen; Yan ; et al.	2016-06-16
Method of endpoint detection of plasma etching process using multivariate analysis Grant 9,330,990 - Chen , et al. May 3, 2	2016-05-03
Method Of Endpoint Detection Of Plasma Etching Process Using Multivariate Analysis App 20140106477 - CHEN; Yan ; et al.	2014-04-17
Accurate And Fast Neural Network Training For Library-based Critical Dimension (cd) Metrology App 20140032463 - Jin; Wen ; et al.	2014-01-30
Accurate and fast neural network training for library-based critical dimension (CD) metrology Grant 8,577,820 - Jin , et al. November 5, 2	2013-11-05
Determination of training set size for a machine learning system Grant 8,452,718 - Jin , et al. May 28, 2	2013-05-28
Transforming metrology data from a semiconductor treatment system using multivariate analysis Grant 8,346,506 - Vuong , et al. January 1, 2	2013-01-01
Accurate and Fast Neural network Training for Library-Based Critical Dimension (CD) Metrology App 20120226644 - Jin; Wen ; et al.	2012-09-06
Transforming Metrology Data From A Semiconductor Treatment System Using Multivariate Analysis App 20120199287 - Vuong; Vi ; et al.	2012-08-09
Transforming metrology data from a semiconductor treatment system using multivariate analysis Grant 8,170,833 - Vuong , et al. May 1, 2	2012-05-01
Determination Of Training Set Size For A Machine Learning System App 20110307424 - Jin; Wen ; et al.	2011-12-15
Data flow management in generating profile models used in optical metrology Grant 7,783,669 - Qiu , et al. August 24, 2	2010-08-24
Data flow management in generating different signal formats used in optical metrology Grant 7,765,234 - Qiu , et al. July 27, 2	2010-07-27
Allocating processing units to processing clusters to generate simulated diffraction signals Grant 7,765,076 - Erva , et al. July 27, 2	2010-07-27
Allocating processing units to generate simulated diffraction signals used in optical metrology Grant 7,742,888 - Erva , et al. June 22, 2	2010-06-22
Optical metrology optimization for repetitive structures Grant 7,616,325 - Vuong , et al. November 10, 2	2009-11-10
Optical metrology model optimization based on goals Grant 7,588,949 - Vuong , et al. September 15, 2	2009-09-15
Optimizing selected variables of an optical metrology system Grant 7,525,673 - Vuong , et al. April 28, 2	2009-04-28
Managing and using metrology data for process and equipment control Grant 7,526,354 - Madriaga , et al. April 28, 2	2009-04-28
Weighting function to enhance measured diffraction signals in optical metrology Grant 7,523,021 - Vuong , et al. April 21, 2	2009-04-21
Measuring a process parameter of a semiconductor fabrication process using optical metrology Grant 7,522,294 - Chu , et al. April 21, 2	2009-04-21
Consecutive measurement of structures formed on a semiconductor wafer using a polarized reflectometer Grant 7,522,295 - Vuong , et al. April 21, 2	2009-04-21
Transforming Metrology Data From A Semiconductor Treatment System Using Multivariate Analysis App 20090094001 - VUONG; Vi ; et al.	2009-04-09
Modeling and measuring structures with spatially varying properties in optical metrology Grant 7,515,282 - Li , et al. April 7, 2	2009-04-07
Matching optical metrology tools using spectra enhancement Grant 7,505,148 - Vuong , et al. March 17, 2	2009-03-17
Model and parameter selection for optical metrology Grant 7,505,153 - Vuong , et al. March 17, 2	2009-03-17
Optimizing selected variables of an optical metrology model Grant 7,495,781 - Vuong , et al. February 24, 2	2009-02-24
In-die optical metrology Grant 7,474,420 - Li , et al. January 6, 2	2009-01-06
Selection of wavelengths for integrated circuit optical metrology Grant 7,474,993 - Doddi , et al. January 6, 2	2009-01-06
Transforming metrology data from a semiconductor treatment system using multivariate analysis Grant 7,467,064 - Vuong , et al. December 16, 2	2008-12-16
Optical Metrology Optimization For Repetitive Structures App 20080285054 - VUONG; Vi ; et al.	2008-11-20
Drift compensation for an optical metrology tool Grant 7,428,044 - Vuong , et al. September 23, 2	2008-09-23
Measuring A Process Parameter Of A Semiconductor Fabrication Process Using Optical Metrology App 20080212080 - Chu; Hanyou ; et al.	2008-09-04
Consecutive measurement of structures formed on a semiconductor wafer using an angle-resolved spectroscopic scatterometer Grant 7,417,750 - Vuong , et al. August 26, 2	2008-08-26
Selecting a hypothetical profile to use in optical metrology Grant 7,394,554 - Vuong , et al. July 1, 2	2008-07-01
Model And Parameter Selection For Optical Metrology App 20080151269 - Vuong; Vi ; et al.	2008-06-26
Optical metrology optimization for repetitive structures Grant 7,388,677 - Vuong , et al. June 17, 2	2008-06-17
Drift compensation for an optical metrology tool App 20080117437 - Vuong; Vi ; et al.	2008-05-22
Matching optical metrology tools using spectra enhancement App 20080117411 - Vuong; Vi ; et al.	2008-05-22
Allocating processing units to processing clusters to generate simulated diffraction signals App 20080115140 - Erva; Hemalatha ; et al.	2008-05-15
Consecutive measurement of structures formed on a semiconductor wafer using a polarized reflectometer App 20080106728 - Vuong; Vi ; et al.	2008-05-08
Consecutive Measurement Of Structures Formed On A Semiconductor Wafer Using An Angle-resolved Spectroscopic Scatterometer App 20080106729 - Vuong; Vi ; et al.	2008-05-08
Data flow management in generating profile models used in optical metrology App 20080091724 - Qiu; Hong ; et al.	2008-04-17
Data flow management in generating different signal formats used in optical metrology App 20080089574 - Qiu; Hong ; et al.	2008-04-17
Model and parameter selection for optical metrology Grant 7,330,279 - Vuong , et al. February 12, 2	2008-02-12
Measuring a process parameter of a semiconductor fabrication process using optical metrology Grant 7,327,475 - Chu , et al. February 5, 2	2008-02-05
Allocating processing units to generate simulated diffraction signals used in optical metrology App 20080027565 - Erva; Hemalatha ; et al.	2008-01-31
Generating a profile model to characterize a structure to be examined using optical metrology App 20080013107 - Chard; Jeffrey A. ; et al.	2008-01-17
Managing and using metrology data for process and equipment control App 20080009081 - Madriaga; Manuel ; et al.	2008-01-10
Optimizing selected variables of an optical metrology model App 20080007740 - Vuong; Vi ; et al.	2008-01-10
Optimizing selected variables of an optical metrology system App 20080007739 - Vuong; Vi ; et al.	2008-01-10
In-die optical metrology App 20070229855 - Li; Shifang ; et al.	2007-10-04
Weighting function to enhance measured diffraction signals in optical metrology App 20070211260 - Vuong; Vi ; et al.	2007-09-13
Selection of wavelengths for integrated circuit optical metrology App 20070198211 - Doddi; Srinivas ; et al.	2007-08-23
Transforming metrology data from a semiconductor treatment system using multivariate analysis App 20070185684 - Vuong; Vi ; et al.	2007-08-09
Optical metrology model optimization based on goals App 20070135959 - Vuong; Vi ; et al.	2007-06-14
Selection of wavelengths for integrated circuit optical metrology Grant 7,216,045 - Doddi , et al. May 8, 2	2007-05-08
Optical metrology model optimization based on goals Grant 7,171,284 - Vuong , et al. January 30, 2	2007-01-30
Modeling and measuring structures with spatially varying properties in optical metrology App 20070002337 - Li; Shifang ; et al.	2007-01-04
Parametric optimization of optical metrology model Grant 7,126,700 - Bao , et al. October 24, 2	2006-10-24
Optimized model and parameter selection for optical metrology Grant 7,092,110 - Balasubramanian , et al. August 15, 2	2006-08-15
Optical metrology model optimization based on goals App 20060064280 - Vuong; Vi ; et al.	2006-03-23
Optical metrology optimization for repetitive structures App 20050209816 - Vuong, Vi ; et al.	2005-09-22
Parametric optimization of optical metrology model App 20050128489 - Bao, Junwei ; et al.	2005-06-16
Selecting a hypothetical profile to use in optical metrology App 20050057748 - Vuong, Vi ; et al.	2005-03-17
Metrology hardware adaptation with universal library Grant 6,853,942 - Drege , et al. February 8, 2	2005-02-08
Integrated circuit profile value determination Grant 6,842,261 - Bao , et al. January 11, 2	2005-01-11
Diffraction order selection for optical metrology simulation App 20040090629 - Drege, Emmanuel ; et al.	2004-05-13
Integrated circuit profile value determination App 20040039473 - Bao, Junwei ; et al.	2004-02-26
Model and parameter selection for optical metrology App 20040017574 - Vuong, Vi ; et al.	2004-01-29
Optimized model and parameter selection for optical metrology App 20040017575 - Balasubramanian, Raghu ; et al.	2004-01-29
Selection of wavelengths for integrated circuit optical metrology App 20030225535 - Doddi, Srinivas ; et al.	2003-12-04
Metrology hardware adaptation with universal library App 20030187604 - Drege, Emmanuel ; et al.	2003-10-02
Profile refinement for integrated circuit metrology Grant 6,609,086 - Bao , et al. August 19, 2	2003-08-19

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