VUKOVIC; Mirko

Patent Applications and Registrations

Patent applications and USPTO patent grants for VUKOVIC; Mirko.The latest application filed is for "system and method for liquid dispense and coverage control".

Company Profile

3.24.25

VUKOVIC; Mirko - Albany NY
Vukovic; Mirko - Slingerlands NY
Vukovic; Mirko - Gilbert AZ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System and Method for Liquid Dispense and Coverage Control App 20210339276 - VUKOVIC; Mirko ; et al.	2021-11-04
Atmospheric plasma processing systems and methods for manufacture of microelectronic workpieces Grant 11,049,700 - deVilliers , et al. June 29, 2	2021-06-29
Apparatus and Methods for Beam Processing of Substrates App 20210109450 - Vukovic; Mirko	2021-04-15
Electromagnetic wave treatment of a substrate at microwave frequencies using a wave resonator Grant 10,522,384 - Vukovic Dec	2019-12-31
Processing system for electromagnetic wave treatment of a substrate at microwave frequencies Grant 10,426,001 - Nasman , et al. Sept	2019-09-24
Heated stage with variable thermal emissivity method and apparatus Grant 10,256,121 - Vukovic , et al.	2019-04-09
Computed tomography using intersecting views of plasma using optical emission spectroscopy during plasma processing Grant 10,215,704 - Han , et al. Feb	2019-02-26
Computed Tomography using Intersecting Views of Plasma using Optical Emission Spectroscopy during Plasma Processing App 20180252650 - Morvay; Daniel ; et al.	2018-09-06
Atmospheric Plasma Processing Systems And Methods For Manufacture Of Microelectronic Workpieces App 20180096827 - deVilliers; Anton J. ; et al.	2018-04-05
Electromagnetic Wave Treatment Of A Substrate At Microwave Frequencies Using A Wave Resonator App 20170084462 - Vukovic; Mirko	2017-03-23
Heated Stage With Variable Thermal Emissivity Method And Apparatus App 20170011975 - VUKOVIC; Mirko ; et al.	2017-01-12
Processing System For Electromagnetic Wave Treatment Of A Substrate At Microwave Frequencies App 20140273532 - Nasman; Ronald ; et al.	2014-09-18
Method and apparatus for reducing substrate temperature variability Grant 8,568,555 - Suzuki , et al. October 29, 2	2013-10-29
Method and system for measuring a flow rate in a solid precursor delivery system Grant 8,435,351 - Vukovic May 7, 2	2013-05-07
Gas distribution system and method for distributing process gas in a processing system Grant 8,252,114 - Vukovic August 28, 2	2012-08-28
Method and system for improving deposition uniformity in a vapor deposition system Grant 8,048,226 - Vukovic , et al. November 1, 2	2011-11-01
Thermal stress-failure-resistant dielectric windows in vacuum processing systems Grant 7,959,775 - Vukovic , et al. June 14, 2	2011-06-14
Internal antennae for plasma processing with metal plasma Grant 7,691,243 - Vukovic April 6, 2	2010-04-06
Apparatus And Method For Rf Grounding Of Ipvd Table App 20090242383 - Vukovic; Mirko ; et al.	2009-10-01
Gas Distribution System And Method For Distributing Process Gas In A Processing System App 20090246374 - Vukovic; Mirko	2009-10-01
Internal coil with segmented shield and inductively-coupled plasma source and processing system therewith Grant 7,591,232 - Vukovic September 22, 2	2009-09-22
Self-calibrating optical emission spectroscopy for plasma monitoring Grant 7,537,671 - Vukovic May 26, 2	2009-05-26
Method And System For Improving Deposition Uniformity In A Vapor Deposition System App 20080236497 - Vukovic; Mirko ; et al.	2008-10-02
Method and apparatus for reducing substrate temperature variability App 20080241379 - Suzuki; Kenji ; et al.	2008-10-02
Lazy Susan Tool Layout for Light-Activated ALD App 20080226842 - Vukovic; Mirko	2008-09-18
Thermal-Stress-Failure-Resistant Dielectric Windows in Vacuum Processing Systems App 20080083615 - Vukovic; Mirko ; et al.	2008-04-10
Self-Calibrating Optical Emission Spectroscopy for Plasma Monitoring App 20080078504 - Vukovic; Mirko	2008-04-03
Magnetically enhanced capacitive plasma source for ionized physical vapor deposition Grant 7,315,128 - Vukovic , et al. January 1, 2	2008-01-01
Method and apparatus for detecting a plasma Grant 7,314,537 - Baldwin , et al. January 1, 2	2008-01-01
Internal Coil With Segmented Shield And Inductively-coupled Plasma Source And Processing System Therewith App 20070235327 - Vukovic; Mirko	2007-10-11
Process apparatus and method for improving plasma production of an inductively coupled plasma Grant 7,255,774 - Vukovic , et al. August 14, 2	2007-08-14
ICP source for iPVD for uniform plasma in combination high pressure deposition and low pressure etch process App 20070074968 - Vukovic; Mirko	2007-04-05
Magnetically Enhanced Capacitive Plasma Source For Ionized Physical Vapor Deposition App 20060197457 - Vukovic; Mirko ; et al.	2006-09-07
Magnetically enhanced capacitive plasma source for ionized physical vapor deposition Grant 7,084,573 - Vukovic , et al. August 1, 2	2006-08-01
Method and system for measuring a flow rate in a solid precursor delivery system App 20060115589 - Vukovic; Mirko	2006-06-01
Internal antennae for plasma processing with metal plasma App 20050279628 - Vukovic, Mirko	2005-12-22
Magnetically enhanced capacitive plasma source for ionized physical vapor deposition App 20050194910 - Vukovic, Mirko ; et al.	2005-09-08
Method and apparatus for detecting a plasma App 20050067102 - Baldwin, Craig T. ; et al.	2005-03-31
Plasma generation by mode-conversion of RF-electromagnetic wave to electron cyclotron wave Grant 6,771,026 - Vukovic August 3, 2	2004-08-03
Method and apparatus for ionized physical vapor deposition Grant 6,719,886 - Drewery , et al. April 13, 2	2004-04-13
Process apparatus and method for improving plasma production of an inductively coupled plasma App 20040060517 - Vukovic, Mirko ; et al.	2004-04-01
Plasma generation by mode-conversion of RF-electromagnetic wave to electron cyclotron wave App 20030232151 - Vukovic, Mirko	2003-12-18
Inductively-coupled plasma processing system Grant 6,652,711 - Brcka , et al. November 25, 2	2003-11-25
Inductively-coupled plasma processing system App 20020185229 - Brcka, Jozef ; et al.	2002-12-12
Method and apparatus for ionized physical vapor deposition App 20020104751 - Drewery, John Stephen ; et al.	2002-08-08
Immersed inductively--coupled plasma source Grant 6,417,626 - Brcka , et al. July 9, 2	2002-07-09
Method and apparatus for ionized physical vapor deposition Grant 6,287,435 - Drewery , et al. September 11, 2	2001-09-11

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