Patent | Date |
---|
Method and device for energy harvesting Grant 8,922,098 - Karkkainen , et al. December 30, 2 | 2014-12-30 |
Method and device for energy harvesting Grant 08922098 - | 2014-12-30 |
Method for the precise measuring operation of a micromechanical rotation rate sensor Grant 8,794,047 - Gunthner , et al. August 5, 2 | 2014-08-05 |
Energy Harvesting/tire Pressure, Temperature And Tire Data Transmitter App 20120326565A1 - | 2012-12-27 |
Pointing Method, A Device And System For The Same App 20120235905 - MERIHEINU; Ulf ;   et al. | 2012-09-20 |
Spring Structure, Resonator, Resonator Array And Sensor App 20120222483 - BLOMQVIST; Anssi ;   et al. | 2012-09-06 |
Method and device for measuring the progress of a moving person Grant 8,229,700 - Meriheina July 24, 2 | 2012-07-24 |
Method For The Precise Measuring Operation Of A Micromechanical Rotation Rate Sensor App 20120118062 - Gunthner; Stefan ;   et al. | 2012-05-17 |
Method For Manufacturing A Microelectromechanical Component; And A Microelectromechanical Component App 20120119312 - KUISMA; Heikki | 2012-05-17 |
Vibrating micro-mechanical sensor of angular velocity Grant 8,176,779 - Blomqvist May 15, 2 | 2012-05-15 |
Micromechanical Resonator App 20120091854 - KAAJAKARI; Ville | 2012-04-19 |
Vibrating Micromechanical Sensor Of Angular Velocity App 20120085167 - KLEMETTI; Petri ;   et al. | 2012-04-12 |
Vibrating Micromechanical Sensor Of Angular Velocity App 20120085168 - KLEMETTI; Petri ;   et al. | 2012-04-12 |
Method for manufacturing a microelectromechanical component, and a microelectromechanical component Grant 8,124,435 - Kuisma February 28, 2 | 2012-02-28 |
Vibrating micromechanical sensor of angular velocity Grant 8,104,343 - Klemetti , et al. January 31, 2 | 2012-01-31 |
Micromechanical resonator Grant 8,102,224 - Kaajakari January 24, 2 | 2012-01-24 |
Micromechanical Resonator App 20110210800 - KAAJAKARI; VILLE | 2011-09-01 |
Method And Device For Measuring The Progress Of A Moving Person App 20110184693 - MERIHEINA; Ulf | 2011-07-28 |
Method for manufacturing a microelectromechanical component, and a microelectromechanical component Grant 7,982,291 - Kuisma July 19, 2 | 2011-07-19 |
Method and device for measuring the progress of a moving person Grant 7,962,309 - Meriheina June 14, 2 | 2011-06-14 |
Microelectromechanical component Grant 7,932,568 - Kuisma , et al. April 26, 2 | 2011-04-26 |
Vibrating Micro-mechanical Sensor Of Angular Velocity App 20100218605 - Blomqvist; Anssi ;   et al. | 2010-09-02 |
Micro-mechanical Sensor Of Angular Velocity App 20100222998 - BLOMQVIST; Anssi | 2010-09-02 |
Capacitive acceleration sensor Grant 7,716,983 - Lehtonen May 18, 2 | 2010-05-18 |
Method for manufacturing a micromechanical motion sensor, and a micromechanical motion sensor Grant 7,682,861 - Blomqvist March 23, 2 | 2010-03-23 |
Vibrating micro-mechanical sensor of angular velocity App 20090260437 - Blomqvist; Anssi | 2009-10-22 |
Micromechanical resonator App 20090189481 - Kaajakari; Ville | 2009-07-30 |
Capacitive sensor and a method for manufacturing the capacitive sensor Grant 7,555,950 - Ruohio , et al. July 7, 2 | 2009-07-07 |
Vibrating micromechanical sensor of angular velocity App 20090165553 - Klemetti; Petri ;   et al. | 2009-07-02 |
Method for manufacturing a microelectromechanical component, and a microelectromechanical component App 20090137079 - Kuisma; Heikki | 2009-05-28 |
Method for the mircomechanical measurement of acceleration and a micromechanical acceleration sensor Grant 7,516,038 - Lehtonen , et al. April 7, 2 | 2009-04-07 |
Method and device for measuring the progress of a moving person App 20090018794 - Meriheina; Ulf | 2009-01-15 |
Method for measuring angular velocity and a vibrating micromechanical sensor of angular velocity App 20080314144 - Blomqvist; Anssi | 2008-12-25 |
Oscillating micro-mechanical sensor of angular velocity Grant 7,454,971 - Blomqvist November 25, 2 | 2008-11-25 |
Method and device for measuring the progress of a moving person App 20080255800 - Meriheina; Ulf ;   et al. | 2008-10-16 |
Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor Grant 7,426,863 - Kuisma September 23, 2 | 2008-09-23 |
Capacitive acceleration sensor Grant 7,398,683 - Lehtonen July 15, 2 | 2008-07-15 |
Capacitive acceleration sensor arrangement Grant 7,340,955 - Manninen March 11, 2 | 2008-03-11 |
Oscillating micro-mechanical sensor of angular velocity Grant 7,325,451 - Blomqvist February 5, 2 | 2008-02-05 |
Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction Grant 7,302,857 - Kuisma , et al. December 4, 2 | 2007-12-04 |
Method for the manufacturing of a capacitive pressure sensor, and a capacitive pressure sensor Grant 7,252,007 - Ruohio , et al. August 7, 2 | 2007-08-07 |
Method for manufacturing a microelectromechanical component, and a microelectromechanical component App 20070114623 - Kuisma; Heikki | 2007-05-24 |
Method for the micromechanical measurement of acceleration and a micromechanical acceleration sensor App 20070062286 - Lehtonen; Tuomo ;   et al. | 2007-03-22 |
Method for manufacturing a micromechanical motion sensor, and a micromechanical motion sensor App 20070012108 - Blomqvist; Anssi | 2007-01-18 |
Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor App 20070000323 - Kuisma; Heikki | 2007-01-04 |
Capacitive sensor and a method for manufacturing the capacitive sensor App 20060213269 - Ruohio; Jaakko ;   et al. | 2006-09-28 |
Oscillating micro-mechanical sensor of angular velocity App 20060156814 - Blomqvist; Anssi | 2006-07-20 |
Oscillating micro-mechanical sensor of angular velocity App 20060156813 - Blomqvist; Anssi | 2006-07-20 |
Method for manufacturing a silicon sensor and a silicon sensor Grant 6,998,059 - Kuisma , et al. February 14, 2 | 2006-02-14 |
Capacitive acceleration sensor Grant 6,938,485 - Kuisma , et al. September 6, 2 | 2005-09-06 |
Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction App 20050105245 - Kuisma, Heikki ;   et al. | 2005-05-19 |