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Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,161,267 - Hol , et al. January 9, 2 | 2007-01-09 |
Lithographic apparatus, Lorentz actuator, and device manufacturing method Grant 7,145,269 - Hol , et al. December 5, 2 | 2006-12-05 |
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Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method Grant 7,088,428 - Hol , et al. August 8, 2 | 2006-08-08 |
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Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby App 20050061626 - Hol, Sven Antoin Johan ;   et al. | 2005-03-24 |
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Lithographic linear motor, lithographic apparatus, and device manufacturing method App 20040246458 - Hol, Sven Antoin Johan ;   et al. | 2004-12-09 |
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method App 20040218167 - Johan Hol, Sven Antoin ;   et al. | 2004-11-04 |
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