Patent | Date |
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Apparatus for stressing semiconductor substrates Grant 11,282,715 - Falster , et al. March 22, 2 | 2022-03-22 |
Apparatus for stressing semiconductor substrates Grant 11,276,583 - Falster , et al. March 15, 2 | 2022-03-15 |
Apparatus for stressing semiconductor substrates Grant 11,276,582 - Falster , et al. March 15, 2 | 2022-03-15 |
Apparatus For Stressing Semiconductor Substrates App 20190333778 - Falster; Robert J. ;   et al. | 2019-10-31 |
Apparatus For Stressing Semiconductor Substrates App 20190311913 - Falster; Robert J. ;   et al. | 2019-10-10 |
Apparatus For Stressing Semiconductor Substrates App 20190311912 - Falster; Robert J. ;   et al. | 2019-10-10 |
Apparatus For Stressing Semiconductor Substrates App 20190295853 - Falster; Robert J. ;   et al. | 2019-09-26 |
Apparatus for stressing semiconductor substrates Grant 10,361,097 - Falster , et al. | 2019-07-23 |
Oxygen precipitation in heavily doped silicon wafers sliced from ingots grown by the Czochralski method Grant 9,634,098 - Falster , et al. April 25, 2 | 2017-04-25 |
Processes and apparatus for preparing heterostructures with reduced strain by radial distension Grant 9,583,363 - Falster , et al. February 28, 2 | 2017-02-28 |
Processes and apparatus for preparing heterostructures with reduced strain by radial compression Grant 9,583,364 - Falster , et al. February 28, 2 | 2017-02-28 |
Production of high precipitate density wafers by activation of inactive oxygen precipitate nuclei Grant 9,129,919 - Falster , et al. September 8, 2 | 2015-09-08 |
Processes for suppressing minority carrier lifetime degradation in silicon wafers Grant 8,969,119 - Falster , et al. March 3, 2 | 2015-03-03 |
Oxygen Precipitation In Heavily Doped Silicon Wafers Sliced From Ingots Grown By The Czochralski Method App 20140361408 - Falster; Robert J. ;   et al. | 2014-12-11 |
Apparatus for Stressing Semiconductor Substrates App 20140182788 - Falster; Robert J. ;   et al. | 2014-07-03 |
Processes and Apparatus for Preparing Heterostructures with Reduced Strain by Radial Distension App 20140187022 - Falster; Robert J. ;   et al. | 2014-07-03 |
Processes and Apparatus for Preparing Heterostructures with Reduced Strain by Radial Compression App 20140187023 - Falster; Robert J. ;   et al. | 2014-07-03 |
Production Of High Precipitate Density Wafers By Activation Of Inactive Oxygen Precipitate Nuclei App 20140141537 - Falster; Robert J. ;   et al. | 2014-05-22 |
Processes For Suppressing Minority Carrier Lifetime Degradation In Silicon Wafers App 20130102129 - Falster; Robert J. ;   et al. | 2013-04-25 |
Epitaxial Wafer Having A Heavily Doped Substrate And Process For The Preparation Thereof App 20110250739 - Falster; Robert J. ;   et al. | 2011-10-13 |
Epitaxial Wafer Having A Heavily Doped Substrate And Process For The Preparation Thereof App 20090252974 - Falster; Robert J. ;   et al. | 2009-10-08 |
Arsenic And Phosphorus Doped Silicon Wafer Substrates Having Intrinsic Gettering App 20090130824 - Falster; Robert J. ;   et al. | 2009-05-21 |
High resistivity silicon structure and a process for the preparation thereof Grant 7,521,382 - Falster , et al. April 21, 2 | 2009-04-21 |
Single Crystal Silicon Having Improved Gate Oxide Integrity App 20090022930 - Falster; Robert J. ;   et al. | 2009-01-22 |
Diffusion Control in Heavily Doped Substrates App 20090004458 - Falster; Robert J. ;   et al. | 2009-01-01 |
Process for preparing single crystal silicon having improved gate oxide integrity Grant 7,431,765 - Falster , et al. October 7, 2 | 2008-10-07 |
High resistivity silicon structure and a process for the preparation thereof App 20060263967 - Falster; Robert J. ;   et al. | 2006-11-23 |
Method for the production of low defect density silicon Grant 7,105,050 - Voronkov , et al. September 12, 2 | 2006-09-12 |
Single crystal silicon having improved gate oxide integrity Grant 6,986,925 - Falster , et al. January 17, 2 | 2006-01-17 |
Process for preparing a stabilized ideal oxygen precipitating silicon wafer Grant 6,955,718 - Falster , et al. October 18, 2 | 2005-10-18 |
Process for preparing single crystal silicon having improved gate oxide integrity App 20050160967 - Falster, Robert J. ;   et al. | 2005-07-28 |
Process for preparing a stabilized ideal oxygen precipitating silicon wafer App 20050005841 - Falster, Robert J. ;   et al. | 2005-01-13 |
Process for suppressing the nucleation and/or growth of interstitial type defects by controlling the cooling rate through nucleation App 20030196587 - McCallum, Kirk D. ;   et al. | 2003-10-23 |
Process for preparing single crystal silicon having improved gate oxide integrity App 20020121238 - Falster, Robert J. ;   et al. | 2002-09-05 |
Method for the production of low defect density silicon App 20020056410 - Voronkov, Vladimir V. ;   et al. | 2002-05-16 |
Method for controlling growth of a silicon crystal to minimize growth rate and diameter deviations App 20020043206 - Mutti, Paolo ;   et al. | 2002-04-18 |