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Radiation Source App 20180031979 - BLEEKER; Arno Jan ;   et al. | 2018-02-01 |
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Ex-situ Removal Of Deposition On An Optical Element App 20120140196 - Banine; Vadim Yevgenyevich ;   et al. | 2012-06-07 |
Ex-situ removal of deposition on an optical element Grant 8,134,136 - Banine , et al. March 13, 2 | 2012-03-13 |
Method of preparing components, prepared component, lithographic apparatus and device manufacturing method Grant 8,077,287 - Dams , et al. December 13, 2 | 2011-12-13 |
Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method Grant 7,875,863 - Van Herpen , et al. January 25, 2 | 2011-01-25 |
Ex-situ Removal Of Deposition On An Optical Element App 20100290015 - BANINE; Vadim Yevgenyevich ;   et al. | 2010-11-18 |
Ex-situ removal of deposition on an optical element Grant 7,767,989 - Banine , et al. August 3, 2 | 2010-08-03 |
Lithographic apparatus, device manufacturing method and radiation collector Grant 7,470,916 - Box , et al. December 30, 2 | 2008-12-30 |
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Lithographic apparatus, device manufacturing method and radiation collector App 20070084461 - Box; Wilhelmus Josephus ;   et al. | 2007-04-19 |
Ex-situ removal of deposition on an optical element App 20070069162 - Banine; Vadim Yevgenyevich ;   et al. | 2007-03-29 |
Lithographic apparatus, device manufacturing method and variable attenuator Grant 7,145,640 - Voorma , et al. December 5, 2 | 2006-12-05 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,098,994 - Moors , et al. August 29, 2 | 2006-08-29 |
Lithographic apparatus and device manufacturing method Grant 7,023,524 - Van Dijsseldonk , et al. April 4, 2 | 2006-04-04 |
Lithographic apparatus, device manufacturing method and variable attenuator App 20050206869 - Voorma, Harm-Jan ;   et al. | 2005-09-22 |
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Method for exposing a substrate, patterning device, and lithographic apparatus App 20050134820 - Mulder, Heine Melle ;   et al. | 2005-06-23 |
Lithographic apparatus and device manufacturing method App 20050134818 - Van Dijsseldonk, Antonius Johannes Josephus ;   et al. | 2005-06-23 |
Method of preparing components, prepared component, lithographic apparatus and device manufacturing method App 20050008978 - Dams, Johannes Adrianus Antonius Theodorus ;   et al. | 2005-01-13 |