Von Buenau; Rudolf
Patent Applications and Registrations
Patent applications and USPTO patent grants for Von Buenau; Rudolf.The latest application filed is for "catadioptric projection objective".
- Von Buenau; Rudolf - Jena DE
- Von Buenau; Rudolf - Essingen DE
| Patent | Date |
|---|---|
| Catadioptric projection objective Grant 8,339,701 - Shafer , et al. December 25, 2 | 2012-12-25 |
| Method and device for increasing an optical system focal depth Grant 8,307,832 - Schroeder , et al. November 13, 2 | 2012-11-13 |
| Catadioptric Projection Objective App 20120274919 - Shafer; David ; et al. | 2012-11-01 |
| Catadioptric Projection Objective App 20120274918 - Shafer; David ; et al. | 2012-11-01 |
| Catadioptric Projection Objective App 20120250147 - Shafer; David ; et al. | 2012-10-04 |
| Catadioptric projection objective Grant 8,208,199 - Shafer , et al. June 26, 2 | 2012-06-26 |
| Method And Device For Increasing An Optical System Focal Depth App 20110228217 - Schroeder; Eckhard ; et al. | 2011-09-22 |
| Catadioptric Projection Objective App 20110211252 - Shafer; David ; et al. | 2011-09-01 |
| Method and device for increasing an optical system focal depth Grant 7,950,398 - Schroeder , et al. May 31, 2 | 2011-05-31 |
| Catadioptric projection objective Grant 7,869,122 - Shafer , et al. January 11, 2 | 2011-01-11 |
| Device and Method for Axial Length Measurement Having Expanded Measuring Function in the Anterior Eye Segment App 20100271594 - Bergner; Roland ; et al. | 2010-10-28 |
| Projection method including pupillary filtering and a projection lens therefor Grant 7,791,711 - Holderer , et al. September 7, 2 | 2010-09-07 |
| Catadioptric projection objective Grant 7,679,821 - Shafer , et al. March 16, 2 | 2010-03-16 |
| Catadioptric projection objective Grant 7,672,047 - Shafer , et al. March 2, 2 | 2010-03-02 |
| Catadioptric Projection Objective App 20090190208 - Shafer; David ; et al. | 2009-07-30 |
| Catadioptric Projection Objective App 20080310014 - Shafer; David ; et al. | 2008-12-18 |
| Projection exposure apparatus Grant 7,463,422 - Kamenow , et al. December 9, 2 | 2008-12-09 |
| Catadioptric Projection Objective App 20080297889 - Shafer; David ; et al. | 2008-12-04 |
| Catadioptric Projection Objective App 20080285121 - Shafer; David ; et al. | 2008-11-20 |
| Catadioptric Projection Objective App 20080212170 - Shafer; David ; et al. | 2008-09-04 |
| Method and Device for Increasing an Optical System Focal Depth App 20080195086 - Schroeder; Eckhard ; et al. | 2008-08-14 |
| Catadioptric Projection Objective App 20080151365 - Shafer; David ; et al. | 2008-06-26 |
| Catadioptric Projection Objective App 20080151364 - Shafer; David ; et al. | 2008-06-26 |
| Projection Method Including Pupillary Filtering And A Projection Lens Therefor App 20080143984 - HOLDERER; Hubert ; et al. | 2008-06-19 |
| Catadioptric projection objective Grant 7,385,756 - Shafer , et al. June 10, 2 | 2008-06-10 |
| Projection method including pupillary filtering and a projection lens therefor Grant 7,336,342 - Holderer , et al. February 26, 2 | 2008-02-26 |
| Microlithographic illumination method and a projection lens for carrying out the method Grant 7,031,069 - Gruner , et al. April 18, 2 | 2006-04-18 |
| Catadioptric projection objective App 20050190435 - Shafer, David ; et al. | 2005-09-01 |
| Microlithographic illumination method and a projection lens for carrying out the method App 20050002111 - Gruner, Toralf ; et al. | 2005-01-06 |
| Microlithographic illumination method and a projection lens for carrying out the method Grant 6,728,043 - Gruner , et al. April 27, 2 | 2004-04-27 |
| Microlithographic illumination method and a projection lens for carrying out the method App 20020191288 - Gruner, Toralf ; et al. | 2002-12-19 |
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