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Patent applications and USPTO patent grants for Volosskiy; Boris.The latest application filed is for "apparatus for photoresist dry deposition".
Patent | Date |
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Bake Strategies To Enhance Lithographic Performance Of Metal-containing Resist App 20220308454 - Weidman; Timothy William ;   et al. | 2022-09-29 |
Apparatus For Photoresist Dry Deposition App 20220308462 - Berney; Butch ;   et al. | 2022-09-29 |
Tin Oxide Films In Semiconductor Device Manufacturing App 20220270877 - Yu; Jengyi ;   et al. | 2022-08-25 |
Photoresist Development With Halide Chemistries App 20220244645 - Tan; Samantha SiamHwa ;   et al. | 2022-08-04 |
Atomic Layer Etch And Selective Deposition Process For Extreme Ultraviolet Lithography Resist Improvement App 20220216050 - Yu; Jengyi ;   et al. | 2022-07-07 |
Tin oxide mandrels in patterning Grant 11,355,353 - Yu , et al. June 7, 2 | 2022-06-07 |
Tin Oxide Films In Semiconductor Device Manufacturing App 20220165571 - Yu; Jengyi ;   et al. | 2022-05-26 |
Tin oxide films in semiconductor device manufacturing Grant 11,322,351 - Yu , et al. May 3, 2 | 2022-05-03 |
Dry Development Of Resists App 20220020584 - Volosskiy; Boris ;   et al. | 2022-01-20 |
Tin Oxide Films In Semiconductor Device Manufacturing App 20210265163 - Yu; Jengyi ;   et al. | 2021-08-26 |
Tin Oxide Mandrels In Patterning App 20210265173 - Yu; Jengyi ;   et al. | 2021-08-26 |
Tin Oxide Films In Semiconductor Device Manufacturing App 20200083044 - Yu; Jengyi ;   et al. | 2020-03-12 |
Tin oxide films in semiconductor device manufacturing Grant 10,546,748 - Yu , et al. Ja | 2020-01-28 |
Tin Oxide Mandrels In Patterning App 20190237341 - Yu; Jengyi ;   et al. | 2019-08-01 |
Methods for wet metal seed deposition for bottom up gapfill of features Grant 10,103,056 - Tan , et al. October 16, 2 | 2018-10-16 |
Methods For Wet Metal Seed Deposition For Bottom Up Gapfill Of Features App 20180261502 - Tan; Samantha ;   et al. | 2018-09-13 |
Tin Oxide Films In Semiconductor Device Manufacturing App 20180240667 - Yu; Jengyi ;   et al. | 2018-08-23 |
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