Vollrath; Wolfgang

Patent Applications and Registrations

Patent applications and USPTO patent grants for Vollrath; Wolfgang.The latest application filed is for "in-line wafer edge inspection, wafer pre-alignment, and wafer cleaning".

Company Profile

0.7.11

Vollrath; Wolfgang - Burbach DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning Grant 9,645,097 - Nicolaides , et al. May 9, 2	2017-05-09
In-line Wafer Edge Inspection, Wafer Pre-alignment, And Wafer Cleaning App 20150370175 - Nicolaides; Lena ; et al.	2015-12-24
Apparatus for the optical inspection of wafers Grant 8,451,440 - Hahn , et al. May 28, 2	2013-05-28
Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers Grant 8,089,622 - Birkner , et al. January 3, 2	2012-01-03
Apparatus for the Optical Inspection of Wafers App 20100295938 - Hahn; Kurt ; et al.	2010-11-25
Device And Method For The Inspection Of Defects On The Edge Region Of A Wafer App 20090279080 - Danner; Lambert ; et al.	2009-11-12
Dark Field Objective for a Microscope App 20090225414 - Heiden; Michael ; et al.	2009-09-10
Device and method for scanning the whole surface of a wafer App 20090034832 - Vollrath; Wolfgang ; et al.	2009-02-05
Device And Method For Evaluating Defects In The Edge Area Of A Wafer And Use Of The Device In Inspection System For Wafers App 20080232672 - Birkner; Andreas ; et al.	2008-09-25
Apparatus for wafer inspection App 20080144025 - Vollrath; Wolfgang ; et al.	2008-06-19
Apparatus for wafer inspection App 20080144014 - Vollrath; Wolfgang ; et al.	2008-06-19
Apparatus for measuring feature widths on masks for the semiconductor industry Grant 7,375,792 - Vollrath , et al. May 20, 2	2008-05-20
Method for Selecting a Wavelength, and a Microscope App 20080062510 - Spill; Burkhard ; et al.	2008-03-13
Apparatus and method for inspecting a semiconductor component Grant 7,268,867 - Vollrath , et al. September 11, 2	2007-09-11
Apparatus and method for inspecting a semiconductor component App 20050219521 - Vollrath, Wolfgang ; et al.	2005-10-06
Apparatus For Measuring Feature Widths On Masks For The Semiconductor Industry App 20050084770 - Vollrath, Wolfgang ; et al.	2005-04-21
Illumination device for a DUV microscope and DUV microscope Grant 6,624,930 - Danner , et al. September 23, 2	2003-09-23

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.