| Patent | Date |
|---|
Systems and Methods for Measurement of Misregistration and Amelioration Thereof
App 20220307824 - Volkovich; Roie ; et al. | 2022-09-29 |
Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof
Grant 11,454,894 - Yagil , et al. September 27, 2 | 2022-09-27 |
Measurement Of Properties Of Patterned Photoresist
App 20220236181 - Volkovich; Roie ; et al. | 2022-07-28 |
Method For Measuring And Correcting Misregistration Between Layers In A Semiconductor Device, And Misregistration Targets Useful Therein
App 20220199437 - Volkovich; Roie ; et al. | 2022-06-23 |
System and method for tilt calculation based on overlay metrology measurements
Grant 11,360,398 - Volkovich , et al. June 14, 2 | 2022-06-14 |
Data-driven misregistration parameter configuration and measurement system and method
Grant 11,353,493 - Katz , et al. June 7, 2 | 2022-06-07 |
System and method for error reduction for metrology measurements
Grant 11,353,799 - Volkovich , et al. June 7, 2 | 2022-06-07 |
Device-like overlay metrology targets displaying Moire effects
Grant 11,355,375 - Volkovich , et al. June 7, 2 | 2022-06-07 |
Metrology system and method for measuring diagonal diffraction-based overlay targets
Grant 11,353,321 - Volkovich , et al. June 7, 2 | 2022-06-07 |
System and Method for Error Reduction for Metrology Measurements
App 20220155693 - Volkovich; Roie ; et al. | 2022-05-19 |
Method for measuring and correcting misregistration between layers in a semiconductor device, and misregistration targets useful therein
Grant 11,302,544 - Volkovich , et al. April 12, 2 | 2022-04-12 |
Systems And Methods For Scatterometric Single-wavelength Measurement Of Misregistration And Amelioration Thereof
App 20220082950 - Yagil; Alon ; et al. | 2022-03-17 |
Inter-step Feedforward Process Control In The Manufacture Of Semiconductor Devices
App 20220026798 - VOLKOVICH; ROIE ; et al. | 2022-01-27 |
Device-like Overlay Metrology Targets Displaying Moire Effects
App 20220020625 - Volkovich; Roie ; et al. | 2022-01-20 |
Method of measuring misregistration of semiconductor devices
Grant 11,226,566 - Volkovich , et al. January 18, 2 | 2022-01-18 |
Misregistration Target Having Device-Scaled Features Useful in Measuring Misregistration of Semiconductor Devices
App 20220013468 - Volkovich; Roie ; et al. | 2022-01-13 |
Systems And Methods For Feedforward Process Control In The Manufacture Of Semiconductor Devices
App 20220004096 - VOLKOVICH; Roie ; et al. | 2022-01-06 |
Metrology System and Method for Measuring Diagonal Diffraction-Based Overlay Targets
App 20210389125 - Volkovich; Roie ; et al. | 2021-12-16 |
Selection Of Regions Of Interest For Measurement Of Misregistration And Amelioration Thereof
App 20210364932 - Volkovich; Roie ; et al. | 2021-11-25 |
Multiple-tool Parameter Set Calibration And Misregistration Measurement System And Method
App 20210366790 - Volkovich; Roie ; et al. | 2021-11-25 |
Misregistration measurements using combined optical and electron beam technology
Grant 11,075,126 - Volkovich , et al. July 27, 2 | 2021-07-27 |
System and Method for Analyzing a Sample with a Dynamic Recipe Based on Iterative Experimentation and Feedback
App 20210223274 - Milo; Renan ; et al. | 2021-07-22 |
Polarization measurements of metrology targets and corresponding target designs
Grant 11,060,845 - Amit , et al. July 13, 2 | 2021-07-13 |
Field-to-field Corrections Using Overlay Targets
App 20210200105 - Leshinsky-Altshuller; Enna ; et al. | 2021-07-01 |
Multiple-tool parameter set configuration and misregistration measurement system and method
Grant 11,018,064 - Volkovich , et al. May 25, 2 | 2021-05-25 |
Method Of Measuring Misregistration Of Semiconductor Devices
App 20210149314 - VOLKOVICH; Roie ; et al. | 2021-05-20 |
System And Method For Tilt Calculation Based On Overlay Metrology Measurements
App 20210149313 - Volkovich; Roie ; et al. | 2021-05-20 |
Field-to-field corrections using overlay targets
Grant 10,990,022 - Leshinsky-Altshuller , et al. April 27, 2 | 2021-04-27 |
Process and metrology control, process indicators and root cause analysis tools based on landscape information
Grant 10,962,951 - Volkovich , et al. March 30, 2 | 2021-03-30 |
Method of measuring misregistration of semiconductor devices
Grant 10,928,739 - Volkovich , et al. February 23, 2 | 2021-02-23 |
Multiple-tool Parameter Set Configuration And Misregistration Measurement System And Method
App 20210028070 - VOLKOVICH; Roie ; et al. | 2021-01-28 |
Data-driven Misregistration Parameter Configuration And Measurement System And Method
App 20210011073 - Katz; Shlomit ; et al. | 2021-01-14 |
Method For Measuring And Correcting Misregistration Between Layers In A Semiconductor Device, And Misregistration Targets Useful Therein
App 20200312687 - Volkovich; Roie ; et al. | 2020-10-01 |
Dynamic Amelioration Of Misregistration Measurement
App 20200286794 - Volkovich; Roie ; et al. | 2020-09-10 |
Recipe optimization based zonal analysis
Grant 10,763,146 - Volkovich , et al. Sep | 2020-09-01 |
Method Of Measuring Misregistration Of Semiconductor Devices
App 20200271596 - VOLKOVICH; Roie ; et al. | 2020-08-27 |
Method and system for process control with flexible sampling
Grant 10,754,260 - Demirer , et al. A | 2020-08-25 |
Misregistration Measurements Using Combined Optical and Electron Beam Technology
App 20200266112 - Volkovich; Roie ; et al. | 2020-08-20 |
Field-to-Field Corrections Using Overlay Targets
App 20200201193 - Leshinsky-Altshuller; Enna ; et al. | 2020-06-25 |
Polarization Measurements Of Metrology Targets And Corresponding Target Designs
App 20200158492 - Amit; Eran ; et al. | 2020-05-21 |
Reducing Device Overlay Errors
App 20200033737 - Yerushalmi; Liran ; et al. | 2020-01-30 |
Process And Metrology Control, Process Indicators And Root Cause Analysis Tools Based On Landscape Information
App 20190391557 - Volkovich; Roie ; et al. | 2019-12-26 |
Polarization measurements of metrology targets and corresponding target designs
Grant 10,458,777 - Amit , et al. Oc | 2019-10-29 |
Identifying registration errors of DSA lines
Grant 10,401,841 - Volkovich , et al. Sep | 2019-09-03 |
Method and system for selection of metrology targets for use in focus and dose applications
Grant 10,340,196 - Volkovich , et al. | 2019-07-02 |
Lithography systems with integrated metrology tools having enhanced functionalities
Grant 10,331,050 - Amit , et al. | 2019-06-25 |
Method and apparatus for direct self assembly in target design and production
Grant 10,303,835 - Amit , et al. | 2019-05-28 |
Recipe Optimization Based Zonal Analysis
App 20190088514 - VOLKOVICH; Roie ; et al. | 2019-03-21 |
Lithography Systems with Integrated Metrology Tools Having Enhanced Funcionalities
App 20180299791 - Amit; Eran ; et al. | 2018-10-18 |
On-product derivation and adjustment of exposure parameters in a directed self-assembly process
Grant 10,025,285 - Volkovich , et al. July 17, 2 | 2018-07-17 |
Focus measurements using scatterometry metrology
Grant 9,934,353 - El Kodadi , et al. April 3, 2 | 2018-04-03 |
Method and System for Process Control with Flexible Sampling
App 20160370718 - Demirer; Onur ; et al. | 2016-12-22 |
Polarization Measurements Of Metrology Targets And Corresponding Target Designs
App 20160178351 - AMIT; Eran ; et al. | 2016-06-23 |
Focus Measurements Using Scatterometry Metrology
App 20160103946 - El Kodadi; Mohamed ; et al. | 2016-04-14 |
Identifying Registration Errors Of Dsa Lines
App 20160018819 - VOLKOVICH; Roie ; et al. | 2016-01-21 |
On-product Derivation And Adjustment Of Exposure Parameters In A Directed Self-assembly Process
App 20150301514 - VOLKOVICH; Roie ; et al. | 2015-10-22 |
Method And Apparatus For Direct Self Assembly In Target Design And Production
App 20150242558 - AMIT; Eran ; et al. | 2015-08-27 |
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