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Patent applications and USPTO patent grants for Voges; Christopher.The latest application filed is for "wafer inspection system including a laser triangulation sensor".
Patent | Date |
---|---|
Wafer Inspection System Including A Laser Triangulation Sensor App 20200191557 - Schaefer; John ;   et al. | 2020-06-18 |
Wafer edge inspection illumination system Grant 9,062,859 - Voges , et al. June 23, 2 | 2015-06-23 |
Wafer Edge Inspection App 20140063799 - Voges; Christopher ;   et al. | 2014-03-06 |
Wafer edge inspection Grant 8,426,223 - Voges , et al. April 23, 2 | 2013-04-23 |
Wafer Edge Inspection App 20110263049 - Voges; Christopher ;   et al. | 2011-10-27 |
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