Vogel; Herman

Patent Applications and Registrations

Patent applications and USPTO patent grants for Vogel; Herman.The latest application filed is for "lithographic apparatus and device manufacturing method".

Company Profile

1.47.31

Vogel; Herman - Sandy Hook CT
Vogel; Herman - Wilton CT
Vogel; Herman - Newtown CT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic apparatus and device manufacturing method Grant 10,705,439 - Kemper , et al.	2020-07-07
Lithographic apparatus and device manufacturing method Grant 10,599,054 - Kemper , et al.	2020-03-24
Lithographic Apparatus And Device Manufacturing Method App 20190294058 - Kemper; Nicolaas Rudolf ; et al.	2019-09-26
Reticle cooling by non-uniform gas flow Grant 10,423,081 - Venturino , et al. Sept	2019-09-24
Lithographic apparatus and device manufacturing method Grant 10,331,047 - Kemper , et al.	2019-06-25
Lithographic Apparatus And Device Manufacturing Method App 20180188661 - KEMPER; Nicolaas Rudolf ; et al.	2018-07-05
Lithographic apparatus and device manufacturing method Grant 9,904,185 - Kemper , et al. February 27, 2	2018-02-27
Reticle Cooling by Non-Uniform Gas Flow App 20170363973 - VENTURINO; Thomas ; et al.	2017-12-21
Lithographic Apparatus And Device Manufacturing Method App 20170357165 - KEMPER; Nicolaas Rudolf ; et al.	2017-12-14
Immersion Photolithography System And Method Using Microchannel Nozzles App 20170293231 - Vogel; Herman ; et al.	2017-10-12
Lithographic apparatus and device manufacturing method Grant 9,746,788 - Kemper , et al. August 29, 2	2017-08-29
Immersion photolithography system and method using microchannel nozzles Grant 9,715,178 - Vogel , et al. July 25, 2	2017-07-25
Immersion photolithography system and method using microchannel nozzles Grant 9,709,899 - Vogel , et al. July 18, 2	2017-07-18
Lithographic Apparatus And Device Manufacturing Method App 20170045831 - KEMPER; Nicolaas Rudolf ; et al.	2017-02-16
Lithographic Apparatus And Device Manufacturing Method App 20170031250 - KEMPER; Nicolaas Rudolf ; et al.	2017-02-02
Lithographic apparatus and device manufacturing method Grant 9,507,278 - Kemper , et al. November 29, 2	2016-11-29
Lithographic apparatus and device manufacturing method Grant 9,488,923 - Kemper , et al. November 8, 2	2016-11-08
Lithographic Apparatus And Device Manufacturing Method App 20150323876 - KEMPER; Nicolaas Rudolf ; et al.	2015-11-12
Lithographic apparatus and device manufacturing method Grant 9,097,992 - Kemper , et al. August 4, 2	2015-08-04
Lithographic apparatus and device manufacturing method Grant 9,081,311 - Vogel , et al. July 14, 2	2015-07-14
Immersion Photolithography System And Method Using Microchannel Nozzles App 20140333910 - Vogel; Herman ; et al.	2014-11-13
Lithographic Apparatus And Device Manufacturing Method App 20140300883 - Kemper; Nicolaas Rudolf ; et al.	2014-10-09
Immersion photolithography system and method using microchannel nozzles Grant 8,817,230 - Vogel , et al. August 26, 2	2014-08-26
Immersion Photolithography System And Method Using Microchannel Nozzles App 20140233003 - VOGEL; Herman ; et al.	2014-08-21
Lithographic apparatus and device manufacturing method Grant 8,755,028 - Kemper , et al. June 17, 2	2014-06-17
Immersion photolithography system and method using microchannel nozzles Grant 8,730,450 - Vogel , et al. May 20, 2	2014-05-20
Immersion photolithography system and method using microchannel nozzles Grant 8,670,105 - Vogel , et al. March 11, 2	2014-03-11
Lithographic apparatus and device manufacturing method Grant 8,446,563 - Kemper , et al. May 21, 2	2013-05-21
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods Grant 8,441,610 - Van Der Ham , et al. May 14, 2	2013-05-14
Lithographic Apparatus And Device Manufacturing Method App 20120249983 - Vogel; Herman ; et al.	2012-10-04
Method and systems for compact, micro-channel, laminar heat exchanging Grant 8,210,248 - Vogel July 3, 2	2012-07-03
Immersion Photolithography System And Method Using Microchannel Nozzles App 20120140200 - Vogel; Herman ; et al.	2012-06-07
Lithographic Apparatus And Device Manufacturing Method App 20110310367 - KEMPER; Nicolaas Rudolf ; et al.	2011-12-22
Immersion Photolithography System And Method Using Microchannel Nozzles App 20110273676 - VOGEL; Herman ; et al.	2011-11-10
Immersion Photolithography System And Method Using Microchannel Nozzles App 20110273680 - Vogel; Herman ; et al.	2011-11-10
Lithographic Apparatus And Device Manufacturing Method App 20110273675 - Kemper; Nicolaas Rudolf ; et al.	2011-11-10
Lithographic apparatus and device manufacturing method Grant 8,031,325 - Kemper , et al. October 4, 2	2011-10-04
Immersion photolithography system and method using microchannel nozzles Grant 8,004,649 - Vogel , et al. August 23, 2	2011-08-23
Assembly Comprising a Conditioning System and at Least One Object, a Conditioning System, a Lithographic Apparatus and Methods App 20110188049 - VAN DER HAM; Ronald ; et al.	2011-08-04
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods Grant 7,924,399 - Van Der Ham , et al. April 12, 2	2011-04-12
Lithographic Apparatus And Device Manufacturing Method App 20100149514 - KEMPER; Nicolaas Rudolf ; et al.	2010-06-17
Lithographic apparatus and device manufacturing method Grant 7,701,550 - Kemper , et al. April 20, 2	2010-04-20
Lithographic Apparatus And Device Manufacturing Method App 20090303455 - Kemper; Nicolaas Rudolf ; et al.	2009-12-10
Method and system for active purging of pellicle volumes Grant 7,619,718 - Luo , et al. November 17, 2	2009-11-17
Lithographic apparatus and device manufacturing method Grant 7,602,470 - Kemper , et al. October 13, 2	2009-10-13
Increasing gas gauge pressure sensitivity using nozzle-face surface roughness Grant 7,578,168 - Vogel August 25, 2	2009-08-25
Laminar Flow Gas Curtains for Lithographic Applications App 20090073397 - Vogel; Herman ; et al.	2009-03-19
Increasing Gas Gauge Pressure Sensitivity Using Nozzle-Face Surface Roughness App 20090000353 - Vogel; Herman	2009-01-01
Immersion photolithography system and method using microchannel nozzles Grant 7,411,650 - Vogel , et al. August 12, 2	2008-08-12
Immersion Photolithography System and Method Using Microchannel Nozzles App 20080180645 - Vogel; Herman ; et al.	2008-07-31
Laminar flow gas curtains for lithographic applications Grant 7,375,791 - Vogel , et al. May 20, 2	2008-05-20
Method and systems for compact, micro-channel, laminar heat exchanging App 20080035319 - Vogel; Herman	2008-02-14
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods App 20070222906 - Ham; Ronald Van Der ; et al.	2007-09-27
Methods and systems for compact, micro-channel laminar heat exchanging Grant 7,234,514 - Vogel June 26, 2	2007-06-26
Laminar flow gas curtains for lithographic applications App 20070002292 - Vogel; Herman ; et al.	2007-01-04
Immersion lithography proximity sensor having a nozzle shroud with flow curtain Grant 7,140,233 - Vogel November 28, 2	2006-11-28
Immersion lithography proximity sensor having a nozzle shroud with flow curtain App 20060123889 - Vogel; Herman	2006-06-15
Proximity sensor nozzle shroud with flow curtain Grant 7,017,390 - Vogel March 28, 2	2006-03-28
Methods and systems for compact, micro-channel laminar heat exchanging App 20060021744 - Vogel; Herman	2006-02-02
Immersion photolithography system and method using microchannel nozzles App 20050168713 - Vogel, Herman ; et al.	2005-08-04
Method and system for active purging of pellice volumes App 20050074352 - Luo, Ci Florence ; et al.	2005-04-07
Immersion photolithography system and method using microchannel nozzles Grant 6,867,844 - Vogel , et al. March 15, 2	2005-03-15
Immersion photolithography system and method using microchannel nozzles App 20040257544 - Vogel, Herman ; et al.	2004-12-23
Calorimeter having rapid cooling of a heating vessel therein Grant 5,876,118 - Vogel March 2, 1	1999-03-02
Connecting apparatus for conveyance of cryogenic fluid Grant 5,762,381 - Vogel , et al. June 9, 1	1998-06-09
Fluid conveying device with removable connection Grant 5,716,082 - Vogel , et al. February 10, 1	1998-02-10
Apparatus for controlling level of cryogenic liquid Grant 5,671,603 - McCorkle , et al. September 30, 1	1997-09-30
Thermal insulating container for liquified gas Grant 5,655,681 - Vogel , et al. August 12, 1	1997-08-12
Oil cooler for fan jet engines Grant 4,914,904 - Parnes , et al. April 10, 1	1990-04-10
Stress relief support structures and assemblies Grant 4,802,823 - Decko , et al. February 7, 1	1989-02-07

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