Voelkel; Reinhard

Patent Applications and Registrations

Patent applications and USPTO patent grants for Voelkel; Reinhard.The latest application filed is for "illumination system for a microlithographic projection exposure apparatus".

Company Profile

0.10.8

Voelkel; Reinhard - Neuchatel CH

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Illumination system for a microlithographic projection exposure apparatus Grant 9,575,414 - Wangler , et al. February 21, 2	2017-02-21
Device for optical imaging Grant 9,383,557 - Duparre , et al. July 5, 2	2016-07-05
Illumination System For A Microlithographic Projection Exposure Apparatus App 20160077446 - Wangler; Johannes ; et al.	2016-03-17
Illumination system for a microlithographic projection exposure apparatus Grant 9,217,930 - Wangler , et al. December 22, 2	2015-12-22
Optical beam deflecting element, illumination system including same, and related method Grant 9,025,131 - Runde , et al. May 5, 2	2015-05-05
Array of microlenses with integrated illumination Grant 8,792,174 - Schmaelzle , et al. July 29, 2	2014-07-29
Illumination System For A Microlithographic Projection Exposure Apparatus App 20130148092 - Wangler; Johannes ; et al.	2013-06-13
Illumination system for a microlithographic projection exposure apparatus Grant 8,395,756 - Wangler , et al. March 12, 2	2013-03-12
Device for Optical Imaging App 20130057748 - Duparre; Jacques ; et al.	2013-03-07
Optical Beam Deflecting Element, Illumination System Including Same, And Related Method App 20120249988 - Runde; Daniel ; et al.	2012-10-04
Array Of Microlenses With Integrated Illumination App 20110025899 - Schmaelzle; Philipp ; et al.	2011-02-03
Illumination System For A Microlithographic Projection Exposure Apparatus App 20090021716 - Wangler; Johannes ; et al.	2009-01-22

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