Patent | Date |
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Semiconductor testing device Grant 4,799,009 - Tada , et al. January 17, 1 | 1989-01-17 |
Packaged semiconductor device structure including getter material for decreasing gas from a protective organic covering Grant 4,630,095 - Otsuka , et al. December 16, 1 | 1986-12-16 |
Pattern forming method Grant 4,576,678 - Shibata March 18, 1 | 1986-03-18 |
MOS Semiconductor device and method of manufacturing the same Grant 4,523,213 - Konaka , et al. June 11, 1 | 1985-06-11 |
Method of making a bipolar transistor Grant 4,504,332 - Shinada March 12, 1 | 1985-03-12 |
Semiconductor device manufacturing unit Grant 4,487,161 - Hirata , et al. December 11, 1 | 1984-12-11 |
High selectivity plasma etching apparatus Grant 4,438,315 - Toyoda , et al. March 20, 1 | 1984-03-20 |
Positioning apparatus Grant 4,410,951 - Nakamura , et al. October 18, 1 | 1983-10-18 |
Method of manufacturing a single crystal silicon rod Grant 4,378,269 - Matsushita , et al. March 29, 1 | 1983-03-29 |
Method of manufacturing semiconductor device using laser beam crystallized poly/amorphous layer Grant 4,377,902 - Shinada , et al. March 29, 1 | 1983-03-29 |
Method of making fault-free surface zone in semiconductor devices by step-wise heat treating Grant 4,376,657 - Nagasawa , et al. March 15, 1 | 1983-03-15 |
Method of manufacturing a semiconductor device Grant 4,375,999 - Nawata , et al. March 8, 1 | 1983-03-08 |
Method for producing a semiconductor device Grant 4,372,030 - Saitoh February 8, 1 | 1983-02-08 |
Photomask Grant 4,368,230 - Mizukami , et al. January 11, 1 | 1983-01-11 |
Method of fabricating an integrated circuit device utilizing electron beam irradiation and selective oxidation Grant 4,348,804 - Ogawa , et al. September 14, 1 | 1982-09-14 |
Electron gun Grant 4,346,325 - Nakasuji , et al. August 24, 1 | 1982-08-24 |
Method of forming Schottky-I.sup.2 L devices by implantation and laser bombardment Grant 4,338,139 - Shinada July 6, 1 | 1982-07-06 |
Method for manufacturing semiconductor memory devices Grant 4,322,881 - Enomoto , et al. April 6, 1 | 1982-04-06 |
Manufacturing method for semiconductor device Grant 4,321,284 - Yakushiji March 23, 1 | 1982-03-23 |
Method and device for testing a sequential circuit divided into a plurality of partitions Grant 4,317,200 - Wakatsuki , et al. February 23, 1 | 1982-02-23 |
Method of forming nondefective zone in silicon single crystal wafer by two stage-heat treatment Grant 4,314,595 - Yamamoto , et al. February 9, 1 | 1982-02-09 |
Method for manufacturing integrated circuit device Grant 4,313,255 - Shinozaki , et al. February 2, 1 | 1982-02-02 |
Method of producing semiconductor devices by selective laser irradiation and oxidation Grant 4,292,091 - Togei September 29, 1 | 1981-09-29 |
Method of manufacturing semiconductor devices Grant 4,292,156 - Matsumoto , et al. September 29, 1 | 1981-09-29 |
Method of manufacturing a semiconductor device by forming a tungsten silicide or molybdenum silicide electrode Grant 4,283,439 - Higashinakagawa , et al. August 11, 1 | 1981-08-11 |
Method of manufacturing a semiconductor device having conductive and insulating portions formed of a common material utilizing selective oxidation and angled ion-implantation Grant 4,280,854 - Shibata , et al. July 28, 1 | 1981-07-28 |
Semiconductor memory device Grant 4,281,399 - Yamamoto July 28, 1 | 1981-07-28 |
Method of patterning a resist layer for manufacture of a semiconductor element Grant 4,268,607 - Tada May 19, 1 | 1981-05-19 |
Device comprising a circuit for making a beam exposure system effectively draw a repetitive pattern Grant 4,259,724 - Sugiyama March 31, 1 | 1981-03-31 |
Method of inspecting and retouching a photo mask Grant 4,256,778 - Mizukami , et al. March 17, 1 | 1981-03-17 |
Masking technique usable in manufacturing semiconductor devices Grant 4,232,439 - Shibata November 11, 1 | 1980-11-11 |
Light-reflection type pattern forming system Grant 4,231,657 - Iwamatsu November 4, 1 | 1980-11-04 |
Device comprising circuits for holding, in particular, a test data signal Grant 4,225,958 - Funatsu September 30, 1 | 1980-09-30 |
Method for detecting object picture by electron beam Grant 4,219,731 - Migitaka , et al. August 26, 1 | 1980-08-26 |
Process for forming metal and metal silicide films Grant 4,218,291 - Fukuyama , et al. August 19, 1 | 1980-08-19 |
Electron beam exposure apparatus Grant 4,218,621 - Nakasuji , et al. August 19, 1 | 1980-08-19 |
Radiant beam exposure method Grant 4,181,860 - Sumi January 1, 1 | 1980-01-01 |
Method for compressing pattern data and data compression processing circuit for radiant beam exposure apparatuses Grant 4,151,421 - Sumi April 24, 1 | 1979-04-24 |